Abstract
Transmission electron diffraction patterns related to the cross section of layered synthetic microstructures (LSM's) are obtained. By depositing the multilayers onto (111) orientation silicon single-crystal substrates, it is possible to obtain on the same plate both the LSM diffraction pattern and a calibrated one and thus to measure the LSM mean period accurately. Results concerning tungsten–carbon LSM's are presented.
© 1984 Optical Society of America
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