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Single-mode, tunable operation of a XeF excimer laser employing an original interferometer

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Abstract

We report single-mode operation, with transform-limited bandwidth, of a XeF excimer laser utilizing a novel grating-interferometer-based optical cavity. The laser beam has a bandwidth of ∼40 MHz with a half-power tunability of ∼0.7 nm. Laser peak power is ∼10 W.

© 1984 Optical Society of America

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