We report single-mode operation, with transform-limited bandwidth, of a XeF excimer laser utilizing a novel grating-interferometer-based optical cavity. The laser beam has a bandwidth of ∼40 MHz with a half-power tunability of ∼0.7 nm. Laser peak power is ∼10 W.
© 1984 Optical Society of America
Original Manuscript: March 19, 1984
Manuscript Accepted: August 31, 1984
Published: August 1, 1984
E. Armandillo, G. Giuliani, and P. V. M. Lopatriello, "Single-mode, tunable operation of a XeF excimer laser employing an original interferometer," Opt. Lett. 9, 327-329 (1984)