Fabrication and testing of all-telluride rib waveguides for nulling interferometry

doi:10.1364/OME.1.000357

Fabrication and testing of all-telluride rib waveguides for nulling interferometry

C. Vigreux, E. Barthélémy, L. Bastard, J.-E. Broquin, S. Ménard, M. Barillot, G. Parent, and A. Pradel »View Author Affiliations

Optical Materials Express, Vol. 1, Issue 3, pp. 357-364 (2011)
http://dx.doi.org/10.1364/OME.1.000357

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Abstract

The feasibility of two types of all-telluride integrated optics devices being able to single-mode guiding of light in the spectral ranges [6-11 µm] and [10-20 µm], respectively, has been demonstrated. The so-called “rib” waveguides show a several micron thick Te₈₂Ge₁₈ film deposited onto a Te₇₅Ge₁₅Ga₁₀ bulk glass substrate by thermal co-evaporation and further etched by reactive ion etching in CHF₃/O₂/Ar atmosphere. The obtained structures were proved to behave as channel waveguides with a satisfactory confinement of light in the whole spectral ranges. These results allowed validation of our technological solution for the fabrication of micro-components for spatial interferometry.

OCIS Codes
(130.3060) Integrated optics : Infrared
(310.6845) Thin films : Thin film devices and applications

ToC Category:
Materials for Integrated Optics

History
Original Manuscript: April 5, 2011
Revised Manuscript: May 23, 2011
Manuscript Accepted: June 3, 2011
Published: June 7, 2011

Virtual Issues
Advances in Optical Materials (2011) Optical Materials Express

Citation
C. Vigreux, E. Barthélémy, L. Bastard, J.-E. Broquin, S. Ménard, M. Barillot, G. Parent, and A. Pradel, "Fabrication and testing of all-telluride rib waveguides for nulling interferometry," Opt. Mater. Express 1, 357-364 (2011)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-1-3-357

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References

M. C. Fridlund, “Darwin and TPF: technology and prospects,” Proc. SPIE 5491, 227–235 (2004). [CrossRef]
B. Mennesson, M. Ollivier, and C. Ruilier, “Use of single-mode waveguides to correct the optical defects of a nulling interferometer,” J. Opt. Soc. Am. A 19(3), 596–602 (2002). [CrossRef] [PubMed]
V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004). [CrossRef]
L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006). [CrossRef]
C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007). [CrossRef]
Y. Ruan, W. Li, R. Jarvis, N. Madsen, A. Rode, and B. Luther-Davies, “Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching,” Opt. Express 12(21), 5140–5145 (2004). [CrossRef] [PubMed]
N. Hô, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier., “Single-mode low-loss chalcogenide glass waveguides for the mid-infrared,” Opt. Lett. 31(12), 1860–1862 (2006). [CrossRef] [PubMed]
Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009). [CrossRef] [PubMed]
G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010). [CrossRef]
S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006). [CrossRef]
P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).
Y. Sripathi, L. K. Malhotra, and G. B. Reddy, “GaGeTe films as phase-change optical recording media,” Thin Solid Films 270(1-2), 60–64 (1995). [CrossRef]
E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).
J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).
S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010). [CrossRef]
S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008). [CrossRef]
A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009). [CrossRef]
E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010). [CrossRef]
C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011). [CrossRef]

Adv. Funct. Mater.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006). [CrossRef]

Appl. Phys. Lett.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007). [CrossRef]

Astron. Astrophys.

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006). [CrossRef]

J. Non-Cryst. Solids

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009). [CrossRef]
E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010). [CrossRef]

J. Opt. Soc. Am. A

B. Mennesson, M. Ollivier, and C. Ruilier, “Use of single-mode waveguides to correct the optical defects of a nulling interferometer,” J. Opt. Soc. Am. A 19(3), 596–602 (2002). [CrossRef] [PubMed]

J. Optoelectron. Adv. Mater.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).

Microelectron. Eng.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011). [CrossRef]

Opt. Express

Y. Ruan, W. Li, R. Jarvis, N. Madsen, A. Rode, and B. Luther-Davies, “Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching,” Opt. Express 12(21), 5140–5145 (2004). [CrossRef] [PubMed]

Opt. Lett.

Opt. Mater.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010). [CrossRef]

Optoelectron. Adv. Mater.: Rapid Comm.

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).
J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).

Proc. SPIE

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008). [CrossRef]
G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010). [CrossRef]
V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004). [CrossRef]
M. C. Fridlund, “Darwin and TPF: technology and prospects,” Proc. SPIE 5491, 227–235 (2004). [CrossRef]

Thin Solid Films

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, “GaGeTe films as phase-change optical recording media,” Thin Solid Films 270(1-2), 60–64 (1995). [CrossRef]

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