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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 1, Iss. 5 — Sep. 1, 2011
  • pp: 796–802

Soft imprint lithography of a bulk chalcogenide glass

Jiri Orava, Tomas Kohoutek, A. Lindsay Greer, and Hiroshi Fudouzi  »View Author Affiliations


Optical Materials Express, Vol. 1, Issue 5, pp. 796-802 (2011)
http://dx.doi.org/10.1364/OME.1.000796


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Abstract

We report on large-surface-area micro-patterning of a bulk chalcogenide glass by a PDMS soft mould. Micrometre-scale (width ~4μm and depth ~0.8 μm) test patterns such as ribs, channels and a lens array are successfully imprinted into the surface of high refractive index As3S7 bulk glass at 225°C without any applied external pressure. The mean-square roughness of the patterned glass surface is in the range 3 – 10 nm. Soft imprinting of bulk chalcogenide glass is an efficient method for reliable fabrication of optical and photonic devices.

© 2011 OSA

OCIS Codes
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(160.2750) Materials : Glass and other amorphous materials
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.3740) Optical design and fabrication : Lithography

ToC Category:
Artificially Engineered Structures

History
Original Manuscript: June 9, 2011
Revised Manuscript: July 26, 2011
Manuscript Accepted: July 27, 2011
Published: August 3, 2011

Citation
Jiri Orava, Tomas Kohoutek, A. Lindsay Greer, and Hiroshi Fudouzi, "Soft imprint lithography of a bulk chalcogenide glass," Opt. Mater. Express 1, 796-802 (2011)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-1-5-796


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