Dynamic membrane projection lithography [Invited]

doi:10.1364/OME.1.000962

Optical Materials Express

Editor: David J. Hagan
Vol. 1, Iss. 5 — Sep. 1, 2011
pp: 962–969

Dynamic membrane projection lithography [Invited]

D. Bruce Burckel, Joel R. Wendt, Igal Brener, and Michael B. Sinclair »View Author Affiliations

Optical Materials Express, Vol. 1, Issue 5, pp. 962-969 (2011)
http://dx.doi.org/10.1364/OME.1.000962

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Abstract
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References (17)
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Abstract

We present dynamic membrane projection lithography as a method to create three dimensional metallic traces in hemispherical cavities. The technique entails directional evaporation through perforations in a membrane covering a hemispherical unit-cell cavity. The sample is positioned on a rotating stage and tilted with respect to the incident evaporated beam, such that the traces are deposited on the interior face of the cavity. A simple self-aligned version and a more general two-step fabrication version are presented. Furthermore, by incorporating a fixed shutter, both closed-loop and split-loop structures are demonstrated.

OCIS Codes
(160.3918) Materials : Metamaterials
(160.4236) Materials : Nanomaterials
(350.4238) Other areas of optics : Nanophotonics and photonic crystals

ToC Category:
Metamaterials

History
Original Manuscript: June 24, 2011
Revised Manuscript: August 16, 2011
Manuscript Accepted: August 16, 2011
Published: August 19, 2011

Virtual Issues
Nanoplasmonics and Metamaterials (2011) Optical Materials Express

Citation
D. Bruce Burckel, Joel R. Wendt, Igal Brener, and Michael B. Sinclair, "Dynamic membrane projection lithography [Invited]," Opt. Mater. Express 1, 962-969 (2011)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-1-5-962

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References

E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett.58(20), 2059–2062 (1987). [CrossRef] [PubMed]
S. John, “Strong localization of photons in certain disordered dielectric superlattices,” Phys. Rev. Lett.58(23), 2486–2489 (1987). [CrossRef] [PubMed]
E. Ozbay, “Plasmonics: merging photonics and electronics at nanoscale dimensions,” Science311(5758), 189–193 (2006). [CrossRef] [PubMed]
G. W. Bryant, F. J. García de Abajo, and J. Aizpurua, “Mapping the plasmon resonances of metallic nanoantennas,” Nano Lett.8(2), 631–636 (2008). [CrossRef] [PubMed]
J. Aizpurua, P. Hanarp, D. S. Sutherland, M. Käll, G. W. Bryant, and F. J. García de Abajo, “Optical properties of gold nanorings,” Phys. Rev. Lett.90(5), 057401 (2003). [CrossRef] [PubMed]
C. M. Soukoulis and M. Wegener, “Materials science. Optical metamaterials—more bulky and less lossy,” Science330(6011), 1633–1634 (2010). [CrossRef] [PubMed]
H. Wang, D. W. Brandl, F. Le, P. Nordlander, and N. J. Halas, “Nanorice: a hybrid plasmonic nanostructure,” Nano Lett.6(4), 827–832 (2006). [CrossRef] [PubMed]
E. Prodan, C. Radloff, N. J. Halas, and P. Nordlander, “A hybridization model for the plasmon response of complex nanostructures,” Science302(5644), 419–422 (2003). [CrossRef] [PubMed]
M. Liu, T.-W. Lee, S. K. Gray, P. Guyot-Sionnest, and M. Pelton, “Excitation of dark plasmons in metal nanoparticles by a localized emitter,” Phys. Rev. Lett.102(10), 107401 (2009). [CrossRef] [PubMed]
J. Liu, A. I. Maaroof, L. Wieczorek, and M. B. Cortie, “Fabrication of hollow metal nanocaps and their red-shifted optical absorption spectra,” Adv. Mater. (Deerfield Beach Fla.)17(10), 1276–1281 (2005). [CrossRef]
N. A. Mirin and N. J. Halas, “Light-bending nanoparticles,” Nano Lett.9(3), 1255–1259 (2009). [CrossRef] [PubMed]
D. B. Burckel, J. R. Wendt, G. A. Ten Eyck, J. C. Ginn, A. R. Ellis, I. Brener, and M. B. Sinclair, “Micrometer-scale cubic unit cell 3D metamaterial layers,” Adv. Mater. (Deerfield Beach Fla.)22(44), 5053–5057 (2010). [CrossRef] [PubMed]
D. B. Burckel, J. R. Wendt, G. A. Ten Eyck, A. R. Ellis, I. Brener, and M. B. Sinclair, “Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography,” Adv. Mater. (Deerfield Beach Fla.)22(29), 3171–3175 (2010). [CrossRef] [PubMed]
M. Graff, S. K. Mohanty, E. Moss, and A. B. Frazier, “Microstenciling: a generic technology for microscale patterning of vapor deposited materials,” J. Microelectromech. Syst.13(6), 956–962 (2004). [CrossRef]
N. Takano, L. M. Doeswijk, M. A. F. Boogaart, J. Auerswald, H. F. Knapp, O. Dubochet, T. Hessler, and J. Brugger, “Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems,” J. Micromech. Microeng.16(8), 1606–1613 (2006). [CrossRef]
S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-throughput nanofabrication of infrared plasmonic nanoantenna arrays for vibrational nanospectroscopy,” Nano Lett.10(7), 2511–2518 (2010). [CrossRef] [PubMed]
L. Novotny and N. van Hulst, “Antennas for light,” Nat. Photonics5(2), 83–90 (2011). [CrossRef]

Other

E. Yablonovitch, “Inhibited spontaneous emission in solid-state physics and electronics,” Phys. Rev. Lett.58(20), 2059–2062 (1987). [CrossRef] [PubMed]
S. John, “Strong localization of photons in certain disordered dielectric superlattices,” Phys. Rev. Lett.58(23), 2486–2489 (1987). [CrossRef] [PubMed]
E. Ozbay, “Plasmonics: merging photonics and electronics at nanoscale dimensions,” Science311(5758), 189–193 (2006). [CrossRef] [PubMed]
G. W. Bryant, F. J. García de Abajo, and J. Aizpurua, “Mapping the plasmon resonances of metallic nanoantennas,” Nano Lett.8(2), 631–636 (2008). [CrossRef] [PubMed]
J. Aizpurua, P. Hanarp, D. S. Sutherland, M. Käll, G. W. Bryant, and F. J. García de Abajo, “Optical properties of gold nanorings,” Phys. Rev. Lett.90(5), 057401 (2003). [CrossRef] [PubMed]
C. M. Soukoulis and M. Wegener, “Materials science. Optical metamaterials—more bulky and less lossy,” Science330(6011), 1633–1634 (2010). [CrossRef] [PubMed]
H. Wang, D. W. Brandl, F. Le, P. Nordlander, and N. J. Halas, “Nanorice: a hybrid plasmonic nanostructure,” Nano Lett.6(4), 827–832 (2006). [CrossRef] [PubMed]
E. Prodan, C. Radloff, N. J. Halas, and P. Nordlander, “A hybridization model for the plasmon response of complex nanostructures,” Science302(5644), 419–422 (2003). [CrossRef] [PubMed]
M. Liu, T.-W. Lee, S. K. Gray, P. Guyot-Sionnest, and M. Pelton, “Excitation of dark plasmons in metal nanoparticles by a localized emitter,” Phys. Rev. Lett.102(10), 107401 (2009). [CrossRef] [PubMed]
J. Liu, A. I. Maaroof, L. Wieczorek, and M. B. Cortie, “Fabrication of hollow metal nanocaps and their red-shifted optical absorption spectra,” Adv. Mater. (Deerfield Beach Fla.)17(10), 1276–1281 (2005). [CrossRef]
N. A. Mirin and N. J. Halas, “Light-bending nanoparticles,” Nano Lett.9(3), 1255–1259 (2009). [CrossRef] [PubMed]
D. B. Burckel, J. R. Wendt, G. A. Ten Eyck, J. C. Ginn, A. R. Ellis, I. Brener, and M. B. Sinclair, “Micrometer-scale cubic unit cell 3D metamaterial layers,” Adv. Mater. (Deerfield Beach Fla.)22(44), 5053–5057 (2010). [CrossRef] [PubMed]
D. B. Burckel, J. R. Wendt, G. A. Ten Eyck, A. R. Ellis, I. Brener, and M. B. Sinclair, “Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography,” Adv. Mater. (Deerfield Beach Fla.)22(29), 3171–3175 (2010). [CrossRef] [PubMed]
M. Graff, S. K. Mohanty, E. Moss, and A. B. Frazier, “Microstenciling: a generic technology for microscale patterning of vapor deposited materials,” J. Microelectromech. Syst.13(6), 956–962 (2004). [CrossRef]
N. Takano, L. M. Doeswijk, M. A. F. Boogaart, J. Auerswald, H. F. Knapp, O. Dubochet, T. Hessler, and J. Brugger, “Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems,” J. Micromech. Microeng.16(8), 1606–1613 (2006). [CrossRef]
S. Aksu, A. A. Yanik, R. Adato, A. Artar, M. Huang, and H. Altug, “High-throughput nanofabrication of infrared plasmonic nanoantenna arrays for vibrational nanospectroscopy,” Nano Lett.10(7), 2511–2518 (2010). [CrossRef] [PubMed]
L. Novotny and N. van Hulst, “Antennas for light,” Nat. Photonics5(2), 83–90 (2011). [CrossRef]

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