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Oxides and nitrides as alternative plasmonic materials in the optical range [Invited]Gururaj V. Naik, Jongbum Kim, and Alexandra Boltasseva »View Author Affiliations
Gururaj V. Naik,1
Jongbum Kim,1
and Alexandra Boltasseva1,2,3,*
1Birck Nanotechnology Center and School of Electrical & Computer Engineering, Purdue University, West Lafayette, Indiana 47906, USA 2DTU Fotonik, Technical University of Denmark, Lyngby 2800, Denmark 3Erlangen Graduate School in Advanced Optical Technologies (SAOT), Friedrich-Alexander-Universität Erlangen-Nürnberg, 91052 Erlangen, Germany *Corresponding author: aeb@purdue.edu |
Optical Materials Express, Vol. 1, Issue 6, pp. 1090-1099 (2011)
http://dx.doi.org/10.1364/OME.1.001090
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Abstract
As alternatives to conventional metals, new plasmonic materials offer many advantages in the rapidly growing fields of plasmonics and metamaterials. These advantages include low intrinsic loss, semiconductor-based design, compatibility with standard nanofabrication processes, tunability, and others. Transparent conducting oxides such as Al:ZnO, Ga:ZnO and indium-tin-oxide (ITO) enable many high-performance metamaterial devices operating in the near-IR. Transition-metal nitrides such as TiN or ZrN can be substitutes for conventional metals in the visible frequencies. In this paper we provide the details of fabrication and characterization of these new materials and discuss their suitability for a number of metamaterial and plasmonic applications.
© 2011 OSA
OCIS Codes
(310.6860) Thin films : Thin films, optical properties
(160.3918) Materials : Metamaterials
(160.4236) Materials : Nanomaterials
(250.5403) Optoelectronics : Plasmonics
ToC Category:
Plasmonics
History
Original Manuscript: July 15, 2011
Revised Manuscript: August 29, 2011
Manuscript Accepted: August 30, 2011
Published: September 6, 2011
Virtual Issues
Nanoplasmonics and Metamaterials (2011) Optical Materials Express
Citation
Gururaj V. Naik, Jongbum Kim, and Alexandra Boltasseva, "Oxides and nitrides as alternative plasmonic materials in the optical range [Invited]," Opt. Mater. Express 1, 1090-1099 (2011)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-1-6-1090
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References
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- S. Kehr, Y. Liu, L. Martin, P. Yu, M. Gajek, S. Yang, C. Yang, M. Wenzel, R. Jacob, H. von Ribbeck, M. Helm, X. Zhang, L. Eng, and R. Ramesh, “Near-field examination of perovskite-based superlenses and superlens-enhanced probe-object coupling,” Nat. Commun.2, 249–249 (2011). [CrossRef] [PubMed]
- J. Luther, P. Jain, T. Ewers, and A. Alivisatos, “Localized surface plasmon resonances arising from free carriers in doped quantum dots,” Nat. Mater.10, 361–366 (2011). [CrossRef] [PubMed]
- D. Slocum, S. Inampudi, D. Adams, S. Vangala, N. Kuhta, W. Goodhue, V. Podolskiy, and D. Wasserman, “Funneling light through a subwavelength aperture with epsilon-near-zero materials,” Arxiv preprint arXiv:1103.6013 (2011).
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- D. Schurig, J. Mock, B. Justice, S. Cummer, J. Pendry, A. Starr, and D. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science314, 977–980 (2006). [CrossRef] [PubMed]
- A. Kildishev and V. Shalaev, “Engineering space for light via transformation optics,” Opt. Lett.33, 43–45 (2008). [CrossRef]
- P. Johnson and R. Christy, “Optical constants of the noble metals,” Phys. Rev. B6, 4370–4379 (1972). [CrossRef]
- G. Naik and A. Boltasseva, “A comparative study of semiconductor-based plasmonic metamaterials,” Metamaterials5, 1–7 (2011). [CrossRef]
- M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. Barnakov, and V. Podolskiy, “Transparent conductive oxides: plasmonic materials for telecom wavelengths,” Appl. Phys. Lett.99, 021101 (2011). [CrossRef]
- V. Drachev, U. Chettiar, A. Kildishev, H. Yuan, W. Cai, and V. Shalaev, “The Ag dielectric function in plasmonic metamaterials,” Opt. Express16, 1186–1195 (2008). [CrossRef] [PubMed]
- G. Naik, J. Schroeder, T. Sands, and A. Boltasseva, “Titanium nitride as a plasmonic material for visible wavelengths,” Arxiv preprint arXiv:1011.4896 (2010).
- E. Narimanov and A. Kildishev, “Optical black hole: broadband omnidirectional light absorber,” Appl. Phys. Lett.95, 041106 (2009). [CrossRef]
- H. Kim, J. Horwitz, S. Qadri, and D. Chrisey, “Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser deposition,” Thin Solid Films420, 107–111 (2002). [CrossRef]
- B. Lee, T. Kim, and S. Jeong, “Growth and characterization of single crystalline Ga-doped ZnO films using RF magnetron sputtering,” J. Phys. D: Appl. Phys.39, 957–961 (2006). [CrossRef]
- A. Gālca, M. Secu, A. Vlad, and J. Pedarnig, “Optical properties of zinc oxide thin films doped with aluminum and lithium,” Thin Solid Films518, 4603–4606 (2010). [CrossRef]
- D. Slocum, S. Inampudi, D. Adams, S. Vangala, N. Kuhta, W. Goodhue, V. Podolskiy, and D. Wasserman, “Funneling light through a subwavelength aperture with epsilon-near-zero materials,” Arxiv preprint arXiv:1103.6013 (2011).
- J. Luther, P. Jain, T. Ewers, and A. Alivisatos, “Localized surface plasmon resonances arising from free carriers in doped quantum dots,” Nat. Mater.10, 361–366 (2011). [CrossRef] [PubMed]
- D. Horwat, M. Jullien, F. Capon, J. Pierson, J. Andersson, and J. Endrino, “On the deactivation of the dopant and electronic structure in reactively sputtered transparent Al-doped ZnO thin films,” J. Phys. D: Appl. Phys.43, 132003 (2010). [CrossRef]
- A. Suzuki, M. Nakamura, R. Michihata, T. Aoki, T. Matsushita, and M. Okuda, “Ultrathin Al-doped transparent conducting zinc oxide films fabricated by pulsed laser deposition,” Thin Solid Films517, 1478–1481 (2008). [CrossRef]
- N. Ashcroft and N. Mermin, Solid State Physics (Saunders College, 1976).
- A. Boltasseva and H. Atwater, “Low-loss plasmonic metamaterials,” Science331, 290–291 (2011). [CrossRef] [PubMed]
- E. Feigenbaum, K. Diest, and H. Atwater, “Unity-order index change in transparent conducting oxides at visible frequencies,” Nano Lett.10, 2111–2116 (2010). [CrossRef] [PubMed]
- M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. Barnakov, and V. Podolskiy, “Transparent conductive oxides: plasmonic materials for telecom wavelengths,” Appl. Phys. Lett.99, 021101 (2011). [CrossRef]
- M. Lee, J. Lim, J. Bang, W. Lee, and J. Myoung, “Effect of the thickness and hydrogen treatment on the properties of Ga-doped ZnO transparent conductive films,” Appl. Surf. Sci.255, 3195–3200 (2008). [CrossRef]
- M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. Barnakov, and V. Podolskiy, “Transparent conductive oxides: plasmonic materials for telecom wavelengths,” Appl. Phys. Lett.99, 021101 (2011). [CrossRef]
- B. Johansson, J. Sundgren, J. Greene, A. Rockett, and S. Barnett, “Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering,” J. Vac. Sci. Technol. A3, 303–307 (1985). [CrossRef]
- D. Bobb, G. Zhu, M. Mayy, A. Gavrilenko, P. Mead, V. Gavrilenko, and M. Noginov, “Engineering of low-loss metal for nanoplasmonic and metamaterials applications,” Appl. Phys. Lett.95, 151102 (2009). [CrossRef]
- A. Boltasseva and H. Atwater, “Low-loss plasmonic metamaterials,” Science331, 290–291 (2011). [CrossRef] [PubMed]
- G. Naik and A. Boltasseva, “A comparative study of semiconductor-based plasmonic metamaterials,” Metamaterials5, 1–7 (2011). [CrossRef]
- P. West, S. Ishii, G. Naik, N. Emani, V. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photon. Rev.4, 795–808 (2010). [CrossRef]
- G. V. Naik and A. Boltasseva, “Semiconductors for plasmonics and metamaterials,” Phys. Status Solidi (RRL)4, 295–297 (2010). [CrossRef]
- G. Naik and A. Boltasseva, “Ceramic plasmonic components for optical metamaterials,” in “Quantum Electronics and Laser Science Conference” (Optical Society of America, 2011).
- G. Naik, J. Schroeder, T. Sands, and A. Boltasseva, “Titanium nitride as a plasmonic material for visible wavelengths,” Arxiv preprint arXiv:1011.4896 (2010).
- D. Horwat, M. Jullien, F. Capon, J. Pierson, J. Andersson, and J. Endrino, “On the deactivation of the dopant and electronic structure in reactively sputtered transparent Al-doped ZnO thin films,” J. Phys. D: Appl. Phys.43, 132003 (2010). [CrossRef]
- D.-G. Park, T.-H. Cha, K.-Y. Lim, H.-J. Cho, T.-K. Kim, S.-A. Jang, Y.-S. Suh, V. Misra, I.-S. Yeo, J.-S. Roh, J. W. Park, and H.-K. Yoon, “Robust ternary metal gate electrodes for dual gate CMOS devices,” in “Electron Devices Meeting, 2001. IEDM Technical Digest. International,” (IEEE, 2001), pp. 30.6.1–30.6.4. [CrossRef]
- W.-C. Chen, Y.-R. Lin, X.-J. Guo, and S.-T. Wu, “Heteroepitaxial TiN of very low mosaic spread on Al2O3,” Jpn. J. Appl. Phys.42, 208–212 (2003). [CrossRef]
- D.-G. Park, T.-H. Cha, K.-Y. Lim, H.-J. Cho, T.-K. Kim, S.-A. Jang, Y.-S. Suh, V. Misra, I.-S. Yeo, J.-S. Roh, J. W. Park, and H.-K. Yoon, “Robust ternary metal gate electrodes for dual gate CMOS devices,” in “Electron Devices Meeting, 2001. IEDM Technical Digest. International,” (IEEE, 2001), pp. 30.6.1–30.6.4. [CrossRef]
- H. Kim, J. Horwitz, S. Qadri, and D. Chrisey, “Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser deposition,” Thin Solid Films420, 107–111 (2002). [CrossRef]
- P. Johnson and R. Christy, “Optical constants of the noble metals,” Phys. Rev. B6, 4370–4379 (1972). [CrossRef]
- D. Schurig, J. Mock, B. Justice, S. Cummer, J. Pendry, A. Starr, and D. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science314, 977–980 (2006). [CrossRef] [PubMed]
- E. Feigenbaum, K. Diest, and H. Atwater, “Unity-order index change in transparent conducting oxides at visible frequencies,” Nano Lett.10, 2111–2116 (2010). [CrossRef] [PubMed]
- K. Ellmer and R. Mientus, “Carrier transport in polycrystalline ITO and ZnO:Al II: the influence of grain barriers and boundaries,” Thin Solid Films516, 5829–5835 (2008). [CrossRef]
- P. West, S. Ishii, G. Naik, N. Emani, V. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photon. Rev.4, 795–808 (2010). [CrossRef]
- D. Horwat, M. Jullien, F. Capon, J. Pierson, J. Andersson, and J. Endrino, “On the deactivation of the dopant and electronic structure in reactively sputtered transparent Al-doped ZnO thin films,” J. Phys. D: Appl. Phys.43, 132003 (2010). [CrossRef]
- S. Kehr, Y. Liu, L. Martin, P. Yu, M. Gajek, S. Yang, C. Yang, M. Wenzel, R. Jacob, H. von Ribbeck, M. Helm, X. Zhang, L. Eng, and R. Ramesh, “Near-field examination of perovskite-based superlenses and superlens-enhanced probe-object coupling,” Nat. Commun.2, 249–249 (2011). [CrossRef] [PubMed]
- J. Luther, P. Jain, T. Ewers, and A. Alivisatos, “Localized surface plasmon resonances arising from free carriers in doped quantum dots,” Nat. Mater.10, 361–366 (2011). [CrossRef] [PubMed]
- N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science308, 534–537 (2005). [CrossRef] [PubMed]
- E. Feigenbaum, K. Diest, and H. Atwater, “Unity-order index change in transparent conducting oxides at visible frequencies,” Nano Lett.10, 2111–2116 (2010). [CrossRef] [PubMed]
- S. Kehr, Y. Liu, L. Martin, P. Yu, M. Gajek, S. Yang, C. Yang, M. Wenzel, R. Jacob, H. von Ribbeck, M. Helm, X. Zhang, L. Eng, and R. Ramesh, “Near-field examination of perovskite-based superlenses and superlens-enhanced probe-object coupling,” Nat. Commun.2, 249–249 (2011). [CrossRef] [PubMed]
- A. Gālca, M. Secu, A. Vlad, and J. Pedarnig, “Optical properties of zinc oxide thin films doped with aluminum and lithium,” Thin Solid Films518, 4603–4606 (2010). [CrossRef]
- D. Bobb, G. Zhu, M. Mayy, A. Gavrilenko, P. Mead, V. Gavrilenko, and M. Noginov, “Engineering of low-loss metal for nanoplasmonic and metamaterials applications,” Appl. Phys. Lett.95, 151102 (2009). [CrossRef]
- D. Bobb, G. Zhu, M. Mayy, A. Gavrilenko, P. Mead, V. Gavrilenko, and M. Noginov, “Engineering of low-loss metal for nanoplasmonic and metamaterials applications,” Appl. Phys. Lett.95, 151102 (2009). [CrossRef]
- D. Slocum, S. Inampudi, D. Adams, S. Vangala, N. Kuhta, W. Goodhue, V. Podolskiy, and D. Wasserman, “Funneling light through a subwavelength aperture with epsilon-near-zero materials,” Arxiv preprint arXiv:1103.6013 (2011).
- B. Johansson, J. Sundgren, J. Greene, A. Rockett, and S. Barnett, “Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering,” J. Vac. Sci. Technol. A3, 303–307 (1985). [CrossRef]
- M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. Barnakov, and V. Podolskiy, “Transparent conductive oxides: plasmonic materials for telecom wavelengths,” Appl. Phys. Lett.99, 021101 (2011). [CrossRef]
- G. Zhu, L. Gu, J. Kitur, A. Urbas, J. Vella, and M. Noginov, “Organic materials with negative and controllable electric permittivity,” in “Quantum Electronics and Laser Science Conference” (Optical Society of America, 2011).
- W.-C. Chen, Y.-R. Lin, X.-J. Guo, and S.-T. Wu, “Heteroepitaxial TiN of very low mosaic spread on Al2O3,” Jpn. J. Appl. Phys.42, 208–212 (2003). [CrossRef]
- B. Karlsson, R. Shimshock, B. Seraphin, and J. Haygarth, “Optical properties of CVD-coated TiN, ZrN and HfN,” Phys. Scripta25, 775–779 (1982). [CrossRef]
- S. Kehr, Y. Liu, L. Martin, P. Yu, M. Gajek, S. Yang, C. Yang, M. Wenzel, R. Jacob, H. von Ribbeck, M. Helm, X. Zhang, L. Eng, and R. Ramesh, “Near-field examination of perovskite-based superlenses and superlens-enhanced probe-object coupling,” Nat. Commun.2, 249–249 (2011). [CrossRef] [PubMed]
- D. Horwat, M. Jullien, F. Capon, J. Pierson, J. Andersson, and J. Endrino, “On the deactivation of the dopant and electronic structure in reactively sputtered transparent Al-doped ZnO thin films,” J. Phys. D: Appl. Phys.43, 132003 (2010). [CrossRef]
- H. Kim, J. Horwitz, S. Qadri, and D. Chrisey, “Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser deposition,” Thin Solid Films420, 107–111 (2002). [CrossRef]
- D. Slocum, S. Inampudi, D. Adams, S. Vangala, N. Kuhta, W. Goodhue, V. Podolskiy, and D. Wasserman, “Funneling light through a subwavelength aperture with epsilon-near-zero materials,” Arxiv preprint arXiv:1103.6013 (2011).
- P. West, S. Ishii, G. Naik, N. Emani, V. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photon. Rev.4, 795–808 (2010). [CrossRef]
- S. Kehr, Y. Liu, L. Martin, P. Yu, M. Gajek, S. Yang, C. Yang, M. Wenzel, R. Jacob, H. von Ribbeck, M. Helm, X. Zhang, L. Eng, and R. Ramesh, “Near-field examination of perovskite-based superlenses and superlens-enhanced probe-object coupling,” Nat. Commun.2, 249–249 (2011). [CrossRef] [PubMed]
- J. Luther, P. Jain, T. Ewers, and A. Alivisatos, “Localized surface plasmon resonances arising from free carriers in doped quantum dots,” Nat. Mater.10, 361–366 (2011). [CrossRef] [PubMed]
- M. Yoon, S. Lee, H. Park, H. Kim, and M. Jang, “Solid solubility limits of Ga and Al in ZnO,” J. Mater. Sci. Lett.21, 1703–1704 (2002). [CrossRef]
- D.-G. Park, T.-H. Cha, K.-Y. Lim, H.-J. Cho, T.-K. Kim, S.-A. Jang, Y.-S. Suh, V. Misra, I.-S. Yeo, J.-S. Roh, J. W. Park, and H.-K. Yoon, “Robust ternary metal gate electrodes for dual gate CMOS devices,” in “Electron Devices Meeting, 2001. IEDM Technical Digest. International,” (IEEE, 2001), pp. 30.6.1–30.6.4. [CrossRef]
- B. Lee, T. Kim, and S. Jeong, “Growth and characterization of single crystalline Ga-doped ZnO films using RF magnetron sputtering,” J. Phys. D: Appl. Phys.39, 957–961 (2006). [CrossRef]
- B. Johansson, J. Sundgren, J. Greene, A. Rockett, and S. Barnett, “Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering,” J. Vac. Sci. Technol. A3, 303–307 (1985). [CrossRef]
- P. Johnson and R. Christy, “Optical constants of the noble metals,” Phys. Rev. B6, 4370–4379 (1972). [CrossRef]
- D. Horwat, M. Jullien, F. Capon, J. Pierson, J. Andersson, and J. Endrino, “On the deactivation of the dopant and electronic structure in reactively sputtered transparent Al-doped ZnO thin films,” J. Phys. D: Appl. Phys.43, 132003 (2010). [CrossRef]
- D. Schurig, J. Mock, B. Justice, S. Cummer, J. Pendry, A. Starr, and D. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science314, 977–980 (2006). [CrossRef] [PubMed]
- B. Karlsson, R. Shimshock, B. Seraphin, and J. Haygarth, “Optical properties of CVD-coated TiN, ZrN and HfN,” Phys. Scripta25, 775–779 (1982). [CrossRef]
- S. Kehr, Y. Liu, L. Martin, P. Yu, M. Gajek, S. Yang, C. Yang, M. Wenzel, R. Jacob, H. von Ribbeck, M. Helm, X. Zhang, L. Eng, and R. Ramesh, “Near-field examination of perovskite-based superlenses and superlens-enhanced probe-object coupling,” Nat. Commun.2, 249–249 (2011). [CrossRef] [PubMed]
- E. Narimanov and A. Kildishev, “Optical black hole: broadband omnidirectional light absorber,” Appl. Phys. Lett.95, 041106 (2009). [CrossRef]
- V. Drachev, U. Chettiar, A. Kildishev, H. Yuan, W. Cai, and V. Shalaev, “The Ag dielectric function in plasmonic metamaterials,” Opt. Express16, 1186–1195 (2008). [CrossRef] [PubMed]
- A. Kildishev and V. Shalaev, “Engineering space for light via transformation optics,” Opt. Lett.33, 43–45 (2008). [CrossRef]
- D. Kim, M. Park, H. Lee, and G. Lee, “Thickness dependence of electrical properties of ITO film deposited on a plastic substrate by RF magnetron sputtering,” Appl. Surf. Sci.253, 409–411 (2006). [CrossRef]
- M. Yoon, S. Lee, H. Park, H. Kim, and M. Jang, “Solid solubility limits of Ga and Al in ZnO,” J. Mater. Sci. Lett.21, 1703–1704 (2002). [CrossRef]
- H. Kim, J. Horwitz, S. Qadri, and D. Chrisey, “Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser deposition,” Thin Solid Films420, 107–111 (2002). [CrossRef]
- K. Kim, K. Park, and D. Ma, “Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering,” J. Appl. Phys.81, 7764–7772 (1997). [CrossRef]
- B. Lee, T. Kim, and S. Jeong, “Growth and characterization of single crystalline Ga-doped ZnO films using RF magnetron sputtering,” J. Phys. D: Appl. Phys.39, 957–961 (2006). [CrossRef]
- D.-G. Park, T.-H. Cha, K.-Y. Lim, H.-J. Cho, T.-K. Kim, S.-A. Jang, Y.-S. Suh, V. Misra, I.-S. Yeo, J.-S. Roh, J. W. Park, and H.-K. Yoon, “Robust ternary metal gate electrodes for dual gate CMOS devices,” in “Electron Devices Meeting, 2001. IEDM Technical Digest. International,” (IEEE, 2001), pp. 30.6.1–30.6.4. [CrossRef]
- G. Zhu, L. Gu, J. Kitur, A. Urbas, J. Vella, and M. Noginov, “Organic materials with negative and controllable electric permittivity,” in “Quantum Electronics and Laser Science Conference” (Optical Society of America, 2011).
- T. Minami, T. Miyata, Y. Ohtani, and T. Kuboi, “Effect of thickness on the stability of transparent conducting impurity-doped ZnO thin films in a high humidity environment,” Phys. Status Solidi (RRL)1, R31–R33 (2007). [CrossRef]
- D. Slocum, S. Inampudi, D. Adams, S. Vangala, N. Kuhta, W. Goodhue, V. Podolskiy, and D. Wasserman, “Funneling light through a subwavelength aperture with epsilon-near-zero materials,” Arxiv preprint arXiv:1103.6013 (2011).
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Appl. Phys. Lett.
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- E. Narimanov and A. Kildishev, “Optical black hole: broadband omnidirectional light absorber,” Appl. Phys. Lett.95, 041106 (2009). [CrossRef]
Appl. Surf. Sci.
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- D. Kim, M. Park, H. Lee, and G. Lee, “Thickness dependence of electrical properties of ITO film deposited on a plastic substrate by RF magnetron sputtering,” Appl. Surf. Sci.253, 409–411 (2006). [CrossRef]
J. Appl. Phys.
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J. Mater. Sci. Lett.
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J. Phys. D: Appl. Phys.
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- B. Lee, T. Kim, and S. Jeong, “Growth and characterization of single crystalline Ga-doped ZnO films using RF magnetron sputtering,” J. Phys. D: Appl. Phys.39, 957–961 (2006). [CrossRef]
J. Vac. Sci. Technol. A
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- B. Johansson, J. Sundgren, J. Greene, A. Rockett, and S. Barnett, “Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering,” J. Vac. Sci. Technol. A3, 303–307 (1985). [CrossRef]
Jpn. J. Appl. Phys.
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Laser Photon. Rev.
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Metamaterials
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Nano Lett.
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Nat. Commun.
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Nat. Mater.
- J. Luther, P. Jain, T. Ewers, and A. Alivisatos, “Localized surface plasmon resonances arising from free carriers in doped quantum dots,” Nat. Mater.10, 361–366 (2011). [CrossRef] [PubMed]
Opt. Express
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Phys. Rev. B
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Phys. Scripta
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Phys. Status Solidi (RRL)
- T. Minami, T. Miyata, Y. Ohtani, and T. Kuboi, “Effect of thickness on the stability of transparent conducting impurity-doped ZnO thin films in a high humidity environment,” Phys. Status Solidi (RRL)1, R31–R33 (2007). [CrossRef]
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Science
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Thin Solid Films
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Other
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2011, Boltasseva, Science
- A. Boltasseva and H. Atwater, “Low-loss plasmonic metamaterials,” Science331, 290–291 (2011). [CrossRef] [PubMed]
- S. Kehr, Y. Liu, L. Martin, P. Yu, M. Gajek, S. Yang, C. Yang, M. Wenzel, R. Jacob, H. von Ribbeck, M. Helm, X. Zhang, L. Eng, and R. Ramesh, “Near-field examination of perovskite-based superlenses and superlens-enhanced probe-object coupling,” Nat. Commun.2, 249–249 (2011). [CrossRef] [PubMed]
- J. Luther, P. Jain, T. Ewers, and A. Alivisatos, “Localized surface plasmon resonances arising from free carriers in doped quantum dots,” Nat. Mater.10, 361–366 (2011). [CrossRef] [PubMed]
- G. Naik and A. Boltasseva, “A comparative study of semiconductor-based plasmonic metamaterials,” Metamaterials5, 1–7 (2011). [CrossRef]
- M. Noginov, L. Gu, J. Livenere, G. Zhu, A. Pradhan, R. Mundle, M. Bahoura, Y. Barnakov, and V. Podolskiy, “Transparent conductive oxides: plasmonic materials for telecom wavelengths,” Appl. Phys. Lett.99, 021101 (2011). [CrossRef]
- A. Gālca, M. Secu, A. Vlad, and J. Pedarnig, “Optical properties of zinc oxide thin films doped with aluminum and lithium,” Thin Solid Films518, 4603–4606 (2010). [CrossRef]
- E. Feigenbaum, K. Diest, and H. Atwater, “Unity-order index change in transparent conducting oxides at visible frequencies,” Nano Lett.10, 2111–2116 (2010). [CrossRef] [PubMed]
- P. West, S. Ishii, G. Naik, N. Emani, V. Shalaev, and A. Boltasseva, “Searching for better plasmonic materials,” Laser Photon. Rev.4, 795–808 (2010). [CrossRef]
- G. V. Naik and A. Boltasseva, “Semiconductors for plasmonics and metamaterials,” Phys. Status Solidi (RRL)4, 295–297 (2010). [CrossRef]
- D. Horwat, M. Jullien, F. Capon, J. Pierson, J. Andersson, and J. Endrino, “On the deactivation of the dopant and electronic structure in reactively sputtered transparent Al-doped ZnO thin films,” J. Phys. D: Appl. Phys.43, 132003 (2010). [CrossRef]
- D. Bobb, G. Zhu, M. Mayy, A. Gavrilenko, P. Mead, V. Gavrilenko, and M. Noginov, “Engineering of low-loss metal for nanoplasmonic and metamaterials applications,” Appl. Phys. Lett.95, 151102 (2009). [CrossRef]
- E. Narimanov and A. Kildishev, “Optical black hole: broadband omnidirectional light absorber,” Appl. Phys. Lett.95, 041106 (2009). [CrossRef]
- A. Suzuki, M. Nakamura, R. Michihata, T. Aoki, T. Matsushita, and M. Okuda, “Ultrathin Al-doped transparent conducting zinc oxide films fabricated by pulsed laser deposition,” Thin Solid Films517, 1478–1481 (2008). [CrossRef]
- M. Lee, J. Lim, J. Bang, W. Lee, and J. Myoung, “Effect of the thickness and hydrogen treatment on the properties of Ga-doped ZnO transparent conductive films,” Appl. Surf. Sci.255, 3195–3200 (2008). [CrossRef]
- K. Ellmer and R. Mientus, “Carrier transport in polycrystalline ITO and ZnO:Al II: the influence of grain barriers and boundaries,” Thin Solid Films516, 5829–5835 (2008). [CrossRef]
- T. Minami, T. Miyata, Y. Ohtani, and T. Kuboi, “Effect of thickness on the stability of transparent conducting impurity-doped ZnO thin films in a high humidity environment,” Phys. Status Solidi (RRL)1, R31–R33 (2007). [CrossRef]
- Z. Liu, H. Lee, Y. Xiong, C. Sun, and X. Zhang, “Far-field optical hyperlens magnifying sub-diffraction-limited objects,” Science315, 1686–1686 (2007). [CrossRef] [PubMed]
- D. Schurig, J. Mock, B. Justice, S. Cummer, J. Pendry, A. Starr, and D. Smith, “Metamaterial electromagnetic cloak at microwave frequencies,” Science314, 977–980 (2006). [CrossRef] [PubMed]
- B. Lee, T. Kim, and S. Jeong, “Growth and characterization of single crystalline Ga-doped ZnO films using RF magnetron sputtering,” J. Phys. D: Appl. Phys.39, 957–961 (2006). [CrossRef]
- D. Kim, M. Park, H. Lee, and G. Lee, “Thickness dependence of electrical properties of ITO film deposited on a plastic substrate by RF magnetron sputtering,” Appl. Surf. Sci.253, 409–411 (2006). [CrossRef]
- N. Fang, H. Lee, C. Sun, and X. Zhang, “Sub-diffraction-limited optical imaging with a silver superlens,” Science308, 534–537 (2005). [CrossRef] [PubMed]
- W.-C. Chen, Y.-R. Lin, X.-J. Guo, and S.-T. Wu, “Heteroepitaxial TiN of very low mosaic spread on Al2O3,” Jpn. J. Appl. Phys.42, 208–212 (2003). [CrossRef]
- M. Yoon, S. Lee, H. Park, H. Kim, and M. Jang, “Solid solubility limits of Ga and Al in ZnO,” J. Mater. Sci. Lett.21, 1703–1704 (2002). [CrossRef]
- H. Kim, J. Horwitz, S. Qadri, and D. Chrisey, “Epitaxial growth of Al-doped ZnO thin films grown by pulsed laser deposition,” Thin Solid Films420, 107–111 (2002). [CrossRef]
- P. Patsalas and S. Logothetidis, “Optical, electronic, and transport properties of nanocrystalline titanium nitride thin films,” J. Appl. Phys.90, 4725–4734 (2001). [CrossRef]
- K. Tominaga, H. Manabe, N. Umezu, I. Mori, T. Ushiro, and I. Nakabayashi, “Film properties of ZnO: Al prepared by cosputtering of ZnO:Al and either Zn or Al targets,” J. Vac. Sci. Technol. A15, 1074–1079 (1997). [CrossRef]
- K. Kim, K. Park, and D. Ma, “Structural, electrical and optical properties of aluminum doped zinc oxide films prepared by radio frequency magnetron sputtering,” J. Appl. Phys.81, 7764–7772 (1997). [CrossRef]
- B. Johansson, J. Sundgren, J. Greene, A. Rockett, and S. Barnett, “Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering,” J. Vac. Sci. Technol. A3, 303–307 (1985). [CrossRef]
- B. Karlsson, R. Shimshock, B. Seraphin, and J. Haygarth, “Optical properties of CVD-coated TiN, ZrN and HfN,” Phys. Scripta25, 775–779 (1982). [CrossRef]
- P. Johnson and R. Christy, “Optical constants of the noble metals,” Phys. Rev. B6, 4370–4379 (1972). [CrossRef]
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