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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 2, Iss. 11 — Nov. 1, 2012
  • pp: 1571–1579

Fabrication of high quality sub-micron Au gratings over large areas with pulsed laser interference lithography for SPR sensors

Alexander Arriola, Ainara Rodriguez, Noemi Perez, Txaber Tavera, Michael J. Withford, Alexander Fuerbach, and Santiago M. Olaizola  »View Author Affiliations

Optical Materials Express, Vol. 2, Issue 11, pp. 1571-1579 (2012)

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Metallic gratings were fabricated using high energy laser interference lithography with a frequency tripled Nd:YAG nanosecond laser. The grating structures were first recorded in a photosensitive layer and afterwards transferred to an Au film. High quality Au gratings with a period of 770 nm and peak-to-valley heights of 20-60 nm exhibiting plasmonic resonance response were successfully designed, fabricated and characterized.

© 2012 OSA

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(130.6010) Integrated optics : Sensors
(240.6680) Optics at surfaces : Surface plasmons

ToC Category:

Original Manuscript: July 24, 2012
Revised Manuscript: September 20, 2012
Manuscript Accepted: September 20, 2012
Published: October 5, 2012

Alexander Arriola, Ainara Rodriguez, Noemi Perez, Txaber Tavera, Michael J. Withford, Alexander Fuerbach, and Santiago M. Olaizola, "Fabrication of high quality sub-micron Au gratings over large areas with pulsed laser interference lithography for SPR sensors," Opt. Mater. Express 2, 1571-1579 (2012)

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