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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 2, Iss. 12 — Dec. 1, 2012
  • pp: 1723–1732

Effect of annealing conditions on the physio-chemical properties of spin-coated As2Se3 chalcogenide glass films

Yi Zou, Hongtao Lin, Okechukwu Ogbuu, Lan Li, Sylvain Danto, Spencer Novak, Jacklyn Novak, J. David Musgraves, Kathleen Richardson, and Juejun Hu  »View Author Affiliations


Optical Materials Express, Vol. 2, Issue 12, pp. 1723-1732 (2012)
http://dx.doi.org/10.1364/OME.2.001723


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Abstract

Thin film selenide glasses have emerged as an important material for integrated photonics due to its high refractive index, mid-IR transparency and high non-linear optical indices. We prepared high-quality As2Se3 glass films using spin coating from ethylenediamine solutions. The physio-chemical properties of the films are characterized as a function of annealing conditions. Compared to bulk glasses, as-deposited films possess a distinctively different network structure due to presence of Se-Se homo-polar bonds and residual solvent. Annealing partially recovers the As-Se3 pyramid structure and brings the film refractive indices close to the bulk value. Optical loss in the films measured at 1550 nm wavelength is 9 dB/cm, which was attributed to N-H bond absorption from residual solvent.

© 2012 OSA

OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(230.7370) Optical devices : Waveguides
(240.0310) Optics at surfaces : Thin films
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization

ToC Category:
Glass and Other Amorphous Materials

History
Original Manuscript: July 30, 2012
Revised Manuscript: October 15, 2012
Manuscript Accepted: November 3, 2012
Published: November 6, 2012

Citation
Yi Zou, Hongtao Lin, Okechukwu Ogbuu, Lan Li, Sylvain Danto, Spencer Novak, Jacklyn Novak, J. David Musgraves, Kathleen Richardson, and Juejun Hu, "Effect of annealing conditions on the physio-chemical properties of spin-coated As2Se3 chalcogenide glass films," Opt. Mater. Express 2, 1723-1732 (2012)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-2-12-1723


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References

  1. A. Zakery and S. R. Elliott, “Optical properties and applications of chalcogenide glasses: a review,” J. Non-Cryst. Solids330(1-3), 1–12 (2003). [CrossRef]
  2. J. S. Sanghera and I. D. Aggarwal, “Active and passive chalcogenide glass optical fibers for IR applications: a review,” J. Non-Cryst. Solids256-257, 6–16 (1999). [CrossRef]
  3. M. Asobe, “Nonlinear optical properties of chalcogenide glass fibers and their application to all-optical switching,” Opt. Fiber Technol.3(2), 142–148 (1997). [CrossRef]
  4. K. Tanaka, “Optical nonlinearity in photonic glasses,” J. Mater. Sci. Mater. Electron.16(10), 633–643 (2005). [CrossRef]
  5. P. Lucas, “Energy landscape and photoinduced structural changes in chalcogenide glasses,” J. Phys. Condens. Matter18(24), 5629–5638 (2006). [CrossRef]
  6. L. Petit, N. Carlie, T. Anderson, J. Choi, M. Richardson, and K. C. Richardson, “Progress on the photoresponse of chalcogenide glasses and films to near-infrared femtosecond laser irradiation: a review,” IEEE J. Sel. Top. Quantum Electron.14(5), 1323–1334 (2008). [CrossRef]
  7. J. J. Hu, “Ultra-sensitive chemical vapor detection using micro-cavity photothermal spectroscopy,” Opt. Express18(21), 22174–22186 (2010). [CrossRef] [PubMed]
  8. H. T. Lin, Z. Yi, and J. J. Hu, “Double resonance 1-D photonic crystal cavities for single-molecule mid-infrared photothermal spectroscopy: theory and design,” Opt. Lett.37(8), 1304–1306 (2012). [CrossRef] [PubMed]
  9. J. J. Hu, V. Tarasov, N. Carlie, N. N. Feng, L. Petit, A. Agarwal, K. Richardson, and L. Kimerling, “Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides,” Opt. Express15(19), 11798–11807 (2007). [CrossRef] [PubMed]
  10. V. I. Mikla and V. V. Mikla, “Effect of thermal evaporation conditions on structural changes in amorphous AsxS1-x films,” J. Optoelectron. Adv. Mater. Rapid Commun.1(6), 272–276 (2007).
  11. V. Nazabal, F. Charpentier, J. L. Adam, P. Nemec, H. Lhermite, M. L. Brandily-Anne, J. Charrier, J. P. Guin, and A. Moreac, “Sputtering and pulsed laser deposition for near- and mid-infrared applications: a comparative study of Ge25Sb10S65 and Ge25Sb10Se65 amorphous thin films,” Int. J. Appl. Ceram. Technol.8(5), 990–1000 (2011). [CrossRef]
  12. M. Krbal, T. Wagner, T. Kohoutek, P. Nemec, J. Orava, and M. Frumar, “The comparison of Ag-As33S67 films prepared by thermal evaporation (TE), spin-coating (SC) and a pulsed laser deposition (PLD),” J. Phys. Chem. Solids68(5-6), 953–957 (2007). [CrossRef]
  13. M. Erazú, J. Rocca, M. Fontana, A. Urena, B. Arcondo, and A. Pradel, “Raman spectroscopy of chalcogenide thin films prepared by PLD,” J. Alloy. Comp.495(2), 642–645 (2010). [CrossRef]
  14. J. D. Musgraves, N. Carlie, J. Hu, L. Petit, A. Agarwal, L. C. Kimerling, and K. A. Richardson, “Comparison of the optical, thermal and structural properties of Ge-Sb-S thin films deposited using thermal evaporation and pulsed laser deposition techniques,” Acta Mater.59(12), 5032–5039 (2011). [CrossRef]
  15. G. C. Chern and I. Lauks, “Spin-coated amorphous-chalcogenide films,” J. Appl. Phys.53(10), 6979–6982 (1982). [CrossRef]
  16. T. Kohoutek, T. Wagner, J. Orava, M. Krbal, A. Fejfar, T. Mates, S. O. Kasap, and M. Frumar, “Surface morphology of spin-coated As-S-Se chalcogenide thin films,” J. Non-Cryst. Solids353(13-15), 1437–1440 (2007). [CrossRef]
  17. S. S. Song, N. Carlie, J. Boudies, L. Petit, K. Richardson, and C. B. Arnold, “Spin-coating of Ge23Sb7S70 chalcogenide glass thin films,” J. Non-Cryst. Solids355(45-47), 2272–2278 (2009). [CrossRef]
  18. C. Tsay, Y. L. Zha, and C. B. Arnold, “Solution-processed chalcogenide glass for integrated single-mode mid-infrared waveguides,” Opt. Express18(25), 26744–26753 (2010). [CrossRef] [PubMed]
  19. C. Tsay, F. Toor, C. F. Gmachl, and C. B. Arnold, “Chalcogenide glass waveguides integrated with quantum cascade lasers for on-chip mid-IR photonic circuits,” Opt. Lett.35(20), 3324–3326 (2010). [CrossRef] [PubMed]
  20. T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Physico-chemical properties of spin-coated Ag-As-Sb-S films,” J. Non-Cryst. Solids351(27-29), 2205–2209 (2005). [CrossRef]
  21. T. Kohoutek, T. Wagner, M. Frumar, A. Chrissanthopoulos, O. Kostadinova, and S. N. Yannopoulos, “Effect of cluster size of chalcogenide glass nanocolloidal solutions on the surface morphology of spin-coated amorphous films,” J. Appl. Phys.103(6), 063511 (2008). [CrossRef]
  22. T. Kohoutek, T. Wagner, J. Orava, M. Frumar, V. Perina, A. Mackova, V. Hnatowitz, M. Vlcek, and S. Kasap, “Amorphous films of Ag-As-S system prepared by spin-coating technique, preparation techniques and films physico-chemical properties,” Vacuum76(2-3), 191–194 (2004). [CrossRef]
  23. S. S. Song, J. Dua, and C. B. Arnold, “Influence of annealing conditions on the optical and structural properties of spin-coated As2S3 chalcogenide glass thin films,” Opt. Express18(6), 5472–5480 (2010). [CrossRef] [PubMed]
  24. T. Kohoutek, T. Wágner, M. Vlček, M. Vlček, and M. Frumar, “Spin-coated As33S67-xSex thin films: the effect of annealing on structure and optical properties,” J. Non-Cryst. Solids352(9-20), 1563–1566 (2006). [CrossRef]
  25. S. Shtutina, M. Klebanov, V. Lyubin, S. Rosenwaks, and V. Volterra, “Photoinduced phenomena in spin-coated vitreous As2S3 and AsSe films,” Thin Solid Films261(1-2), 263–265 (1995). [CrossRef]
  26. T. Guiton and C. Pantano, “Solution/gelation of arsenic trisulfide in amine solvents,” Chem. Mater.1(5), 558–563 (1989). [CrossRef]
  27. M. A. Popescu, Non-Crystalline Chalcogenicides (Kluwer Academic Publishers, 2001).
  28. M. Waldmann, J. D. Musgraves, K. Richardson, and C. B. Arnold, “Structural properties of solution processed Ge23Sb7S70 glass materials,” J. Mater. Chem.22(34), 17848–17852 (2012). [CrossRef]
  29. R. J. Nemanich, G. A. N. Connell, T. M. Hayes, and R. A. Street, “Thermally induced effects in evaporated chalcogenide films. 1. structure,” Phys. Rev. B18(12), 6900–6914 (1978). [CrossRef]
  30. J. J. Hu, V. Tarasov, N. Carlie, L. Petit, A. Agarwal, K. Richardson, and L. Kimerling, “Exploration of waveguide fabrication from thermally evaporated Ge-Sb-S glass films,” Opt. Mater.30(10), 1560–1566 (2008). [CrossRef]
  31. W. Y. Li, S. Seal, C. Rivero, C. Lopez, K. Richardson, A. Pope, A. Schulte, S. Myneni, H. Jain, K. Antoine, and A. C. Miller, “Role of S/Se ratio in chemical bonding of As-S-Se glasses investigated by Raman, x-ray photoelectron, and extended x-ray absorption fine structure spectroscopies,” J. Appl. Phys.98(5), 053503 (2005). [CrossRef]
  32. V. Kovanda, M. Vlcek, and H. Jain, “Structure of As-Se and As-P-Se glasses studied by Raman spectroscopy,” J. Non-Cryst. Solids326-327, 88–92 (2003). [CrossRef]
  33. NIST, “Ethylenediamine,” retrieved 7/15/2012, http://webbook.nist.gov/cgi/cbook.cgi?Name=ethylenediamine&Units=SI .
  34. R. Swanepoel, “Determination of the thickness and optical-constants of amorphous-silicon,” J. Phys. E Sci. Instrum.16(12), 1214–1222 (1983). [CrossRef]
  35. N. Carlie, N. C. Anheier, H. A. Qiao, B. Bernacki, M. C. Phillips, L. Petit, J. D. Musgraves, and K. Richardson, “Measurement of the refractive index dispersion of As2Se3 bulk glass and thin films prior to and after laser irradiation and annealing using prism coupling in the near- and mid-infrared spectral range,” Rev. Sci. Instrum.82(5), 053103 (2011). [CrossRef] [PubMed]
  36. R. P. Wang, S. J. Madden, C. J. Zha, A. V. Rode, and B. Luther-Davies, “Annealing induced phase transformations in amorphous As2S3 films,” J. Appl. Phys.100(6), 063524 (2006). [CrossRef]
  37. C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express18(15), 15523–15530 (2010). [CrossRef] [PubMed]

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