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Optical Materials Express

Optical Materials Express

  • Editor: David Hagan
  • Vol. 4, Iss. 7 — Jul. 1, 2014
  • pp: 1345–1354

Silicon nanopillar arrays with SiO2 overlayer for biosensing application

B. Dev Choudhury, R. Casquel, M.J. Bañuls, F.J. Sanza, M.F. Laguna, M. Holgado, R. Puchades, A. Maquieira, C.A. Barrios, and S. Anand  »View Author Affiliations

Optical Materials Express, Vol. 4, Issue 7, pp. 1345-1354 (2014)

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We present the fabrication of silicon dioxide (SiO2) coated silicon nanopillar array structures and demonstrate their application as sensitive optical biosensors. Colloidal lithography, plasma dry etching and deposition processes are used to fabricate SiO2 coated Si nanopillar arrays with two different diameters and periods. Proof of concept bio recognition experiments are carried out with the bovine serum albumin (BSA)/antiBSA model system using Fourier transform visible and IR spectrometry (FT-VIS-IR) in reflection mode. A limit of detection (LoD) value of 5.2 ng/ml is estimated taking in to account the wavenumber uncertainty in the measurements.

© 2014 Optical Society of America

OCIS Codes
(040.6040) Detectors : Silicon
(180.3170) Microscopy : Interference microscopy
(260.3160) Physical optics : Interference
(300.6300) Spectroscopy : Spectroscopy, Fourier transforms
(310.1860) Thin films : Deposition and fabrication
(280.1415) Remote sensing and sensors : Biological sensing and sensors
(110.4235) Imaging systems : Nanolithography
(220.4241) Optical design and fabrication : Nanostructure fabrication
(280.4788) Remote sensing and sensors : Optical sensing and sensors

ToC Category:

Original Manuscript: February 5, 2014
Revised Manuscript: April 17, 2014
Manuscript Accepted: April 28, 2014
Published: June 6, 2014

B. Dev Choudhury, R. Casquel, M.J. Bañuls, F.J. Sanza, M.F. Laguna, M. Holgado, R. Puchades, A. Maquieira, C.A. Barrios, and S. Anand, "Silicon nanopillar arrays with SiO2 overlayer for biosensing application," Opt. Mater. Express 4, 1345-1354 (2014)

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