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Highly tolerant a-Si distributed Bragg reflector fabricated by oblique angle depositionSung Jun Jang, Young Min Song, Chan Il Yeo, Chang Young Park, and Yong Tak Lee »View Author Affiliations
Sung Jun Jang,1
Young Min Song,1
Chan Il Yeo,1
Chang Young Park,1
and Yong Tak Lee1,2,3,*
1School of Information and Communications, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju, 500-712, Korea 2Graduate Program of Photonics and Applied Physics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju, 500-712 Korea 3Department of Nanobio Electronics and Materials, Gwangju Institute of Science and Technology,1 Oryong-dong, Buk-gu, Gwangju, 500-712, Korea *Corresponding author: ytlee@gist.ac.kr |
Optical Materials Express, Vol. 1, Issue 3, pp. 451-457 (2011)
http://dx.doi.org/10.1364/OME.1.000451
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Abstract
We demonstrate a highly tolerant and highly reflective broadband a-Si distributed Bragg reflector fabricated by oblique angle deposition. By tuning the refractive index of an a-Si film, a high index contrast material system was achieved. The highly tolerant and broadband reflective characteristics of the a-Si distributed Bragg reflector were investigated by calculation and fabrication. A broad stop band (Δλ/λ = 33.7%, R>99%) with only a five-pair a-Si distributed Bragg reflector was achieved experimentally. The size-, feature- and substrate-independent method for highly reflective Bragg reflectors was realized by simple oblique angle evaporation.
© 2011 OSA
OCIS Codes
(230.1480) Optical devices : Bragg reflectors
(310.1860) Thin films : Deposition and fabrication
(310.4165) Thin films : Multilayer design
(220.4241) Optical design and fabrication : Nanostructure fabrication
ToC Category:
Thin Films
History
Original Manuscript: April 20, 2011
Revised Manuscript: June 16, 2011
Manuscript Accepted: June 22, 2011
Published: June 24, 2011
Citation
Sung Jun Jang, Young Min Song, Chan Il Yeo, Chang Young Park, and Yong Tak Lee, "Highly tolerant a-Si distributed Bragg reflector fabricated by oblique angle deposition," Opt. Mater. Express 1, 451-457 (2011)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-1-3-451
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References
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Bermel, P.
Bisi, O.
Blum, O.
Bonnet-Gamard, J.
Boucart, J.
Bouche, N.
Brett, M. J.
Brillouet, F.
Broderick, K. A.
Carpentier, D.
Chang-hasnain, C. J.
Chen, L.
Chen, M.
Chhajed, S.
Cho, J.
Choi, H. J.
Collins, A.
Dawson, L. R.
Derouin, E.
Drummond, T. J.
Duan, X.
Erchak, A. A.
Fan, J.
Feng, N.
Fortin, C.
Fritz, I. J.
Fu, J.
Gaborit, F.
Gessmann, T.
Goldstein, L.
Gopinath, J. T.
Harris, T. D.
Hawkeye, M. M.
Headley, T. J.
Hong, C.
Howard, A. J.
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Hunt, N. E. J.
Hwangbo, C. K.
Ippen, E. P.
Jacobson, D. C.
Jacquet, J.
Jang, S. J.
Joannopoulos, J.
Jones, R. J.
Karabacak, T.
Kartner, F. X.
Kärtner, F. X.
Kim, C. M.
Kim, E. H.
Kim, J. K.
Kim, T. G.
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Klem, J. F.
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Lee, B. G.
Lee, Y. P.
Lee, Y. T.
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Mateus, C. F. R.
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Pai, Y. H.
Park, C. Y.
Park, Y.
Park, Y. J.
Pavesi, L.
Petrich, G. S.
Picu, C.
Piel, J. P.
Plais, A.
Poate, J. M.
Remy, J. C.
Ripin, D. J.
Robbie, K.
Safdi, B.
Salet, P.
Schubert, E. F.
Schubert, M. F.
Shen, H. M.
Shin, Y. C.
Singh, J. P.
Smart, J. A.
Sobahan, K. M. A.
Sone, C.
Song, Y. M.
Starck, C.
Stehle, J. L.
Suzuki, Y.
Tandon, S. N.
Thomas, O.
Thorpe, M. J.
Vredenberg, A. M.
Wang, G.-C.
Wong, Y. H.
Wu, C. L.
Xi, J. Q.
Ye, D.-X.
Ye, J.
Yeo, C. I.
Yi, Y.
Yu, J. S.
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- O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000). [CrossRef]
- O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995). [CrossRef]
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- K. Robbie and M. J. Brett, “Sculptured thin films and glancing angle deposition: Growth mechanics and applications,” J. Vac. Sci. Technol. A 15(3), 1460–1465 (1997). [CrossRef]
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
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- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
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- C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004). [CrossRef]
- C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004). [CrossRef]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008). [CrossRef]
- J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006). [CrossRef]
- S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010). [CrossRef]
- Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010). [CrossRef] [PubMed]
- J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008). [CrossRef]
- O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995). [CrossRef]
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
- O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995). [CrossRef]
- L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008). [CrossRef]
- L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006). [CrossRef]
- D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002). [CrossRef]
- J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008). [CrossRef]
- L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006). [CrossRef]
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
- O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995). [CrossRef]
- J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008). [CrossRef]
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
- J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006). [CrossRef]
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
- S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004). [CrossRef] [PubMed]
- D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002). [CrossRef]
- E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993). [CrossRef]
- M. J. Brett and M. M. Hawkeye, “Materials science. New materials at a glance,” Science 319(5867), 1192–1193 (2008). [CrossRef] [PubMed]
- M. M. Hawkeye and M. J. Brett, “Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films,” J. Appl. Phys. 100(4), 044322 (2006). [CrossRef]
- O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995). [CrossRef]
- L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008). [CrossRef]
- L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006). [CrossRef]
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- S. J. Jang, Y. M. Song, J. S. Yu, C. I. Yeo, and Y. T. Lee, “Antireflective properties of porous Si nanocolumnar structures with graded refractive index layers,” Opt. Lett. 36(2), 253–255 (2011). [CrossRef] [PubMed]
- S. J. Jang, Y. M. Song, C. I. Yeo, C. Y. Park, J. S. Yu, and Y. T. Lee, “Antireflective property of thin film a-Si solar cell structures with graded refractive index structure,” Opt. Express 19(S2Suppl 2), A108–A117 (2011). [CrossRef] [PubMed]
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- S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010). [CrossRef]
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- L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006). [CrossRef]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).
- J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005). [CrossRef]
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- J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006). [CrossRef]
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- J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005). [CrossRef]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).
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- J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006). [CrossRef]
- S. J. Jang, Y. M. Song, J. S. Yu, C. I. Yeo, and Y. T. Lee, “Antireflective properties of porous Si nanocolumnar structures with graded refractive index layers,” Opt. Lett. 36(2), 253–255 (2011). [CrossRef] [PubMed]
- S. J. Jang, Y. M. Song, C. I. Yeo, C. Y. Park, J. S. Yu, and Y. T. Lee, “Antireflective property of thin film a-Si solar cell structures with graded refractive index structure,” Opt. Express 19(S2Suppl 2), A108–A117 (2011). [CrossRef] [PubMed]
- Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010). [CrossRef] [PubMed]
- S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010). [CrossRef]
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
- G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993). [CrossRef]
- C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004). [CrossRef]
- G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993). [CrossRef]
- M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006). [CrossRef] [PubMed]
- E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993). [CrossRef]
- J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005). [CrossRef]
- E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993). [CrossRef]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).
- M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007). [CrossRef]
- J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006). [CrossRef]
- J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005). [CrossRef]
- M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006). [CrossRef] [PubMed]
- S. J. Jang, Y. M. Song, C. I. Yeo, C. Y. Park, J. S. Yu, and Y. T. Lee, “Antireflective property of thin film a-Si solar cell structures with graded refractive index structure,” Opt. Express 19(S2Suppl 2), A108–A117 (2011). [CrossRef] [PubMed]
- S. J. Jang, Y. M. Song, J. S. Yu, C. I. Yeo, and Y. T. Lee, “Antireflective properties of porous Si nanocolumnar structures with graded refractive index layers,” Opt. Lett. 36(2), 253–255 (2011). [CrossRef] [PubMed]
- L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008). [CrossRef]
- L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006). [CrossRef]
- S. J. Jang, Y. M. Song, C. I. Yeo, C. Y. Park, J. S. Yu, and Y. T. Lee, “Antireflective property of thin film a-Si solar cell structures with graded refractive index structure,” Opt. Express 19(S2Suppl 2), A108–A117 (2011). [CrossRef] [PubMed]
- S. J. Jang, Y. M. Song, J. S. Yu, C. I. Yeo, and Y. T. Lee, “Antireflective properties of porous Si nanocolumnar structures with graded refractive index layers,” Opt. Lett. 36(2), 253–255 (2011). [CrossRef] [PubMed]
- Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010). [CrossRef] [PubMed]
- S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010). [CrossRef]
- G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993). [CrossRef]
- L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008). [CrossRef]
- L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006). [CrossRef]
- J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008). [CrossRef]
- Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008). [CrossRef]
- M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007). [CrossRef]
- E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993). [CrossRef]
Appl. Phys. Lett.
- L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008). [CrossRef]
- E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993). [CrossRef]
- J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006). [CrossRef]
- M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007). [CrossRef]
- C. Mazzoleni and L. Pavesi, “Application to optical components of dielectric porous silicon multilayers,” Appl. Phys. Lett. 67(20), 2983–2985 (1995). [CrossRef]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008). [CrossRef]
- L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006). [CrossRef]
- O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995). [CrossRef]
IEEE J. Sel. Top. Quantum Electron.
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
IEEE Photon. Technol. Lett.
- C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004). [CrossRef]
J. Appl. Phys.
- M. M. Hawkeye and M. J. Brett, “Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films,” J. Appl. Phys. 100(4), 044322 (2006). [CrossRef]
J. Mater. Res.
- Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008). [CrossRef]
J. Vac. Sci. Technol. A
- K. Robbie and M. J. Brett, “Sculptured thin films and glancing angle deposition: Growth mechanics and applications,” J. Vac. Sci. Technol. A 15(3), 1460–1465 (1997). [CrossRef]
J. Vac. Sci. Technol. B
- J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005). [CrossRef]
Nanotechnology
- J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008). [CrossRef]
Nat. Photonics
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).
- M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007). [CrossRef]
Opt. Commun.
- D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002). [CrossRef]
Opt. Express
- Y. H. Lin, C. L. Wu, Y. H. Pai, and G. R. Lin, “A 533-nm self-luminescent Si-rich SiNx/SiOx distributed Bragg reflector,” Opt. Express 19(7), 6563–6570 (2011). [CrossRef] [PubMed]
- Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010). [CrossRef] [PubMed]
- S. J. Jang, Y. M. Song, C. I. Yeo, C. Y. Park, J. S. Yu, and Y. T. Lee, “Antireflective property of thin film a-Si solar cell structures with graded refractive index structure,” Opt. Express 19(S2Suppl 2), A108–A117 (2011). [CrossRef] [PubMed]
Opt. Lett.
- S. J. Jang, Y. M. Song, J. S. Yu, C. I. Yeo, and Y. T. Lee, “Antireflective properties of porous Si nanocolumnar structures with graded refractive index layers,” Opt. Lett. 36(2), 253–255 (2011). [CrossRef] [PubMed]
- S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004). [CrossRef] [PubMed]
Science
- M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006). [CrossRef] [PubMed]
- M. J. Brett and M. M. Hawkeye, “Materials science. New materials at a glance,” Science 319(5867), 1192–1193 (2008). [CrossRef] [PubMed]
Surf. Coat. Tech.
- S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010). [CrossRef]
Surf. Sci. Rep.
- O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000). [CrossRef]
Thin Solid Films
- G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993). [CrossRef]
2011, Lin, Opt. Express
- S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010). [CrossRef]
- S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008). [CrossRef]
- J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008). [CrossRef]
- L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008). [CrossRef]
- M. J. Brett and M. M. Hawkeye, “Materials science. New materials at a glance,” Science 319(5867), 1192–1193 (2008). [CrossRef] [PubMed]
- Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008). [CrossRef]
- M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007). [CrossRef]
- J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).
- M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007). [CrossRef]
- J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006). [CrossRef]
- M. M. Hawkeye and M. J. Brett, “Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films,” J. Appl. Phys. 100(4), 044322 (2006). [CrossRef]
- M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006). [CrossRef] [PubMed]
- L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006). [CrossRef]
- J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005). [CrossRef]
- C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004). [CrossRef]
- D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002). [CrossRef]
- O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000). [CrossRef]
- J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999). [CrossRef]
- K. Robbie and M. J. Brett, “Sculptured thin films and glancing angle deposition: Growth mechanics and applications,” J. Vac. Sci. Technol. A 15(3), 1460–1465 (1997). [CrossRef]
- C. Mazzoleni and L. Pavesi, “Application to optical components of dielectric porous silicon multilayers,” Appl. Phys. Lett. 67(20), 2983–2985 (1995). [CrossRef]
- O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995). [CrossRef]
- E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993). [CrossRef]
- G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993). [CrossRef]
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