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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 1, Iss. 4 — Aug. 1, 2011
  • pp: 614–624

Three-dimensional direct laser writing inspired by stimulated-emission-depletion microscopy [Invited]

Joachim Fischer and Martin Wegener  »View Author Affiliations

Optical Materials Express, Vol. 1, Issue 4, pp. 614-624 (2011)

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Three-dimensional direct laser writing has become a well established, versatile, widespread, and even readily commercially available “workhorse” of nano- and micro-technology. However, its lateral and axial spatial resolution is inherently governed by Abbe’s diffraction limitation – analogous to optical microscopy. In microscopy, stimulated-emission-depletion approaches have lately circumvented Abbe’s barrier and lateral resolutions down to 5.6 nm using visible light have been achieved. In this paper, after very briefly reviewing our previous efforts with respect to translating this success in optical microscopy to optical lithography, we present our latest results regarding resolution improvement in the lateral as well as in the much more relevant axial direction. The structures presented in this paper set a new resolution-benchmark for next-generation direct-laser-writing optical lithography. In particular, we break the lateral and the axial Abbe criterion for the first time.

© 2011 OSA

OCIS Codes
(350.3390) Other areas of optics : Laser materials processing
(350.3450) Other areas of optics : Laser-induced chemistry
(160.1245) Materials : Artificially engineered materials
(220.4241) Optical design and fabrication : Nanostructure fabrication

ToC Category:
Artificially Engineered Structures

Original Manuscript: May 27, 2011
Manuscript Accepted: June 29, 2011
Published: August 1, 2011

Virtual Issues
Femtosecond Direct Laser Writing and Structuring of Materials (2011) Optical Materials Express

Joachim Fischer and Martin Wegener, "Three-dimensional direct laser writing inspired by stimulated-emission-depletion microscopy [Invited]," Opt. Mater. Express 1, 614-624 (2011)

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