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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 1, Iss. 5 — Sep. 1, 2011
  • pp: 883–889

Spectroscopic characterization of highly doped ZnO films grown by atomic-layer deposition for three-dimensional infrared metamaterials [Invited]

Andreas Frölich and Martin Wegener  »View Author Affiliations

Optical Materials Express, Vol. 1, Issue 5, pp. 883-889 (2011)

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We systematically study the optical spectra of ZnO grown by atomic-layer deposition as a function of Al (and Ti) doping concentration. The spectra measured on films are well described by fits using a Drude free-electron model. The derived plasma frequencies are consistent with the expected amount of doping and can be continuously and controllably tuned from small values to about 400 THz. The losses (damping) are also quantified. In addition, we achieve smooth conformal coatings of three-dimensional polymer templates made by direct laser writing. Altogether, Al:ZnO appears as an attractive “tunable metal” for three-dimensional infrared metamaterials or transformation-optics architectures.

© 2011 OSA

OCIS Codes
(160.4760) Materials : Optical properties
(310.3840) Thin films : Materials and process characterization
(160.3918) Materials : Metamaterials

ToC Category:

Original Manuscript: June 2, 2011
Revised Manuscript: July 22, 2011
Manuscript Accepted: July 22, 2011
Published: August 8, 2011

Virtual Issues
Nanoplasmonics and Metamaterials (2011) Optical Materials Express

Andreas Frölich and Martin Wegener, "Spectroscopic characterization of highly doped ZnO films grown by atomic-layer deposition for three-dimensional infrared metamaterials [Invited]," Opt. Mater. Express 1, 883-889 (2011)

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