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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 1, Iss. 5 — Sep. 1, 2011
  • pp: 962–969

Dynamic membrane projection lithography [Invited]

D. Bruce Burckel, Joel R. Wendt, Igal Brener, and Michael B. Sinclair  »View Author Affiliations

Optical Materials Express, Vol. 1, Issue 5, pp. 962-969 (2011)

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We present dynamic membrane projection lithography as a method to create three dimensional metallic traces in hemispherical cavities. The technique entails directional evaporation through perforations in a membrane covering a hemispherical unit-cell cavity. The sample is positioned on a rotating stage and tilted with respect to the incident evaporated beam, such that the traces are deposited on the interior face of the cavity. A simple self-aligned version and a more general two-step fabrication version are presented. Furthermore, by incorporating a fixed shutter, both closed-loop and split-loop structures are demonstrated.

© 2011 OSA

OCIS Codes
(160.3918) Materials : Metamaterials
(160.4236) Materials : Nanomaterials
(350.4238) Other areas of optics : Nanophotonics and photonic crystals

ToC Category:

Original Manuscript: June 24, 2011
Revised Manuscript: August 16, 2011
Manuscript Accepted: August 16, 2011
Published: August 19, 2011

Virtual Issues
Nanoplasmonics and Metamaterials (2011) Optical Materials Express

D. Bruce Burckel, Joel R. Wendt, Igal Brener, and Michael B. Sinclair, "Dynamic membrane projection lithography [Invited]," Opt. Mater. Express 1, 962-969 (2011)

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