Colored semi-transparent Cu-Si oxide thin films prepared by magnetron sputtering

doi:10.1364/OME.1.001100

Colored semi-transparent Cu-Si oxide thin films prepared by magnetron sputtering

J. Gil-Rosta, F. Yubero, R. Fernández, T. Vilajoana, P. Artús, J. C. Dürsteler, J. Cotrino, I. Ortega, and A. R. González-Elipe »View Author Affiliations

Optical Materials Express, Vol. 1, Issue 6, pp. 1100-1112 (2011)
http://dx.doi.org/10.1364/OME.1.001100

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Abstract

Colored semi-transparent Cu-Si oxide thin films have been prepared by reactive magnetron sputtering from a single cathode of copper-silicon composition. Thin films of different composition and optical response were obtained by changing process parameters like the relative amount of copper in the target and the O₂/Ar mixture of the reactive plasma gas. The film characteristics were analyzed by several techniques. Their optical properties (refractive index, absorption coefficient, color) have been correlated with the process parameters used in the film preparation as well as with the film stoichiometry and chemistry.

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(330.4460) Vision, color, and visual optics : Ophthalmic optics and devices

ToC Category:
Thin Films

History
Original Manuscript: August 22, 2011
Revised Manuscript: September 2, 2011
Manuscript Accepted: September 2, 2011
Published: September 11, 2011

Citation
J. Gil-Rosta, F. Yubero, R. Fernández, T. Vilajoana, P. Artús, J. C. Dürsteler, J. Cotrino, I. Ortega, and A. R. González-Elipe, "Colored semi-transparent Cu-Si oxide thin films prepared by magnetron sputtering," Opt. Mater. Express 1, 1100-1112 (2011)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-1-6-1100

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References

M. Arbab and J. J. Finley, “Glass in architecture,” Int. J. Appl. Glass Sci.1(1), 118–129 (2010). [CrossRef]
C. M. Parler, J. A. Ritter, and M. D. Amiridis, “Infrared spectroscopic study of sol–gel derived mixed-metal oxides,” J. Non-Cryst. Solids279(2-3), 119–125 (2001). [CrossRef]
C. Córdoba, R. Arroyo, J. L. G. Fierro, and M. Viniegra, “Study of xerogel–glass transition of CuO/SiO2,” J. Solid State Chem.123(1), 93–99 (1996). [CrossRef]
M. G. Ferreira da Silva and J. M. Fernandez-Navarro, “Colour of silicate sol-gel glasses containing CuO,” J. Non-Cryst. Solids100(1-3), 447–452 (1988). [CrossRef]
B. Balamurugan and B. R. Mehta, “Optical and structural properties of nanocrystalline copper oxide thin films prepared by activated reactive evaporation,” Thin Solid Films396(1-2), 90–96 (2001). [CrossRef]
A. S. Reddy, G. V. Rao, S. Uthanna, and P. S. Reddy, “Structural and optical studies on dc reactive magnetron sputtered Cu2O films,” Mater. Lett.60(13-14), 1617–1621 (2006). [CrossRef]
V. F. Drobny and D. L. Pulfrey, “Properties of reactively-sputtered copper oxide thin films,” Thin Solid Films61(1), 89–98 (1979). [CrossRef]
P. Carvalho, J. M. Chappé, L. Cunha, S. Lanceros-Méndez, P. Alpuim, F. Vaz, E. Alves, C. Rousselot, J. P. Espinós, and A. R. González-Elipe, “Influence of the chemical and electronic structure on the electrical behavior of zirconium oxynitride films,” J. Appl. Phys.103(10), 104907 (2008). [CrossRef]
H. L. Smith and A. J. Cohen, “Absorption spectra of cations in alkali-silicate glasses of ultra-violet transmission,” Phys. Chem. Glasses4, 173–187 (1963).
I. Nakai, C. Numako, H. Hosono, and K. Yamasaki, “Origin of the red color of satsuma copper-ruby glass as determined by EXAFS and optical absorption spectroscopy,” J. Am. Ceram. Soc.82(3), 689–695 (1999). [CrossRef]
T. Akai, H. Yamanaka, and H. Wakabayashi, “Preparation of copper-ruby glasses by sputtering: the effect of atmosphere on the growth of copper particles,” J. Am. Ceram. Soc.79(4), 859–864 (1996). [CrossRef]
C. R. Bamford, “The application of the ligand field theory to coloured glasses,” Phys. Chem. Glasses3, 189–202 (1962).
J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, 1985), Vol. I.
J. Schanda, Colorimetry: Understanding of the CIE System (John Wiley and Sons, 2007).
F. Liu, C. S. Ren, Y. N. Wang, X. L. Qi, and T. C. Ma, “The optical emission spectroscopy study of an rf-plasma-enhanced magnetron sputtering system,” Vacuum81(3), 221–225 (2006). [CrossRef]
F. Gracia, F. Yubero, J. P. Holgado, J. P. Espinós, A. R. González-Elipe, and T. Girardeau, “SiO2/TiO2 thin films with variable refractive index prepared by ion beam induced and plasma enhanced chemical vapor deposition,” Thin Solid Films500(1-2), 19–26 (2006). [CrossRef]
G. Papadimitropoulos, N. Vourdas, V. Vamvakas, and D. Davazoglou, “Optical and structural properties of copper oxide thin films grown by oxidation of metal layers,” Thin Solid Films515(4), 2428–2432 (2006). [CrossRef]
B. Lefez, R. Souchet, K. Kartouni, and M. Lenglet, “Infrared reflection study of CuO in thin oxide films,” Thin Solid Films268(1-2), 45–48 (1995). [CrossRef]
M. Scrocco, “Satellite structure in the x-ray photoelectron spectra of CuO Cu2O,” Chem. Phys. Lett.63(1), 52–56 (1979). [CrossRef]
J. P. Espinós, J. Morales, A. Barranco, A. Caballero, J. P. Holgado, and A. R. González-Elipe, “Interface effects for Cu, CuO, and Cu2O deposited on SiO2 and ZrO2: XPS determination of the valence state of copper in Cu/SiO2 and Cu/ZrO2 catalysts,” J. Phys. Chem. B106(27), 6921–6929 (2002). [CrossRef]
C. D. Wagner, “Chemical shifts of Auger lines, and the Auger parameter,” Faraday Discuss. Chem. Soc.60, 291–300 (1975). [CrossRef]
G. Moretti, “Auger parameter and Wagner plot in the characterization of chemical states by X-ray photoelectron spectroscopy: a review,” J. Electron Spectrosc. Relat. Phenom.95(2-3), 95–144 (1998). [CrossRef]
J. Morales, J. P. Espinós, A. Caballero, A. R. González-Elipe, and J. A. Mejías, “XPS study of interface and ligand effects in supported Cu2O and CuO nanometric particles,” J. Phys. Chem. B109(16), 7758–7765 (2005). [CrossRef] [PubMed]
A. Forouhi and I. Bloomer, “Optical dispersion relations for amorphous semiconductors and amorphous dielectrics,” Phys. Rev. B34(10), 7018–7026 (1986). [CrossRef]
A. E. Rakhshani, “Measurement of dispersion in electrodeposited Cu2O,” J. Appl. Phys.62(4), 1528–1529 (1987). [CrossRef]
T. Mahalingam, J. S. P. Chitra, S. Rajendran, M. Jayachandran, and M. J. Chockalingam, “Galvanostatic deposition and characterization of cuprous oxide thin films,” J. Cryst. Growth216(1-4), 304–310 (2000). [CrossRef]
A. Parretta, M. K. Jayaraj, A. Di Nocera, S. Loreti, L. Quercia, and A. Agati, “Electrical and optical properties of copper oxide films prepared by reactive RF magnetron sputtering,” Phys. Status Solidi A155(2), 399–404 (1996). [CrossRef]
J. Pierson, E. Duverger, and G. Banakh, “Experimental and theoretical contributions to the determination of optical properties of synthetic paramelaconite,” J. Solid State Chem.180(3), 968–973 (2007). [CrossRef]
C. R. Bamford, “The application of the ligand field theory to coloured glasses,” Phys. Chem. Glasses3, 189–202 (1962).
R. Fernandez-Serrano, A. Vilajoana-Mas, J.C. Dürsteler-López, J. Gil-Rostra, F. Yubero-Valencia, A.R. González-Elipe, “Polymer lens comprising a hardening layer, and absorbent layer, and a interferential multilayer and corresponding method,” PCT/ES2010/000100.
F. J. Ferrer, F. Yubero, J. A. Mejías, F. J. García-López, and A. R. González-Elipe, “Microscopic and macroscopic dielectric description of mixed oxide thin films,” J. Appl. Phys.102(8), 084112 (2007). [CrossRef]
F. Yubero, A. Stabel, and A. R. González-Elipe, “Optical properties and electron spectroscopy characterization of AlxTiyOz thin films,” J. Vac. Sci. Technol. A16(6), 3477–3482 (1998). [CrossRef]

Agati, A.
Akai, T.
Alpuim, P.
Alves, E.
Amiridis, M. D.
Arbab, M.
Arroyo, R.
Balamurugan, B.
Bamford, C. R.
Banakh, G.
Barranco, A.
Bloomer, I.
Caballero, A.
Carvalho, P.
Chappé, J. M.
Chitra, J. S. P.
Chockalingam, M. J.
Cohen, A. J.
Córdoba, C.
Cunha, L.
Davazoglou, D.
Di Nocera, A.
Drobny, V. F.
Duverger, E.
Espinós, J. P.
Fernandez-Navarro, J. M.
Ferreira da Silva, M. G.
Ferrer, F. J.
Fierro, J. L. G.
Finley, J. J.
Forouhi, A.
García-López, F. J.
Girardeau, T.
González-Elipe, A. R.
Gracia, F.
Holgado, J. P.
Hosono, H.
Jayachandran, M.
Jayaraj, M. K.
Kartouni, K.
Lanceros-Méndez, S.
Lefez, B.
Lenglet, M.
Liu, F.
Loreti, S.
Ma, T. C.
Mahalingam, T.
Mehta, B. R.
Mejías, J. A.
Morales, J.
Moretti, G.
Nakai, I.
Numako, C.
Papadimitropoulos, G.
Parler, C. M.
Parretta, A.
Pierson, J.
Pulfrey, D. L.
Qi, X. L.
Quercia, L.
Rajendran, S.
Rakhshani, A. E.
Rao, G. V.
Reddy, A. S.
Reddy, P. S.
Ren, C. S.
Ritter, J. A.
Rousselot, C.
Scrocco, M.
Smith, H. L.
Souchet, R.
Stabel, A.
Uthanna, S.
Vamvakas, V.
Vaz, F.
Viniegra, M.
Vourdas, N.
Wagner, C. D.
Wakabayashi, H.
Wang, Y. N.
Yamanaka, H.
Yamasaki, K.
Yubero, F.

Chem. Phys. Lett.

M. Scrocco, “Satellite structure in the x-ray photoelectron spectra of CuO Cu2O,” Chem. Phys. Lett.63(1), 52–56 (1979). [CrossRef]

Faraday Discuss. Chem. Soc.

C. D. Wagner, “Chemical shifts of Auger lines, and the Auger parameter,” Faraday Discuss. Chem. Soc.60, 291–300 (1975). [CrossRef]

Int. J. Appl. Glass Sci.

M. Arbab and J. J. Finley, “Glass in architecture,” Int. J. Appl. Glass Sci.1(1), 118–129 (2010). [CrossRef]

J. Am. Ceram. Soc.

I. Nakai, C. Numako, H. Hosono, and K. Yamasaki, “Origin of the red color of satsuma copper-ruby glass as determined by EXAFS and optical absorption spectroscopy,” J. Am. Ceram. Soc.82(3), 689–695 (1999). [CrossRef]
T. Akai, H. Yamanaka, and H. Wakabayashi, “Preparation of copper-ruby glasses by sputtering: the effect of atmosphere on the growth of copper particles,” J. Am. Ceram. Soc.79(4), 859–864 (1996). [CrossRef]

J. Appl. Phys.

P. Carvalho, J. M. Chappé, L. Cunha, S. Lanceros-Méndez, P. Alpuim, F. Vaz, E. Alves, C. Rousselot, J. P. Espinós, and A. R. González-Elipe, “Influence of the chemical and electronic structure on the electrical behavior of zirconium oxynitride films,” J. Appl. Phys.103(10), 104907 (2008). [CrossRef]
A. E. Rakhshani, “Measurement of dispersion in electrodeposited Cu2O,” J. Appl. Phys.62(4), 1528–1529 (1987). [CrossRef]
F. J. Ferrer, F. Yubero, J. A. Mejías, F. J. García-López, and A. R. González-Elipe, “Microscopic and macroscopic dielectric description of mixed oxide thin films,” J. Appl. Phys.102(8), 084112 (2007). [CrossRef]

J. Cryst. Growth

T. Mahalingam, J. S. P. Chitra, S. Rajendran, M. Jayachandran, and M. J. Chockalingam, “Galvanostatic deposition and characterization of cuprous oxide thin films,” J. Cryst. Growth216(1-4), 304–310 (2000). [CrossRef]

J. Electron Spectrosc. Relat. Phenom.

G. Moretti, “Auger parameter and Wagner plot in the characterization of chemical states by X-ray photoelectron spectroscopy: a review,” J. Electron Spectrosc. Relat. Phenom.95(2-3), 95–144 (1998). [CrossRef]

J. Non-Cryst. Solids

C. M. Parler, J. A. Ritter, and M. D. Amiridis, “Infrared spectroscopic study of sol–gel derived mixed-metal oxides,” J. Non-Cryst. Solids279(2-3), 119–125 (2001). [CrossRef]
M. G. Ferreira da Silva and J. M. Fernandez-Navarro, “Colour of silicate sol-gel glasses containing CuO,” J. Non-Cryst. Solids100(1-3), 447–452 (1988). [CrossRef]

J. Phys. Chem. B

J. P. Espinós, J. Morales, A. Barranco, A. Caballero, J. P. Holgado, and A. R. González-Elipe, “Interface effects for Cu, CuO, and Cu2O deposited on SiO2 and ZrO2: XPS determination of the valence state of copper in Cu/SiO2 and Cu/ZrO2 catalysts,” J. Phys. Chem. B106(27), 6921–6929 (2002). [CrossRef]
J. Morales, J. P. Espinós, A. Caballero, A. R. González-Elipe, and J. A. Mejías, “XPS study of interface and ligand effects in supported Cu2O and CuO nanometric particles,” J. Phys. Chem. B109(16), 7758–7765 (2005). [CrossRef] [PubMed]

J. Solid State Chem.

J. Pierson, E. Duverger, and G. Banakh, “Experimental and theoretical contributions to the determination of optical properties of synthetic paramelaconite,” J. Solid State Chem.180(3), 968–973 (2007). [CrossRef]
C. Córdoba, R. Arroyo, J. L. G. Fierro, and M. Viniegra, “Study of xerogel–glass transition of CuO/SiO2,” J. Solid State Chem.123(1), 93–99 (1996). [CrossRef]

J. Vac. Sci. Technol. A

F. Yubero, A. Stabel, and A. R. González-Elipe, “Optical properties and electron spectroscopy characterization of AlxTiyOz thin films,” J. Vac. Sci. Technol. A16(6), 3477–3482 (1998). [CrossRef]

Mater. Lett.

A. S. Reddy, G. V. Rao, S. Uthanna, and P. S. Reddy, “Structural and optical studies on dc reactive magnetron sputtered Cu2O films,” Mater. Lett.60(13-14), 1617–1621 (2006). [CrossRef]

Phys. Chem. Glasses

H. L. Smith and A. J. Cohen, “Absorption spectra of cations in alkali-silicate glasses of ultra-violet transmission,” Phys. Chem. Glasses4, 173–187 (1963).
C. R. Bamford, “The application of the ligand field theory to coloured glasses,” Phys. Chem. Glasses3, 189–202 (1962).
C. R. Bamford, “The application of the ligand field theory to coloured glasses,” Phys. Chem. Glasses3, 189–202 (1962).

Phys. Rev. B

A. Forouhi and I. Bloomer, “Optical dispersion relations for amorphous semiconductors and amorphous dielectrics,” Phys. Rev. B34(10), 7018–7026 (1986). [CrossRef]

Phys. Status Solidi A

A. Parretta, M. K. Jayaraj, A. Di Nocera, S. Loreti, L. Quercia, and A. Agati, “Electrical and optical properties of copper oxide films prepared by reactive RF magnetron sputtering,” Phys. Status Solidi A155(2), 399–404 (1996). [CrossRef]

Thin Solid Films

F. Gracia, F. Yubero, J. P. Holgado, J. P. Espinós, A. R. González-Elipe, and T. Girardeau, “SiO2/TiO2 thin films with variable refractive index prepared by ion beam induced and plasma enhanced chemical vapor deposition,” Thin Solid Films500(1-2), 19–26 (2006). [CrossRef]
G. Papadimitropoulos, N. Vourdas, V. Vamvakas, and D. Davazoglou, “Optical and structural properties of copper oxide thin films grown by oxidation of metal layers,” Thin Solid Films515(4), 2428–2432 (2006). [CrossRef]
B. Lefez, R. Souchet, K. Kartouni, and M. Lenglet, “Infrared reflection study of CuO in thin oxide films,” Thin Solid Films268(1-2), 45–48 (1995). [CrossRef]
V. F. Drobny and D. L. Pulfrey, “Properties of reactively-sputtered copper oxide thin films,” Thin Solid Films61(1), 89–98 (1979). [CrossRef]
B. Balamurugan and B. R. Mehta, “Optical and structural properties of nanocrystalline copper oxide thin films prepared by activated reactive evaporation,” Thin Solid Films396(1-2), 90–96 (2001). [CrossRef]

Vacuum

F. Liu, C. S. Ren, Y. N. Wang, X. L. Qi, and T. C. Ma, “The optical emission spectroscopy study of an rf-plasma-enhanced magnetron sputtering system,” Vacuum81(3), 221–225 (2006). [CrossRef]

Other

R. Fernandez-Serrano, A. Vilajoana-Mas, J.C. Dürsteler-López, J. Gil-Rostra, F. Yubero-Valencia, A.R. González-Elipe, “Polymer lens comprising a hardening layer, and absorbent layer, and a interferential multilayer and corresponding method,” PCT/ES2010/000100.
J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, 1985), Vol. I.
J. Schanda, Colorimetry: Understanding of the CIE System (John Wiley and Sons, 2007).

2010, Arbab, Int. J. Appl. Glass Sci.
2008, Carvalho, J. Appl. Phys.
2007, Pierson, J. Solid State Chem.
2007, Ferrer, J. Appl. Phys.
2006, Reddy, Mater. Lett.
2006, Liu, Vacuum
2006, Gracia, Thin Solid Films
2006, Papadimitropoulos, Thin Solid Films
2005, Morales, J. Phys. Chem. B
2002, Espinós, J. Phys. Chem. B
2001, Parler, J. Non-Cryst. Solids
2001, Balamurugan, Thin Solid Films
2000, Mahalingam, J. Cryst. Growth
1999, Nakai, J. Am. Ceram. Soc.
1998, Moretti, J. Electron Spectrosc. Relat. Phenom.
1998, Yubero, J. Vac. Sci. Technol. A
1996, Parretta, Phys. Status Solidi A
1996, Akai, J. Am. Ceram. Soc.
1996, Córdoba, J. Solid State Chem.
1995, Lefez, Thin Solid Films
1988, Ferreira da Silva, J. Non-Cryst. Solids
1987, Rakhshani, J. Appl. Phys.
1986, Forouhi, Phys. Rev. B
1979, Drobny, Thin Solid Films
1979, Scrocco, Chem. Phys. Lett.
1975, Wagner, Faraday Discuss. Chem. Soc.
1963, Smith, Phys. Chem. Glasses
1962, Bamford, Phys. Chem. Glasses
1962, Bamford, Phys. Chem. Glasses

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