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Optical properties of Mn in regrown GaN-based epitaxial layersFeng-Wen Huang, Jinn-Kong Sheu, Shang-Ju Tu, Po-Cheng Chen, Yu-Hsiang Yeh, Ming-Lun Lee, Wei-Chih Lai, Wen-Che Tsai, and Wen-Hao Chang »View Author Affiliations
Feng-Wen Huang,1
Jinn-Kong Sheu,1,2,*
Shang-Ju Tu,1
Po-Cheng Chen,1
Yu-Hsiang Yeh,1
Ming-Lun Lee,3
Wei-Chih Lai,1,2
Wen-Che Tsai,4
and Wen-Hao Chang4
1Department of Photonics & Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan City 70101, Taiwan 2Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan City 70101, Taiwan 3Department of Electro-Optical Engineering, Southern Taiwan University, Tainan County 71001, Taiwan 4Department of Electrophysics, National Chiao Tung University, Hsinchu, 300 Taiwan *Corresponding author: jksheu@mail.ncku.edu.tw |
Optical Materials Express, Vol. 2, Issue 4, pp. 469-477 (2012)
http://dx.doi.org/10.1364/OME.2.000469
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Abstract
The memory effect and redistribution of manganese (Mn) into subsequently regrown GaN-based epitaxial layers by metalorganic chemical vapor deposition were revealed. Low-temperature up-converted photoluminescence (UPL) and the secondary ion mass spectrometry were performed on GaN-based epitaxial samples with and without Mn doping to study the effect of residual Mn on optical property. UPL emission, which originated from residual Mn doping in regrown InGaN quantum wells (QWs) because of the memory effect of the reactor, could be eliminated in an air-exposed and H2-baking manner prior to the regrowth of the QWs. Considerable residual Mn background level and slow decay rate of Mn concentration tail were also observed in the regrown epitaxial layers, which could be attributed to the memory effect or surface segregation and diffusion from the Mn-doped underlying layer during regrowth in the Mn-free reactor.
© 2012 OSA
OCIS Codes
(160.6000) Materials : Semiconductor materials
(230.0250) Optical devices : Optoelectronics
(350.6050) Other areas of optics : Solar energy
ToC Category:
Semiconductors
History
Original Manuscript: March 7, 2012
Revised Manuscript: March 22, 2012
Manuscript Accepted: March 22, 2012
Published: March 26, 2012
Citation
Feng-Wen Huang, Jinn-Kong Sheu, Shang-Ju Tu, Po-Cheng Chen, Yu-Hsiang Yeh, Ming-Lun Lee, Wei-Chih Lai, Wen-Che Tsai, and Wen-Hao Chang, "Optical properties of Mn in regrown GaN-based epitaxial layers," Opt. Mater. Express 2, 469-477 (2012)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-2-4-469
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Appl. Phys. Lett.
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