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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 2, Iss. 7 — Jul. 1, 2012
  • pp: 900–906

Physical evolution of nanograting inscription on the surface of fused silica

Feng Liang, Réal Vallée, and See Leang Chin  »View Author Affiliations

Optical Materials Express, Vol. 2, Issue 7, pp. 900-906 (2012)

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The nanograting inscription on the surface of a fused silica substrate is systematically investigated on a shot-to-shot basis. Three different evolutionary processes are observed with pulse fluence ranging from slightly below to well above the single shot ablation threshold. This dependence is explained by the interplay between local intensity distribution and incubation effect.

© 2012 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(140.3440) Lasers and laser optics : Laser-induced breakdown
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Laser Materials Processing

Original Manuscript: April 2, 2012
Revised Manuscript: May 14, 2012
Manuscript Accepted: May 16, 2012
Published: June 11, 2012

Feng Liang, Réal Vallée, and See Leang Chin, "Physical evolution of nanograting inscription on the surface of fused silica," Opt. Mater. Express 2, 900-906 (2012)

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  1. C. Hnatovsky, R. S. Taylor, P. P. Rajeev, E. Simova, V. R. Bhardwaj, D. M. Rayner, and P. B. Corkum, “Pulse duration dependence of femtosecond-laser-fabricated nanogratings in fused silica,” Appl. Phys. Lett.87, 014104 (2005). [CrossRef]
  2. M. Henyk, N. Vogel, D. Wolfframm, A. Tempel, and J. Reif, “Femtosecond laser ablation from dielectric materials: comparison to arc discharge erosion,” Appl. Phys. A69, S355–S358 (1999). [CrossRef]
  3. Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, “Self-organized nanogratings in glass irradiated by ultra-short light pulses,” Phys. Rev. Lett.91, 247405 (2003). [CrossRef] [PubMed]
  4. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Z. Xu, “Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser,” ACS Nano3, 4062–4070 (2009). [CrossRef] [PubMed]
  5. V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, “Optically produced arrays of planar nanostructures inside fused silica,” Phys. Rev. Lett.96, 057404 (2006). [CrossRef] [PubMed]
  6. W. Yang, E. Bricchi, P. G. Kazansky, J. Bovatsek, and A. Y. Arai, “Self-assembled periodic sub-wavelength structures by femtosecond laser direct writing,” Opt. Express14, 10117–10124 (2006). [CrossRef] [PubMed]
  7. Q. Sun, F. Liang, R. Vallée, and S. L. Chin, “Nanograting formation on the surface of silica glass by scanning focused femtosecond laser pulses,” Opt. Lett.33, 2713–2715 (2008). [CrossRef] [PubMed]
  8. S. Richter, M. Heinrich, S. Döring, A. Tünnermann, and S. Nolte, “Formation of femtosecond laser-induced nanogratings at high repetition rates,” Appl. Phys. A104, 503–507 (2011). [CrossRef]
  9. Q. M. Zhang, H. Lin, B. H. Jia, L. X. Xu, and M. Gu, “Nanogratings and nanoholes fabricated by direct femtosecond laser writing in chalcogenide glasses,” Opt. Express18, 6885–6890 (2010). [CrossRef] [PubMed]
  10. F. Liang, R. Vallée, and S. L. Chin, “Mechanism of nanograting formation on the surface of fused silica,” Opt. Express20, 4389–4396 (2012). [CrossRef] [PubMed]
  11. D. Ashkenasi, M. Lorenz, R. Stoian, and A. Rosenfeld, “Surface damage threshold and structuring of dielectrics using femtosecond laser pulses: the role of incubation,” Appl. Surf. Sci.150, 101–106 (1999). [CrossRef]
  12. A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, “Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation,” Appl. Phys. A69, S373–S376 (1999). [CrossRef]
  13. J. M. Liu, “Simple technique for measurements of pulsed Gaussian-beam spot sizes,” Opt. Lett.7, 196–198 (1982). [CrossRef] [PubMed]
  14. F. Liang, R. Vallée, D. Gingras, and S. L. Chin, “Role of ablation and incubation processes on surface nanograting formation,” Opt. Mater. Express1, 1244–1250 (2011). [CrossRef]
  15. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, “Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond,” Phys. Rev. B79, 125436 (2009). [CrossRef]

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