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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 3, Iss. 10 — Oct. 1, 2013
  • pp: 1576–1585

Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs

Youness Laaroussi, Christyves Chevallier, Frédéric Genty, Nicolas Fressengeas, Laurent Cerutti, Thierry Taliercio, Olivier Gauthier-Lafaye, Pierre-François Calmon, Benjamin Reig, Joel Jacquet, and Guilhem Almuneau  »View Author Affiliations


Optical Materials Express, Vol. 3, Issue 10, pp. 1576-1585 (2013)
http://dx.doi.org/10.1364/OME.3.001576


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Abstract

A new mid-infrared (MIR) Vertical Cavity Surface Emitting Laser (VCSEL) structure is proposed. We have integrated to the VCSEL structure both an oxide aperture for lateral confinement, and a sub-wavelength high-contrast-grating top mirror. Upon the GaSb-based half-VCSEL, we have grown a metamorphic AlGaAs heterostructure to enable thermal oxidation and grating mirror fabrication steps. A methodology based on optimization and anti-optimization methods has been used to design the optical grating, with improved parameter tolerances regarding processing errors. Finally, we show the complete fabrication of an electrically-pumped MIR monolithic VCSEL structure implementing both oxide confinement and a subwavelength grating top mirror.

© 2013 OSA

OCIS Codes
(140.3070) Lasers and laser optics : Infrared and far-infrared lasers
(220.0220) Optical design and fabrication : Optical design and fabrication
(050.6624) Diffraction and gratings : Subwavelength structures
(140.7260) Lasers and laser optics : Vertical cavity surface emitting lasers

ToC Category:
Semiconductors

History
Original Manuscript: June 18, 2013
Revised Manuscript: August 8, 2013
Manuscript Accepted: August 8, 2013
Published: September 3, 2013

Virtual Issues
Mid-IR Photonic Materials (2013) Optical Materials Express

Citation
Youness Laaroussi, Christyves Chevallier, Frédéric Genty, Nicolas Fressengeas, Laurent Cerutti, Thierry Taliercio, Olivier Gauthier-Lafaye, Pierre-François Calmon, Benjamin Reig, Joel Jacquet, and Guilhem Almuneau, "Oxide confinement and high contrast grating mirrors for Mid-infrared VCSELs," Opt. Mater. Express 3, 1576-1585 (2013)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-3-10-1576


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