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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 3, Iss. 10 — Oct. 1, 2013
  • pp: 1674–1686

Nano-groove and 3D fabrication by controlled avalanche using femtosecond laser pulses

Ričardas Buividas, Sima Rekštytė, Mangirdas Malinauskas, and Saulius Juodkazis  »View Author Affiliations

Optical Materials Express, Vol. 3, Issue 10, pp. 1674-1686 (2013)

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We report fabrication of sub-100 nm resolution structures by ablation on the surface of sapphire using femtosecond laser pulses. A single 50–70 nm wide groove was recorded by laser ablation via a controlled ripple formation on the surface. Ripples are created by breakdown due to a sphere-to-plane formation of an ionisation below surface in a similar way as the bulk ripples. Different thresholds for the ripples formed parallel and perpendicular to direction of the laser scan were observed. In a sol-gel photo-polymer SZ2080 and thermo-polymer polydimethylsiloxane, free-standing 3D structures were formed without use of two-photon absorbing photo-sensitizers. Both cases of the surface and bulk structuring were achieved via a controlled avalanche, which dominated ionisation of materials.

© 2013 OSA

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3850) Other areas of optics : Materials processing
(160.1245) Materials : Artificially engineered materials

ToC Category:
Laser Materials Processing

Original Manuscript: May 20, 2013
Revised Manuscript: July 29, 2013
Manuscript Accepted: August 29, 2013
Published: September 18, 2013

Virtual Issues
Ultrafast Laser Modification of Materials (2013) Optical Materials Express

Ričardas Buividas, Sima Rekštytė, Mangirdas Malinauskas, and Saulius Juodkazis, "Nano-groove and 3D fabrication by controlled avalanche using femtosecond laser pulses," Opt. Mater. Express 3, 1674-1686 (2013)

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