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Solution-processing of thick chalcogenide-chalcogenide and metal-chalcogenide structures by spin-coating and multilayer laminationYunlai Zha and Craig B. Arnold »View Author Affiliations
Yunlai Zha
and Craig B. Arnold*
Department of Electrical Engineering and Princeton Institute for the Science and Technology of Materials, Princeton University, Princeton, NJ 08544, USA *Corresponding author: cbarnold@princeton.edu |
Optical Materials Express, Vol. 3, Issue 2, pp. 309-317 (2013)
http://dx.doi.org/10.1364/OME.3.000309
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Abstract
This paper presents a new technique for fabricating thick (>10µm) chalcogenide multilayer structures. Films of arbitrary thicknesses are readily achieved through spin-coating, lamination and baking. For homogeneous systems, layer interfaces can be effectively removed by annealing above Tg. Alternatively, heterogeneous multilayer films can be realized by introducing layers of different chalcogenide materials or metals. In particular, photo-induced Ag dissolution is verified in a laminated multilayer film, with a refractive index increase greater than 0.2. The work presented here has great implications for chalcogenide deposition with potential applications in data storage, IR detection and IR beam combining.
© 2013 OSA
OCIS Codes
(160.2750) Materials : Glass and other amorphous materials
(310.1860) Thin films : Deposition and fabrication
ToC Category:
Glass and Other Amorphous Materials
History
Original Manuscript: October 22, 2012
Revised Manuscript: January 5, 2013
Manuscript Accepted: January 27, 2013
Published: January 30, 2013
Citation
Yunlai Zha and Craig B. Arnold, "Solution-processing of thick chalcogenide-chalcogenide and metal-chalcogenide structures by spin-coating and multilayer lamination," Opt. Mater. Express 3, 309-317 (2013)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-3-2-309
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References
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- E. Skordeva, K. Christova, M. Tzolov, and Z. Dimitrova, “Photoinduced changes of mechanical stress in amorphous Ge-As-S(Se) film/Si substrate systems,” Appl. Phys., A Mater. Sci. Process.66(1), 103–107 (1998). [CrossRef]
- P. Abgrall, C. Lattes, V. Conédéra, X. Dollat, S. Colin, and A. M. Gué, “A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films,” J. Micromech. Microeng.16(1), 113–121 (2006). [CrossRef]
- P. Abgrall, C. Lattes, V. Conédéra, X. Dollat, S. Colin, and A. M. Gué, “A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films,” J. Micromech. Microeng.16(1), 113–121 (2006). [CrossRef]
- K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993). [CrossRef]
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- S. Song, S. S. Howard, Z. J. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett.89(4), 041115 (2006). [CrossRef]
- P. Abgrall, C. Lattes, V. Conédéra, X. Dollat, S. Colin, and A. M. Gué, “A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films,” J. Micromech. Microeng.16(1), 113–121 (2006). [CrossRef]
- K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993). [CrossRef]
- A. V. Kolobov and S. R. Elliott, “Photodoping of amorphous chalcogenides by metals,” Adv. Phys.40(5), 625–684 (1991). [CrossRef]
- K. Shimakawa, S. Inami, and S. R. Elliott, “Reversible photoinduced change of photoconductivity in amorphous chalcogenide films,” Phys. Rev. B Condens. Matter42(18), 11857–11861 (1990). [CrossRef] [PubMed]
- H.-Y. Tsoi, J. P. Ellul, M. I. King, J. J. White, and W. C. Bradley, “A deep-depletion CCD imager for soft-X-ray, visible, and near-infrared sensing,” IEEE Trans. Electron. Dev.32(8), 1525–1530 (1985). [CrossRef]
- T. Wagner and P. J. S. Ewen, “Photo-induced dissolution effect in Ag/AS33S67 multilayer structures and its potential application,” J. Non-Cryst. Solids266-269, 979–984 (2000). [CrossRef]
- K. Petkov and P. J. S. Ewen, “Photoinduced changes in the linear and non-linear optical properties of chalcogenide glasses,” J. Non-Cryst. Solids249(2-3), 150–159 (1999). [CrossRef]
- A. E. Owen, A. P. Firth, and P. J. S. Ewen, “Photoinduced structural and physicochemical changes in amorphous-chalcogenide semiconductors,” Philos. Mag. B52(3), 347–362 (1985). [CrossRef]
- Y. F. Lai, J. Feng, B. W. Qiao, Y. F. Cai, Y. Y. Lin, T. A. Tang, B. C. Cai, and B. Chen, “Stacked chalcogenide layers used as multi-state storage medium for phase change memory,” Appl. Phys., A Mater. Sci. Process.84(1-2), 21–25 (2006). [CrossRef]
- Y. Zha, S. Fingerman, S. J. Cantrell, and C. B. Arnold, “Pore formation and removal in solution-processed amorphous arsenic sulfide films,” J. Non-Cryst. Solids (submitted).
- A. E. Owen, A. P. Firth, and P. J. S. Ewen, “Photoinduced structural and physicochemical changes in amorphous-chalcogenide semiconductors,” Philos. Mag. B52(3), 347–362 (1985). [CrossRef]
- M. Frumar and T. Wagner, “Ag doped chalcogenide glasses and their applications,” Curr. Opin. Solid State Mater. Sci.7(2), 117–126 (2003). [CrossRef]
- T. Wágner, A. Mackova, V. Perina, E. Rauhala, A. Seppala, S. O. Kasap, M. Frumar, M. Vlcek, and M. Vlcek, “The study of photo- and thermally-induced diffusion and dissolution of Ag in As30S70 amorphous films and its reaction products,” J. Non-Cryst. Solids299-302, 1028–1032 (2002). [CrossRef]
- T. Wagner, M. Frumar, S. O. Kasap, M. Vlcek, and M. Vlcek, “New Ag-containing amorphous chalcogenide thin films—prospective materials for rewriteable optical memories,” J. Optoelectron. Adv. Mater.3, 227–232 (2001).
- C. Tsay, E. Mujagić, C. K. Madsen, C. F. Gmachl, and C. B. Arnold, “Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides,” Opt. Express18(15), 15523–15530 (2010). [CrossRef] [PubMed]
- S. Song, S. S. Howard, Z. J. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett.89(4), 041115 (2006). [CrossRef]
- K. E. Youden, T. Grevatt, R. W. Eason, H. N. Rutt, R. S. Deol, and G. Wylangowski, “Pulsed-laser deposition of Ga-La-S chalcogenide glass thin-film optical wave-guides,” Appl. Phys. Lett.63(12), 1601–1603 (1993). [CrossRef]
- P. Abgrall, C. Lattes, V. Conédéra, X. Dollat, S. Colin, and A. M. Gué, “A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films,” J. Micromech. Microeng.16(1), 113–121 (2006). [CrossRef]
- H. R. Qiu, K. Miura, and K. Hirao, “Femtosecond laser-induced microfeatures in glasses and their applications,” J. Non-Cryst. Solids354(12-13), 1100–1111 (2008). [CrossRef]
- S. Song, S. S. Howard, Z. J. Liu, A. O. Dirisu, C. F. Gmachl, and C. B. Arnold, “Mode tuning of quantum cascade lasers through optical processing of chalcogenide glass claddings,” Appl. Phys. Lett.89(4), 041115 (2006). [CrossRef]
- N. Carlie, J. D. Musgraves, B. Zdyrko, I. Luzinov, J. J. Hu, V. Singh, A. Agarwal, L. C. Kimerling, A. Canciamilla, F. Morichetti, A. Melloni, and K. Richardson, “Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges,” Opt. Express18(25), 26728–26743 (2010). [CrossRef] [PubMed]
- S. Hudgens and B. Johnson, “Overview of phase-change chalcogenide nonvolatile memory technology,” MRS Bull.29(11), 829–832 (2004). [CrossRef]
- K. Shimakawa, S. Inami, and S. R. Elliott, “Reversible photoinduced change of photoconductivity in amorphous chalcogenide films,” Phys. Rev. B Condens. Matter42(18), 11857–11861 (1990). [CrossRef] [PubMed]
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