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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 3, Iss. 8 — Aug. 1, 2013
  • pp: 1119–1126

Broadband antireflective silicon carbide surface produced by cost-effective method

Aikaterini Argyraki, Yiyu Ou, and Haiyan Ou  »View Author Affiliations

Optical Materials Express, Vol. 3, Issue 8, pp. 1119-1126 (2013)

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A cost-effective method for fabricating antireflective subwavelength structures on silicon carbide is demonstrated. The nanopatterning is performed in a 2-step process: aluminum deposition and reactive ion etching. The effect, of the deposited aluminum film thickness and the reactive ion etching conditions, on the average surface reflectance and nanostructure landscape have been investigated systematically. The average reflectance of silicon carbide surface is significantly suppressed from 25.4% to 0.05%, under the optimal experimental conditions, in the wavelength range of 390-784 nm. The presence of stochastic nanostructures also changes the wetting properties of silicon carbide surface from hydrophilic (47°) to hydrophobic (108°).

© 2013 OSA

OCIS Codes
(230.3670) Optical devices : Light-emitting diodes
(310.1210) Thin films : Antireflection coatings
(220.4241) Optical design and fabrication : Nanostructure fabrication
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:

Original Manuscript: June 10, 2013
Revised Manuscript: July 5, 2013
Manuscript Accepted: July 5, 2013
Published: July 19, 2013

Aikaterini Argyraki, Yiyu Ou, and Haiyan Ou, "Broadband antireflective silicon carbide surface produced by cost-effective method," Opt. Mater. Express 3, 1119-1126 (2013)

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