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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 3, Iss. 9 — Sep. 1, 2013
  • pp: 1205–1214

Silicon photonic devices and platforms for the mid-infrared

M. Nedeljkovic, A. Z. Khokhar, Y. Hu, X. Chen, J. Soler Penades, S. Stankovic, H. M. H. Chong, D. J. Thomson, F. Y. Gardes, G. T. Reed, and G. Z. Mashanovich  »View Author Affiliations

Optical Materials Express, Vol. 3, Issue 9, pp. 1205-1214 (2013)

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Due to its excellent electronic and photonic properties, silicon is a good candidate for mid-infrared optoelectronic devices and systems that can be used in a host of applications. In this paper we review some of the results reported recently, and we also present several new results on mid-infrared photonic devices including Mach-Zehnder interferometers, multimode interference splitters and multiplexers based on silicon-on-insulator, polysilicon, suspended silicon, and slot waveguide platforms.

© 2013 OSA

OCIS Codes
(160.3130) Materials : Integrated optics materials
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits

ToC Category:

Original Manuscript: June 17, 2013
Revised Manuscript: July 18, 2013
Manuscript Accepted: July 18, 2013
Published: August 2, 2013

Virtual Issues
Mid-IR Photonic Materials (2013) Optical Materials Express

M. Nedeljkovic, A. Z. Khokhar, Y. Hu, X. Chen, J. Soler Penades, S. Stankovic, H. M. H. Chong, D. J. Thomson, F. Y. Gardes, G. T. Reed, and G. Z. Mashanovich, "Silicon photonic devices and platforms for the mid-infrared," Opt. Mater. Express 3, 1205-1214 (2013)

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  1. L. Vivien and L. Pavesi, Handbook of Silicon Photonics (CRC Press, 2013).
  2. www.luxtera.com
  3. www.kotura.com
  4. L.  Vivien, A.  Polzer, D.  Marris-Morini, J.  Osmond, J.-M.  Hartmann, P.  Crozat, E.  Cassan, C.  Kopp, H.  Zimmermann, J.-M.  Fédéli, “Zero-bias 40Gbit/s germanium waveguide photodetector on silicon,” Opt. Express 20(2), 1096–1101 (2012). [CrossRef] [PubMed]
  5. G.  Roelkens, L.  Liu, D.  Liang, R.  Jones, A.  Fang, B.  Koch, J.  Bowers, “III-V/Silicon photonics for on-chip and intra-chip optical interconnect,” Laser and Photonics Reviews 4(6), 751–779 (2010). [CrossRef]
  6. J. S.  Orcutt, B.  Moss, C.  Sun, J.  Leu, M.  Georgas, J.  Shainline, E.  Zgraggen, H.  Li, J.  Sun, M.  Weaver, S.  Urošević, M.  Popović, R. J.  Ram, V.  Stojanović, “Open foundry platform for high-performance electronic-photonic integration,” Opt. Express 20(11), 12222–12232 (2012). [CrossRef] [PubMed]
  7. R.  Soref, “Mid-infrared photonics in silicon and germanium,” Nat. Photonics 4(8), 495–497 (2010). [CrossRef]
  8. M. M. Milošević, D. J. Thomson, X. Chen, D. Cox, and G. Z. Mashanovich, “Silicon waveguides for the 3-4 μm wavelength range,” in Proceedings of the 8th IEEE Conference on Group IV Photonics (Institute of Electrical and Electronics Engineers, New York, 2011), pp. 208–210. [CrossRef]
  9. T.  Baehr-Jones, A.  Spott, R.  Ilic, A.  Spott, B.  Penkov, W.  Asher, M.  Hochberg, “Silicon-on-sapphire integrated waveguides for the mid-infrared,” Opt. Express 18(12), 12127–12135 (2010). [CrossRef] [PubMed]
  10. F.  Li, S. D.  Jackson, C.  Grillet, E.  Magi, D.  Hudson, S. J.  Madden, Y.  Moghe, C.  O’Brien, A.  Read, S. G.  Duvall, P.  Atanackovic, B. J.  Eggleton, D. J.  Moss, “Low propagation loss silicon-on-sapphire waveguides for the mid-infrared,” Opt. Express 19(16), 15212–15220 (2011). [CrossRef] [PubMed]
  11. A.  Spott, Y.  Liu, T.  Baehr-Jones, R.  Ilic, M.  Hochberg, “Silicon waveguides and ring resonators at 5.5 μm,” Appl. Phys. Lett. 97(21), 213501 (2010). [CrossRef]
  12. R.  Shankar, I.  Bulu, M.  Lončar, “Integrated high-quality factor silicon-on-sapphire ring resonators for the mid-infrared,” Appl. Phys. Lett. 102(5), 051108 (2013). [CrossRef]
  13. R.  Shankar, I.  Bulu, R.  Leijssen, M.  Lončar, “Study of thermally-induced optical bistability and the role of surface treatments in Si-based mid-infrared photonic crystal cavities,” Opt. Express 19(24), 24828–24837 (2011). [CrossRef] [PubMed]
  14. G. Z.  Mashanovich, M. M.  Milošević, M.  Nedeljkovic, N.  Owens, B.  Xiong, E.-J.  Teo, Y.  Hu, “Low loss silicon waveguides for the mid-infrared,” Opt. Express 19(8), 7112–7119 (2011). [CrossRef] [PubMed]
  15. E. J.  Teo, A. A.  Bettiol, M. B. H.  Breese, P. Y.  Yang, G. Z.  Mashanovich, W. R.  Headley, G. T.  Reed, D. J.  Blackwood, “Three-dimensional control of optical waveguide fabrication in silicon,” Opt. Express 16(2), 573–578 (2008). [CrossRef] [PubMed]
  16. P. Y.  Yang, G. Z.  Mashanovich, I.  Gomez-Morilla, W. R.  Headley, G. T.  Reed, E. J.  Teo, D. J.  Blackwood, M. B. H.  Breese, A. A.  Bettiol, “Free standing waveguides in silicon,” Appl. Phys. Lett. 90(24), 241109 (2007). [CrossRef]
  17. S.  Khan, J.  Chiles, S.  Fathpour, “Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics,” Appl. Phys. Lett. 102(12), 121104 (2013). [CrossRef]
  18. R. A.  Soref, S. J.  Emelett, W. R.  Buchwald, “Silicon waveguided components for the long-wave infrared region,” J. Opt. A, Pure Appl. Opt. 8(10), 840–848 (2006). [CrossRef]
  19. M.  Milošević, P. S.  Matavulj, P. Y.  Yang, A.  Bagolini, G. Z.  Mashanovich, “Rib waveguides for mid-infrared silicon photonics,” J. Opt. Soc. Am. B 26(9), 1760–1766 (2009). [CrossRef]
  20. M. M.  Milošević, M.  Nedeljkovic, T. M.  Ben Masaud, E.  Jaberansary, H. M. H.  Chong, N. G.  Emerson, G. T.  Reed, G. Z.  Mashanovich, “Silicon waveguides and devices for the mid-infrared,” Appl. Phys. Lett. 101(12), 121105 (2012). [CrossRef]
  21. M.  Muneeb, X.  Chen, P.  Verheyen, G.  Lepage, S.  Pathak, E.  Ryckeboer, A.  Malik, B.  Kuyken, M.  Nedeljkovic, J.  Van Campenhout, G. Z.  Mashanovich, G.  Roelkens, “Demonstration of silicon-on-insulator mid-infrared spectrometers operating at 3.8μm,” Opt. Express 21(10), 11659–11669 (2013). [CrossRef] [PubMed]
  22. Z.  Cheng, X.  Chen, C. Y.  Wong, K.  Xu, C. K.  Fung, Y. M.  Chen, H. K.  Tsang, “Focusing subwavelength grating coupler for mid-infrared suspended membrane waveguide,” Opt. Lett. 37(7), 1217–1219 (2012). [CrossRef] [PubMed]
  23. F.  Dell’Olio, V. M.  Passaro, “Optical sensing by optimized silicon slot waveguides,” Opt. Express 15(8), 4977–4993 (2007). [CrossRef] [PubMed]
  24. Z.  Wang, N.  Zhu, Y.  Tang, L.  Wosinski, D.  Dai, S.  He, “Ultra-compact low-loss coupler between strip and slot waveguides,” Opt. Lett. 34(10), 1498–1500 (2009). [CrossRef] [PubMed]
  25. Z.  Cheng, X.  Chen, C. Y.  Wong, K.  Xu, H. K.  Tsang, “Mid-infrared suspended membrane waveguide and ring resonator on silicon-on-insulator,” IEEE Phot. J. 4(5), 1510–1519 (2012). [CrossRef]
  26. C.  Reimer, M.  Nedeljkovic, D. J. M.  Stothard, M. O. S.  Esnault, C.  Reardon, L.  O’Faolain, M.  Dunn, G. Z.  Mashanovich, T. F.  Krauss, “Mid-infrared photonic crystal waveguides in silicon,” Opt. Express 20(28), 29361–29368 (2012). [CrossRef] [PubMed]
  27. D. J.  Thomson, F. Y.  Gardes, J.-M.  Fedeli, S.  Zlatanovic, Y.  Hu, B. P.-P.  Kuo, E.  Myslivets, N.  Alic, S.  Radic, G. Z.  Mashanovich, G. T.  Reed, “50 Gbit/s silicon optical modulator,” IEEE Photon. Technol. Lett. 24(4), 234–236 (2012). [CrossRef]
  28. Y.  Hu, R. M.  Jenkins, F. Y.  Gardes, E. D.  Finlayson, G. Z.  Mashanovich, G. T.  Reed, “Wavelength division (de)multiplexing based on waveguide mode dispersion,” Opt. Lett. 36(23), 4488–4490 (2011). [CrossRef] [PubMed]
  29. D. J.  Thomson, Y.  Hu, G. T.  Reed, J.-M.  Fedeli, “Low loss MMI couplers for high performance MZI modulators,” IEEE Photon. Technol. Lett. 22(20), 1485–1487 (2010). [CrossRef]
  30. W.  Bogaerts, S. K.  Selvaraja, P.  Dumon, J.  Brouckaert, K.  De Vos, D.  Van Thourhout, R.  Baets, “Silicon-on-insulator spectral filters fabricated with CMOS technology,” IEEE J. Sel. Top. Quant. 16(1), 33–44 (2010). [CrossRef]
  31. Y.  Wei, G.  Li, Y.  Hao, Y.  Li, J.  Yang, M.  Wang, X.  Jiang, “Long-wave infrared 1 × 2 MMI based on air-gap beneath silicon rib waveguides,” Opt. Express 19(17), 15803–15809 (2011). [CrossRef] [PubMed]
  32. D. J.  Thomson, F. Y.  Gardes, Y.  Hu, G.  Mashanovich, M.  Fournier, P.  Grosse, J.-M.  Fedeli, G. T.  Reed, “High contrast 40Gbit/s optical modulation in silicon,” Opt. Express 19(12), 11507–11516 (2011). [CrossRef] [PubMed]
  33. M.  Nedeljkovic, R.  Soref, G. Z.  Mashanovich, “Free-carrier electrorefraction and electroabsorption modulation predictions for silicon over the 1-14µm infrared wavelength range,” IEEE Photonics J. 3(6), 1171–1180 (2011). [CrossRef]
  34. M. A.  Van Camp, S.  Assefa, D. M.  Gill, T.  Barwicz, S. M.  Shank, P. M.  Rice, T.  Topuria, W. M.  Green, “Demonstration of electrooptic modulation at 2165nm using a silicon Mach-Zehnder interferometer,” Opt. Express 20(27), 28009–28016 (2012). [CrossRef] [PubMed]
  35. Y.  Hu, F. Y.  Gardes, D. J.  Thomson, G. Z.  Mashanovich, G. T.  Reed, “Coarse wavelength division (de)multiplexer using interleaved angled multimode interferometer structure,” Appl. Phys. Lett. 102(25), 251116 (2013). [CrossRef]

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