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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 3, Iss. 9 — Sep. 1, 2013
  • pp: 1474–1487

Si-CMOS compatible materials and devices for mid-IR microphotonics

Pao Tai Lin, Vivek Singh, Jianfei Wang, Hongtao Lin, Juejun Hu, Kathleen Richardson, J. David Musgraves, Igor Luzinov, Joel Hensley, Lionel C. Kimerling, and Anu Agarwal  »View Author Affiliations

Optical Materials Express, Vol. 3, Issue 9, pp. 1474-1487 (2013)

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CMOS compatible mid-Infrared (mid-IR) microphotonics including (1) broadband SOUP (Silicon on Oxide Undercladding Pedestal) waveguides; and (2) mid-IR transparent chalcogenide glass (ChGs) waveguides monolithically integrated with a PbTe thin film photodetector; are demonstrated. Using a pedestal undercladding geometry we obtain an optical loss for our Si waveguide which is 10 dB/cm lower compared to other waveguides using planar SiO2 cladding at λ = 5 µm, and a fundamental mode is seen over a broad mid-IR spectral range. To realize a fully integrated mid-IR on-chip system, in parallel, we develop PbTe thin film detectors that can be deposited on various mid-IR platforms through a thermal evaporation technique, offering high photoresponsivity of 25 V/W from λ = 1 µm to 4 µm. The detector can be efficiently integrated, using a suitable spacer, to an underlying Chalcogenide glass (ChGs) waveguide. Our results of low loss waveguides and integrated thin film detectors enable Si-CMOS microphotonics for mid-IR applications.

© 2013 OSA

OCIS Codes
(130.3060) Integrated optics : Infrared
(130.3120) Integrated optics : Integrated optics devices
(130.3130) Integrated optics : Integrated optics materials

ToC Category:

Original Manuscript: July 1, 2013
Revised Manuscript: August 14, 2013
Manuscript Accepted: August 14, 2013
Published: August 26, 2013

Virtual Issues
Mid-IR Photonic Materials (2013) Optical Materials Express
September 3, 2013 Spotlight on Optics

Pao Tai Lin, Vivek Singh, Jianfei Wang, Hongtao Lin, Juejun Hu, Kathleen Richardson, J. David Musgraves, Igor Luzinov, Joel Hensley, Lionel C. Kimerling, and Anu Agarwal, "Si-CMOS compatible materials and devices for mid-IR microphotonics," Opt. Mater. Express 3, 1474-1487 (2013)

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