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Optical Materials Express

Optical Materials Express

  • Editor: David J. Hagan
  • Vol. 4, Iss. 1 — Jan. 1, 2014
  • pp: 155–161

Nanometric light spots of cathode luminescence in Y2O3:Eu3+ phosphor thin films excited by focused electron beams as ultra-small illumination source for high-resolution optical microscope

Atsushi Sugita, Masashi Kamiya, Chiyu Morita, Aki Miyake, Yasunori Nawa, Yuriko Masuda, Wataru Inami, Hiro-ko Kominami, Yoichiro Nakanishi, and Yoshimasa Kawata  »View Author Affiliations


Optical Materials Express, Vol. 4, Issue 1, pp. 155-161 (2014)
http://dx.doi.org/10.1364/OME.4.000155


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Abstract

We present an Electron-beam-eXcitation-Assisted (EXA) optical microscope with a nanometric illumination light source consisting of red cathode luminescence (CL) lights emitted by a Y2O3:Eu3+ phosphor thin film excited by a high-energy focused electron beams. Phosphor films a few hundred nanometers thick were fabricated on 50-nm Si3N4 membranes using electron beam evaporation. The film preparation conditions for brighter CL emissions were examined in terms of the post-annealing temperatures and film thickness. We succeeded in spatially resolving gold nanoparticles with average diameter of 100 nm. The observations proved that the microscope has a spatial resolution higher than the diffraction limits.

© 2013 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(160.2540) Materials : Fluorescent and luminescent materials

ToC Category:
Fluorescent and Luminescent Materials

History
Original Manuscript: October 22, 2013
Revised Manuscript: December 14, 2013
Manuscript Accepted: December 16, 2013
Published: December 19, 2013

Citation
Atsushi Sugita, Masashi Kamiya, Chiyu Morita, Aki Miyake, Yasunori Nawa, Yuriko Masuda, Wataru Inami, Hiro-ko Kominami, Yoichiro Nakanishi, and Yoshimasa Kawata, "Nanometric light spots of cathode luminescence in Y2O3:Eu3+ phosphor thin films excited by focused electron beams as ultra-small illumination source for high-resolution optical microscope," Opt. Mater. Express 4, 155-161 (2014)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-4-1-155


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