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Optical Materials Express

Optical Materials Express

  • Editor: David Hagan
  • Vol. 4, Iss. 3 — Mar. 1, 2014
  • pp: 509–517

Thermal UV treatment on SU-8 polymer for integrated optics

Xi-Bin Wang, Jian Sun, Chang-Ming Chen, Xiao-Qiang Sun, Fei Wang, and Da-Ming Zhang  »View Author Affiliations


Optical Materials Express, Vol. 4, Issue 3, pp. 509-517 (2014)
http://dx.doi.org/10.1364/OME.4.000509


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Abstract

We report a simple and low-cost method to fabricate SU-8-based polymer waveguide devices. The influence of hard-baking temperature on SU-8 polymer treated with or without UV radiation was investigated in detail. Based on these properties, the straight type, Y branch type, March-Zehnder (M-Z) type and 1 × 4 splitter waveguides were successfully fabricated. And a polymeric thermal-optic (TO) switch with M-Z type waveguide was also fabricated by this method. The device exhibits low power consumption of less than 6.4 mW, fast rise time of about 149.3 µs and fast fall time of about 139.3 µs. The experimental results showed that this method can bypass the need for complex lithography and provide high resolution and fine waveguide quality desired for TO switches as well as other planar lightwave devices.

© 2014 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(160.4890) Materials : Organic materials
(260.7190) Physical optics : Ultraviolet
(160.5335) Materials : Photosensitive materials
(130.5460) Integrated optics : Polymer waveguides

ToC Category:
Materials for Integrated Optics

History
Original Manuscript: November 20, 2013
Revised Manuscript: January 28, 2014
Manuscript Accepted: February 4, 2014
Published: February 24, 2014

Citation
Xi-Bin Wang, Jian Sun, Chang-Ming Chen, Xiao-Qiang Sun, Fei Wang, and Da-Ming Zhang, "Thermal UV treatment on SU-8 polymer for integrated optics," Opt. Mater. Express 4, 509-517 (2014)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-4-3-509


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