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Optical Materials Express

Optical Materials Express

  • Editor: David Hagan
  • Vol. 4, Iss. 6 — Jun. 1, 2014
  • pp: 1166–1171

Optical ridge waveguides in 4H-SiC single crystal produced by combination of carbon ion irradiation and femtosecond laser ablation

Qingfang Luan, Yuechen Jia, Yutian Wang, Shavkat Akhmadaliev, Shengqiang Zhou, Javier R. Vázquez de Aldana, Yang Tan, and Feng Chen  »View Author Affiliations


Optical Materials Express, Vol. 4, Issue 6, pp. 1166-1171 (2014)
http://dx.doi.org/10.1364/OME.4.001166


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Abstract

Optical ridge waveguides were fabricated in 4H-SiC single crystal by combination of 15 MeV C5+ ion irradiation and femtosecond laser ablation. The near-field modal intensity distributions exhibit the well-confined light propagation in the waveguides. A propagation loss as low as 5.1 dB/cm has been achieved at 632.8 nm for the ridge waveguide. The investigation of confocal micro-Raman spectra suggests partial transition of 4H-SiC to 6H-SiC in the irradiated region.

© 2014 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(160.6000) Materials : Semiconductor materials
(230.7370) Optical devices : Waveguides

ToC Category:
Laser Materials Processing

History
Original Manuscript: March 13, 2014
Revised Manuscript: May 4, 2014
Manuscript Accepted: May 6, 2014
Published: May 12, 2014

Citation
Qingfang Luan, Yuechen Jia, Yutian Wang, Shavkat Akhmadaliev, Shengqiang Zhou, Javier R. Vázquez de Aldana, Yang Tan, and Feng Chen, "Optical ridge waveguides in 4H-SiC single crystal produced by combination of carbon ion irradiation and femtosecond laser ablation," Opt. Mater. Express 4, 1166-1171 (2014)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-4-6-1166


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