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Optical Materials Express

Optical Materials Express

  • Editor: David Hagan
  • Vol. 4, Iss. 8 — Aug. 1, 2014
  • pp: 1696–1707

Optical properties of UV-transparent aluminum oxide / aluminum fluoride mixture films, prepared by plasma-ion assisted evaporation and ion beam sputtering

Olaf Stenzel, Steffen Wilbrandt, Shan Du, Christian Franke, Norbert Kaiser, Andreas Tünnermann, Mathias Mende, Henrik Ehlers, and Mario Held  »View Author Affiliations


Optical Materials Express, Vol. 4, Issue 8, pp. 1696-1707 (2014)
http://dx.doi.org/10.1364/OME.4.001696


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Abstract

Electron beam evaporation (without and with plasma assistance) as well as ion beam sputtering are used to prepare optical mixture coatings for applications in the ultraviolet spectral range. It is demonstrated that intermixing aluminum oxide/ aluminum fluoride materials by these physical vapor deposition techniques results in optical coatings with flexible refractive indices varying between 1.40 and 1.75 in the deep ultraviolet spectral region. At the same time, extinction coefficients vary between less than 1x10−4 and 2x10−3. For evaporated layers, at certain mixture ratios, mechanical stress appears to be close to zero.

© 2014 Optical Society of America

OCIS Codes
(310.1620) Thin films : Interference coatings
(310.1860) Thin films : Deposition and fabrication
(310.3840) Thin films : Materials and process characterization
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties
(310.4925) Thin films : Other properties (stress, chemical, etc.)

ToC Category:
Thin Films

History
Original Manuscript: June 12, 2014
Revised Manuscript: July 9, 2014
Manuscript Accepted: July 9, 2014
Published: July 22, 2014

Citation
Olaf Stenzel, Steffen Wilbrandt, Shan Du, Christian Franke, Norbert Kaiser, Andreas Tünnermann, Mathias Mende, Henrik Ehlers, and Mario Held, "Optical properties of UV-transparent aluminum oxide / aluminum fluoride mixture films, prepared by plasma-ion assisted evaporation and ion beam sputtering," Opt. Mater. Express 4, 1696-1707 (2014)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-4-8-1696


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