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Optical Materials Express

Optical Materials Express

  • Editor: David Hagan
  • Vol. 4, Iss. 9 — Sep. 1, 2014
  • pp: 1833–1847

Control of optical properties of TiNxOy films and application for high performance solar selective absorbing coatings

Feiliang Chen, Shao-Wei Wang, Liming Yu, Xiaoshuang Chen, and Wei Lu  »View Author Affiliations


Optical Materials Express, Vol. 4, Issue 9, pp. 1833-1847 (2014)
http://dx.doi.org/10.1364/OME.4.001833


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Abstract

TiNxOy films with controllable optical properties have been fabricated by reactive mid-frequency magnetron sputtering from titanium nitride target. The optical and electrical properties were studied as a function of the reactive gas flow and were correlated with the film stoichiometry. The results showed that the behavior of TiNxOy films can be adjusted from metallic to dielectric by increasing oxygen content, which is of great significance to their extensive applications. Owing to the accurate control of optical properties, a TiNxOy based solar selective absorbing coating has been designed and prepared with the aid of TiO2/Si3N4/SiO2 antireflection layers. Its solar absorbance is as high as 97.5% and thermal emissivity is 4.3% with total thickness of 230 nm. The solar absorbance can maintain above 90% for a broad incident angle range from 0° to 65°.

© 2014 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties
(310.3915) Thin films : Metallic, opaque, and absorbing coatings

ToC Category:
Thin Films

History
Original Manuscript: June 3, 2014
Revised Manuscript: July 26, 2014
Manuscript Accepted: July 27, 2014
Published: August 12, 2014

Citation
Feiliang Chen, Shao-Wei Wang, Liming Yu, Xiaoshuang Chen, and Wei Lu, "Control of optical properties of TiNxOy films and application for high performance solar selective absorbing coatings," Opt. Mater. Express 4, 1833-1847 (2014)
http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-4-9-1833


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