Widefield Subsurface Microscopy of Integrated Circuits
Optics and Photonics News, Vol. 19, Issue 12, pp. 31-31 (2008)
http://dx.doi.org/10.1364/OPN.19.12.000031
Acrobat PDF (104 KB)
Abstract
Microscopy: We continue to find new performance enhancements even for mature technologies like optical microscopy.
© 2008 Optical Society of America
OCIS Codes
(000.0000) General : General
Citation
Fatih Hakan Köklü, Anthony Nickolas Vamivakas, Stephen Ippolito, Bennett B. Goldberg, and Selim Ünlü, "Widefield Subsurface Microscopy
of Integrated Circuits," Optics & Photonics News 19(12), 31-31 (2008)
http://www.opticsinfobase.org/opn/abstract.cfm?URI=opn-19-12-31
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