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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editor: Gregory W. Faris
  • Vol. 1, Iss. 4 — Apr. 12, 2006

Microelectromechanical system pressure sensor integrated onto optical fiber by anodic bonding

Anish Saran, Don C. Abeysinghe, and Joseph T. Boyd  »View Author Affiliations

Applied Optics, Vol. 45, Issue 8, pp. 1737-1742 (2006)

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Optical microelectromechanical system pressure sensors based on the principle of Fabry–Perot interferometry have been developed and fabricated using the technique of silicon-to-silicon anodic bonding. The pressure sensor is then integrated onto an optical fiber by a novel technique of anodic bonding without use of any adhesives. In this anodic bonding technique we use ultrathin silicon of thickness 10   μm to bond the optical fiber to the sensor head. The ultrathin silicon plays the role of a stress-reducing layer, which helps the bonding of an optical fiber to silicon having conventional wafer thickness. The pressure-sensing membrane is formed by 8   μm thick ultrathin silicon acting as a membrane, thus eliminating the need for bulk silicon etching. The pressure sensor integrated onto an optical fiber is tested for static response, and experimental results indicate degradation in the fringe visibility of the Fabry–Perot interferometer. This effect was mainly due to divergent light rays from the fiber degrading the fringe visibility. This effect is demonstrated in brief by an analytical model.

© 2006 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(230.3990) Optical devices : Micro-optical devices
(230.4000) Optical devices : Microstructure fabrication

ToC Category:
Optical Devices

Original Manuscript: February 11, 2005
Revised Manuscript: September 22, 2005
Manuscript Accepted: September 28, 2005

Virtual Issues
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics

Anish Saran, Don C. Abeysinghe, and Joseph T. Boyd, "Microelectromechanical system pressure sensor integrated onto optical fiber by anodic bonding," Appl. Opt. 45, 1737-1742 (2006)

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