Experimental characterization of focusing by high-numerical-aperture zone plates
JOSA A, Vol. 23, Issue 3, pp. 567-571 (2006)
http://dx.doi.org/10.1364/JOSAA.23.000567
Enhanced HTML 
Acrobat PDF (786 KB)
Abstract
High-numerical-aperture zone plates have important applications in high-resolution optical maskless lithography as well as scanning confocal microscopy. We describe two methods to experimentally characterize the focusing properties, i.e., the point-spread function, of such diffractive lenses. The first method uses spot exposures in photoresist and the second uses a conventional knife-edge scan. The experimental results agree well with rigorous theoretical calculations.
© 2006 Optical Society of America
OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(080.3630) Geometric optics : Lenses
(090.1970) Holography : Diffractive optics
(110.3960) Imaging systems : Microlithography
(110.5220) Imaging systems : Photolithography
(180.1790) Microscopy : Confocal microscopy
ToC Category:
Imaging Systems
History
Original Manuscript: May 27, 2005
Revised Manuscript: August 2, 2005
Manuscript Accepted: August 3, 2005
Virtual Issues
Vol. 1, Iss. 4 Virtual Journal for Biomedical Optics
Citation
Rajesh Menon, Dario Gil, and Henry I. Smith, "Experimental characterization of focusing by high-numerical-aperture zone plates," J. Opt. Soc. Am. A 23, 567-571 (2006)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=josaa-23-3-567
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Numerical optimization of phase-only elements based on the fractional Talbot effect (JOSAA)
- Generalized conversion from the phase function to the blazed surface-relief profile of diffractive optical elements (JOSAA)
- Generation of nondiffracting beams by diffractive phase elements (JOSAA)
- Binary optics and confocal imaging (OL)
- Number of phase levels in a two-dimensional separable Talbot array illuminator (JOSAA)
Related Conference Papers
- Retinal Motion Tracking in Adaptive Optics Scanning Laser Ophthalmoscopy
- Apodization of lithographically-scribed planar holographic Bragg reflectors via effective gray-scale
- Diffractive Optical Elements Based Fabrication of Photonic Crystal
- Observation of Berry Phase Effect of Optical Vortex with an Asymmetric Defect
- Novel Technique to Remove Measurement Noise Generated by Pinhole Diffraction Phenomenon
« Previous Article | Next Article »
OSA is a member of 