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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editor: Gregory W. Faris
  • Vol. 5, Iss. 1 — Jan. 4, 2010

Thin film Ag superlens towards lab-on-a-chip integration

C. Jeppesen, R. B. Nielsen, A. Boltasseva, S. Xiao, N. A. Mortensen, and A. Kristensen  »View Author Affiliations

Optics Express, Vol. 17, Issue 25, pp. 22543-22552 (2009)

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A thin metal film near-field superlens, as originally suggested by Pendry and realized by Fang et al. and Melville et al., is investigated with emphasis on materials suitable for integration on a lab-on-a-chip platform. A chemically resistant cyclo-olefin copolymer (COC), mr-I-T85 from microresist technology, is applied as dielectric matrix/spacer for an Ag thin film superlens. The superlens successfully resolves 80 nm half-pitch gratings when illuminated with UV radiation at a free space wavelength of 365 nm. The superlens design, fabrication and characterization is discussed.

© 2009 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4241) Optical design and fabrication : Nanostructure fabrication
(250.5403) Optoelectronics : Plasmonics

ToC Category:

Original Manuscript: September 21, 2009
Revised Manuscript: November 21, 2009
Manuscript Accepted: November 23, 2009
Published: November 24, 2009

Virtual Issues
Vol. 5, Iss. 1 Virtual Journal for Biomedical Optics

C. Jeppesen, R. B. Nielsen, A. Boltasseva, S. Xiao, N. A. Mortensen, and A. Kristensen, "Thin film Ag superlens towards lab-on-a-chip integration," Opt. Express 17, 22543-22552 (2009)

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