Label-free optical biosensing using a horizontal air-slot SiN<sub>x</sub> microdisk resonator

doi:10.1364/OE.18.020638

Label-free optical biosensing using a horizontal air-slot SiN_x microdisk resonator

Shinyoung Lee, Seok Chan Eom, Jee Soo Chang, Chul Huh, Gun Yong Sung, and Jung H. Shin »View Author Affiliations

Optics Express, Vol. 18, Issue 20, pp. 20638-20644 (2010)
http://dx.doi.org/10.1364/OE.18.020638

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Abstract

We demonstrate label-free optical biosensing using a horizontal air-slotted silicon-rich silicon nitride (SiNx) microdisk resonator. Due to the strong confinement of light in the air-slot, a large resonance shift of 6.2 nm is observed upon reaction of the biotin-functionalized disk with a streptavidin solution with concentration of 2.5 μg/ml. Assuming a linear relationship between resonance shift and streptavidin concentration, we estimate the sensitivity to be 2.5 ± 0.2 nm/(μg/ml). Comparing this value with surface sensitivity of 5.7 nm/nm calculated using FDTD simulations, a detection limit of 30 ± 2 ng/ml, is extrapolated.

OCIS Codes
(230.5750) Optical devices : Resonators
(280.1415) Remote sensing and sensors : Biological sensing and sensors

ToC Category:
Sensors

History
Original Manuscript: August 3, 2010
Revised Manuscript: September 7, 2010
Manuscript Accepted: September 7, 2010
Published: September 14, 2010

Virtual Issues
Vol. 5, Iss. 14 Virtual Journal for Biomedical Optics

Citation
Shinyoung Lee, Seok Chan Eom, Jee Soo Chang, Chul Huh, Gun Yong Sung, and Jung H. Shin, "Label-free optical biosensing using a horizontal air-slot SiN_x microdisk resonator," Opt. Express 18, 20638-20644 (2010)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-18-20-20638

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References

X. Fan, I. M. White, S. I. Shopova, H. Zhu, J. D. Suter, and Y. Sun, “Sensitive optical biosensors for unlabeled targets: a review,” Anal. Chim. Acta 620(1-2), 8–26 (2008). [CrossRef] [PubMed]
A. Densmore, M. Vachon, D. X. Xu, S. Janz, R. Ma, Y. H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed real-time and label-free molecular detection,” Opt. Lett. 34(23), 3598–3600 (2009). [CrossRef] [PubMed]
K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007). [CrossRef] [PubMed]
V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004). [CrossRef] [PubMed]
G. S. Wiederhecker, C. M. B. Cordeiro, F. Couny, F. Benabid, S. A. Maier, J. C. Knight, C. H. B. Cruz, and H. L. Fragnito, “Field enhancement within an optical fibre with a subwavelength air core,” Nat. Photonics 1(2), 115–118 (2007). [CrossRef]
J. T. Robinson, L. Chen, and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Opt. Express 16(6), 4296–4301 (2008). [CrossRef] [PubMed]
C. A. Barrios, K. B. Gylfason, B. Sánchez, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Slot-waveguide biochemical sensor,” Opt. Lett. 32(21), 3080–3082 (2007). [CrossRef] [PubMed]
C. A. Barrios, M. J. Bañuls, V. González-Pedro, K. B. Gylfason, B. Sánchez, A. Griol, A. Maquieira, H. Sohlström, M. Holgado, and R. Casquel, “Label-free optical biosensing with slot-waveguides,” Opt. Lett. 33(7), 708–710 (2008). [CrossRef] [PubMed]
T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator,” IEEE Photonics J. 1(3), 197–204 (2009). [CrossRef]
S. Lee, S. C. Eom, J. S. Chang, C. Huh, G. Y. Sung, and J. H. Shin, “A silicon nitride microdisk resonator with a40-nm-thin horizontal air slot,” Opt. Express 18(11), 11209–11215 (2010). [CrossRef] [PubMed]
L. Xianghuai, Y. Yuehui, Z. Zhihong, H. Wei, Z. Shichang, J. Zuqing, C. Ming, X. Shoulian, S. Taniguchi, T. Shibata, and K. Nakamura, “Properties and structure of silicon nitride films synthesized by ion-beam-enhanced deposition,” Surf. Coat. Tech. 46(2), 227–232 (1991). [CrossRef]
J. T. Robinson, K. Preston, O. Painter, and M. Lipson, “First-principle derivation of gain in high-index-contrast waveguides,” Opt. Express 16(21), 16659–16669 (2008). [CrossRef] [PubMed]
I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008). [CrossRef] [PubMed]
K. M. De Vos, I. Bartolozzi, P. Bienstman, R. Baets, and E. Schacht, “Optical biosensor based on silicon-on-insulator microring cavities for specific protein binding detection,” in Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV(SPIE, San Jose, CA, USA, 2007), pp. 64470K–64478.
N. Daldosso, M. Melchiorri, F. Riboli, M. Girardini, G. Pucker, M. Crivellari, P. Bellutti, A. Lui, and L. Pavesi, “Comparison Among Various Si3N4 Waveguide Geometries Grown Within a CMOS Fabrication Pilot Line,” J. Lightwave Technol. 22(7), 1734–1740 (2004). [CrossRef]
J. S. Chang, S. C. Eom, G. Y. Sung, and J. H. Shin, “On-chip, planar integration of Er doped silicon-rich silicon nitride microdisk with SU-8 waveguide with sub-micron gap control,” Opt. Express 17(25), 22918–22924 (2009). [CrossRef]
I. Fränz and W. Langheinrich, “Conversion of silicon nitride into silicon dioxide through the influence of oxygen,” Solid-State Electron. 14(6), 499–505 (1971). [CrossRef]
A. V. Pesse, G. R. Warrier, and V. K. Dhir, “An experimental study of the gas entrapment process in closed-end microchannels,” Int. J. Heat Mass Transfer 48(25-26), 5150–5165 (2005). [CrossRef]
D. Hohlfeld and H. Zappe, “An all-dielectric tunable optical filter based on the thermo-optic effect,” J. Opt. A, Pure Appl. Opt. 6(6), 504–511 (2004). [CrossRef]

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[1] X. Fan, I. M. White, S. I. Shopova, H. Zhu, J. D. Suter, and Y. Sun, “Sensitive optical biosensors for unlabeled targets: a review,” Anal. Chim. Acta 620(1-2), 8–26 (2008). [CrossRef] [PubMed]

[2] A. Densmore, M. Vachon, D. X. Xu, S. Janz, R. Ma, Y. H. Li, G. Lopinski, A. Delâge, J. Lapointe, C. C. Luebbert, Q. Y. Liu, P. Cheben, and J. H. Schmid, “Silicon photonic wire biosensor array for multiplexed real-time and label-free molecular detection,” Opt. Lett. 34(23), 3598–3600 (2009). [CrossRef] [PubMed]

[3] K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, “Silicon-on-Insulator microring resonator for sensitive and label-free biosensing,” Opt. Express 15(12), 7610–7615 (2007). [CrossRef] [PubMed]

[4] V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, “Guiding and confining light in void nanostructure,” Opt. Lett. 29(11), 1209–1211 (2004). [CrossRef] [PubMed]

[5] G. S. Wiederhecker, C. M. B. Cordeiro, F. Couny, F. Benabid, S. A. Maier, J. C. Knight, C. H. B. Cruz, and H. L. Fragnito, “Field enhancement within an optical fibre with a subwavelength air core,” Nat. Photonics 1(2), 115–118 (2007). [CrossRef]

[6] J. T. Robinson, L. Chen, and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Opt. Express 16(6), 4296–4301 (2008). [CrossRef] [PubMed]

[7] C. A. Barrios, K. B. Gylfason, B. Sánchez, A. Griol, H. Sohlström, M. Holgado, and R. Casquel, “Slot-waveguide biochemical sensor,” Opt. Lett. 32(21), 3080–3082 (2007). [CrossRef] [PubMed]

[8] C. A. Barrios, M. J. Bañuls, V. González-Pedro, K. B. Gylfason, B. Sánchez, A. Griol, A. Maquieira, H. Sohlström, M. Holgado, and R. Casquel, “Label-free optical biosensing with slot-waveguides,” Opt. Lett. 33(7), 708–710 (2008). [CrossRef] [PubMed]

[9] T. Claes, J. G. Molera, K. De Vos, E. Schacht, R. Baets, and P. Bienstman, “Label-Free Biosensing With a Slot-Waveguide-Based Ring Resonator in Silicon on Insulator,” IEEE Photonics J. 1(3), 197–204 (2009). [CrossRef]

[10] S. Lee, S. C. Eom, J. S. Chang, C. Huh, G. Y. Sung, and J. H. Shin, “A silicon nitride microdisk resonator with a40-nm-thin horizontal air slot,” Opt. Express 18(11), 11209–11215 (2010). [CrossRef] [PubMed]

[11] L. Xianghuai, Y. Yuehui, Z. Zhihong, H. Wei, Z. Shichang, J. Zuqing, C. Ming, X. Shoulian, S. Taniguchi, T. Shibata, and K. Nakamura, “Properties and structure of silicon nitride films synthesized by ion-beam-enhanced deposition,” Surf. Coat. Tech. 46(2), 227–232 (1991). [CrossRef]

[12] J. T. Robinson, K. Preston, O. Painter, and M. Lipson, “First-principle derivation of gain in high-index-contrast waveguides,” Opt. Express 16(21), 16659–16669 (2008). [CrossRef] [PubMed]

[13] I. M. White and X. Fan, “On the performance quantification of resonant refractive index sensors,” Opt. Express 16(2), 1020–1028 (2008). [CrossRef] [PubMed]

[14] K. M. De Vos, I. Bartolozzi, P. Bienstman, R. Baets, and E. Schacht, “Optical biosensor based on silicon-on-insulator microring cavities for specific protein binding detection,” in Nanoscale Imaging, Spectroscopy, Sensing, and Actuation for Biomedical Applications IV(SPIE, San Jose, CA, USA, 2007), pp. 64470K–64478.

[15] N. Daldosso, M. Melchiorri, F. Riboli, M. Girardini, G. Pucker, M. Crivellari, P. Bellutti, A. Lui, and L. Pavesi, “Comparison Among Various Si3N4 Waveguide Geometries Grown Within a CMOS Fabrication Pilot Line,” J. Lightwave Technol. 22(7), 1734–1740 (2004). [CrossRef]

[16] J. S. Chang, S. C. Eom, G. Y. Sung, and J. H. Shin, “On-chip, planar integration of Er doped silicon-rich silicon nitride microdisk with SU-8 waveguide with sub-micron gap control,” Opt. Express 17(25), 22918–22924 (2009). [CrossRef]

[17] I. Fränz and W. Langheinrich, “Conversion of silicon nitride into silicon dioxide through the influence of oxygen,” Solid-State Electron. 14(6), 499–505 (1971). [CrossRef]

[18] A. V. Pesse, G. R. Warrier, and V. K. Dhir, “An experimental study of the gas entrapment process in closed-end microchannels,” Int. J. Heat Mass Transfer 48(25-26), 5150–5165 (2005). [CrossRef]

[19] D. Hohlfeld and H. Zappe, “An all-dielectric tunable optical filter based on the thermo-optic effect,” J. Opt. A, Pure Appl. Opt. 6(6), 504–511 (2004). [CrossRef]

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Label-free optical biosensing using a horizontal air-slot SiN_x microdisk resonator