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A 50nm spatial resolution EUV imaging–resolution dependence on object thickness and illumination bandwidthPrzemyslaw W. Wachulak, Andrzej Bartnik, Henryk Fiedorowicz, and Jerzy Kostecki »View Author Affiliations
Przemyslaw W. Wachulak,1,*
Andrzej Bartnik,1
Henryk Fiedorowicz,1
and Jerzy Kostecki1
1Institute of Optoelectronics, Military University of Technology, ul. gen. S. Kaliskiego 2, 00-908 Warsaw, Poland *Corresponding author: wachulak@gmail.com |
Optics Express, Vol. 19, Issue 10, pp. 9541-9550 (2011)
http://dx.doi.org/10.1364/OE.19.009541
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Abstract
In this paper we report a desk-top microscopy reaching 50nm spatial resolution in very compact setup using a gas-puff laser plasma EUV source. The thickness of an object and the bandwidth of illuminating radiation were studied in order to estimate their quantitative influence on the EUV microscope spatial resolution. EUV images of various thickness objects obtained by illumination with variable bandwidth EUV radiation were compared in terms of knife-edge spatial resolution to study the bandwidth/object thickness parasitic influence on spatial resolution of the EUV microscope.
© 2011 OSA
OCIS Codes
(110.7440) Imaging systems : X-ray imaging
(180.7460) Microscopy : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses
ToC Category:
X-ray Optics
History
Original Manuscript: March 4, 2011
Revised Manuscript: April 8, 2011
Manuscript Accepted: April 11, 2011
Published: May 2, 2011
Virtual Issues
Vol. 6, Iss. 6 Virtual Journal for Biomedical Optics
Citation
Przemyslaw W. Wachulak, Andrzej Bartnik, Henryk Fiedorowicz, and Jerzy Kostecki, "A 50nm spatial resolution EUV imaging–resolution dependence on object thickness and illumination bandwidth," Opt. Express 19, 9541-9550 (2011)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-19-10-9541
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References
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- P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010). [CrossRef]
- P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010). [CrossRef]
- R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010). [CrossRef]
- H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005). [CrossRef]
- L. Juschkin, R. Freiberger, and K. Bergmann, “EUV microscopy for defect inspection by dark-field mapping and zone plate zooming,” J. Phys.: Conf. Ser. 186, 012030 (2009). [CrossRef]
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- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006). [CrossRef] [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, and V. V. Kondratenko, “Nanoimaging with a compact extreme-ultraviolet laser,” Opt. Lett. 30(16), 2095–2097 (2005). [CrossRef] [PubMed]
- F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009). [CrossRef] [PubMed]
- F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006). [CrossRef] [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, and V. V. Kondratenko, “Nanoimaging with a compact extreme-ultraviolet laser,” Opt. Lett. 30(16), 2095–2097 (2005). [CrossRef] [PubMed]
- K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006). [CrossRef]
- F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009). [CrossRef] [PubMed]
- W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009). [CrossRef] [PubMed]
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- F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006). [CrossRef] [PubMed]
- M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005). [CrossRef]
- M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005). [CrossRef]
- M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005). [CrossRef]
- K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006). [CrossRef]
- K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006). [CrossRef]
- L. B. Da Silva, J. E. Trebes, S. Mrowka, T. W. Barbee, J. Brase, J. A. Koch, R. A. London, B. J. Macgowan, D. L. Matthews, D. Minyard, G. Stone, T. Yorkey, E. Anderson, D. T. Attwood, and D. Kern, “Demonstration of x-ray microscopy with an x-ray laser operating near the carbon K edge,” Opt. Lett. 17(10), 754–756 (1992). [CrossRef] [PubMed]
- P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010). [CrossRef]
Appl. Phys. B
- P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010). [CrossRef]
- R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010). [CrossRef]
J. Alloy. Comp.
- H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005). [CrossRef]
J. Microsc.
- P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007). [CrossRef] [PubMed]
J. Phys. B
- G. O’Sullivan, “Charge-dependent wavefunction collapse in ionised xenon,” J. Phys. B 15(21), L765–L771 (1982). [CrossRef]
J. Phys. Chem. Ref. Data
- R. L. Kelly, “Atomic and ionic spectrum lines below 2000 angstroms: hydrogen through krypton,” J. Phys. Chem. Ref. Data 16(1), (1987).
J. Phys. IV
- M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).
J. Phys.: Conf. Ser.
- L. Juschkin, R. Freiberger, and K. Bergmann, “EUV microscopy for defect inspection by dark-field mapping and zone plate zooming,” J. Phys.: Conf. Ser. 186, 012030 (2009). [CrossRef]
J.X-Ray Sci. Technol.
- J. M. Heck, D. T. Attwood, W. Meyer−Ilse, and E. H. Anderson, “Resolution determination in X−ray microscopy: an analysis of the effects of partial coherence and illumination spectrum,” J.X-Ray Sci. Technol. 8, 95 (1998).
Nucl. Instrum. Methods Phys. Res. B
- P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010). [CrossRef]
Opt. Express
- W. Chao, J. Kim, S. Rekawa, P. Fischer, and E. H. Anderson, “Demonstration of 12 nm resolution Fresnel zone plate lens based soft x-ray microscopy,” Opt. Express 17(20), 17669–17677 (2009). [CrossRef] [PubMed]
Opt. Lett.
- S. S. Churilov, Y. N. Joshi, and J. Reader, “High-resolution spectrum of xenon ions at 13.4 nm,” Opt. Lett. 28(16), 1478–1480 (2003). [CrossRef] [PubMed]
- I. A. Artioukov, A. V. Vinogradov, V. E. Asadchikov, Y. S. Kas’yanov, R. V. Serov, A. I. Fedorenko, V. V. Kondratenko, and S. A. Yulin, “Schwarzschild soft-x-ray microscope for imaging of nonradiating objects,” Opt. Lett. 20(24), 2451 (1995). [CrossRef] [PubMed]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, and V. V. Kondratenko, “Nanoimaging with a compact extreme-ultraviolet laser,” Opt. Lett. 30(16), 2095–2097 (2005). [CrossRef] [PubMed]
- F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006). [CrossRef] [PubMed]
- P. W. Wachulak, A. Bartnik, and H. Fiedorowicz, “Sub-70 nm resolution tabletop microscopy at 13.8 nm using a compact laser-plasma EUV source,” Opt. Lett. 35(14), 2337–2339 (2010). [CrossRef] [PubMed]
- D. S. DiCicco, D. Kim, R. Rosser, and S. Suckewer, “First stage in the development of a soft-x-ray reflection imaging microscope in the Schwarzschild configuration using a soft-x-ray laser at 18.2 nm,” Opt. Lett. 17(2), 157–159 (1992). [CrossRef] [PubMed]
- L. B. Da Silva, J. E. Trebes, S. Mrowka, T. W. Barbee, J. Brase, J. A. Koch, R. A. London, B. J. Macgowan, D. L. Matthews, D. Minyard, G. Stone, T. Yorkey, E. Anderson, D. T. Attwood, and D. Kern, “Demonstration of x-ray microscopy with an x-ray laser operating near the carbon K edge,” Opt. Lett. 17(10), 754–756 (1992). [CrossRef] [PubMed]
Phys. Med. Biol.
- K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006). [CrossRef]
Ultramicroscopy
- M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005). [CrossRef]
Other
- D. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation (Cambridge University, 1999).
- N. I. S. T. Atomic Spectra Database Lines Data, http://physics.nist.gov/PhysRefData/ASD/lines_form.html
2010, Wachulak, Opt. Lett.
- P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, and Z. Zawadzki, “A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength,” Appl. Phys. B 100(3), 461–469 (2010). [CrossRef]
- R. Rakowski, A. Bartnik, H. Fiedorowicz, F. Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, and P. Wachulak, “Characterization and optimization of the laser-produced plasma EUV source at 13.5nm based on a double-stream Xe/He gas puff target,” Appl. Phys. B 101(4), 773–789 (2010). [CrossRef]
- P. W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, and M. Szczurek, ““Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target,” Nucl. Instrum. Methods Phys. Res. B 268(10), 1692–1700 (2010). [CrossRef]
- L. Juschkin, R. Freiberger, and K. Bergmann, “EUV microscopy for defect inspection by dark-field mapping and zone plate zooming,” J. Phys.: Conf. Ser. 186, 012030 (2009). [CrossRef]
- F. Brizuela, Y. Wang, C. A. Brewer, F. Pedaci, W. Chao, E. H. Anderson, Y. Liu, K. A. Goldberg, P. Naulleau, P. Wachulak, M. C. Marconi, D. T. Attwood, J. J. Rocca, and C. S. Menoni, “Microscopy of extreme ultraviolet lithography masks with 13.2 nm tabletop laser illumination,” Opt. Lett. 34(3), 271–273 (2009). [CrossRef] [PubMed]
- P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact X-ray microscopy,” J. Microsc. 226(2), 175–181 (2007). [CrossRef] [PubMed]
- G. Vaschenko, C. Brewer, F. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, C. S. Menoni, E. H. Anderson, W. Chao, B. D. Harteneck, J. A. Liddle, Y. Liu, and D. T. Attwood, “Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light,” Opt. Lett. 31(9), 1214–1216 (2006). [CrossRef] [PubMed]
- K. W. Kim, Y. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, B. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon, “Compact soft x-ray transmission microscopy with sub-50nm spatial resolution,” Phys. Med. Biol. 51(99–N), 107 (2006). [CrossRef]
- M. Wieland, Ch. Spielmann, U. Kleineberg, T. Westerwalbesloh, U. Heinzmann, and T. Wilhein, “Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation,” Ultramicroscopy 102(2), 93–100 (2005). [CrossRef]
- H. Fiedorowicz, A. Bartnik, R. Jarocki, J. Kostecki, J. Krzywinski, J. Mikołajczyk, R. Rakowski, A. Szczurek, and M. Szczurek, “Compact laser plasma EUV source based on a gas puff target for metrology applications,” J. Alloy. Comp. 401(1-2), 99–103 (2005). [CrossRef]
- G. Vaschenko, F. Brizuela, C. Brewer, M. Grisham, H. Mancini, C. S. Menoni, M. C. Marconi, J. J. Rocca, W. Chao, J. A. Liddle, E. H. Anderson, D. T. Attwood, A. V. Vinogradov, I. A. Artioukov, Y. P. Pershyn, and V. V. Kondratenko, “Nanoimaging with a compact extreme-ultraviolet laser,” Opt. Lett. 30(16), 2095–2097 (2005). [CrossRef] [PubMed]
- M. Kishimoto, M. Tanaka, R. Tai, K. Sukegawa, M. Kado, N. Hasegawa, H. Tang, T. Kawachi, P. Lu, K. Nagashima, H. Daido, Y. Kato, K. Nagai, and H. Takenaka, “Development of soft X-ray microscopy system using X-ray laser in JAERI Kansai,” J. Phys. IV 104, 141–143 (2003).
- J. M. Heck, D. T. Attwood, W. Meyer−Ilse, and E. H. Anderson, “Resolution determination in X−ray microscopy: an analysis of the effects of partial coherence and illumination spectrum,” J.X-Ray Sci. Technol. 8, 95 (1998).
- L. B. Da Silva, J. E. Trebes, S. Mrowka, T. W. Barbee, J. Brase, J. A. Koch, R. A. London, B. J. Macgowan, D. L. Matthews, D. Minyard, G. Stone, T. Yorkey, E. Anderson, D. T. Attwood, and D. Kern, “Demonstration of x-ray microscopy with an x-ray laser operating near the carbon K edge,” Opt. Lett. 17(10), 754–756 (1992). [CrossRef] [PubMed]
- R. L. Kelly, “Atomic and ionic spectrum lines below 2000 angstroms: hydrogen through krypton,” J. Phys. Chem. Ref. Data 16(1), (1987).
- G. O’Sullivan, “Charge-dependent wavefunction collapse in ionised xenon,” J. Phys. B 15(21), L765–L771 (1982). [CrossRef]
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