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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 7, Iss. 6 — May. 25, 2012

Real space soft x-ray imaging at 10 nm spatial resolution

W. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, and P. Naulleau  »View Author Affiliations


Optics Express, Vol. 20, Issue 9, pp. 9777-9783 (2012)
http://dx.doi.org/10.1364/OE.20.009777


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Abstract

Using Fresnel zone plates made with our robust nanofabrication processes, we have successfully achieved 10 nm spatial resolution with soft x-ray microscopy. The result, obtained with both a conventional full-field and scanning soft x-ray microscope, marks a significant step forward in extending the microscopy to truly nanoscale studies.

© 2012 OSA

OCIS Codes
(110.7440) Imaging systems : X-ray imaging
(340.7440) X-ray optics : X-ray imaging
(340.7460) X-ray optics : X-ray microscopy
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)
(050.1965) Diffraction and gratings : Diffractive lenses

ToC Category:
X-ray Optics

History
Original Manuscript: March 2, 2012
Revised Manuscript: March 26, 2012
Manuscript Accepted: March 29, 2012
Published: April 13, 2012

Virtual Issues
Vol. 7, Iss. 6 Virtual Journal for Biomedical Optics

Citation
W. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, and P. Naulleau, "Real space soft x-ray imaging at 10 nm spatial resolution," Opt. Express 20, 9777-9783 (2012)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-20-9-9777


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