Abstract
We report on a soft x-ray microscope using a gas-discharge plasma with pseudo spark-like electrode geometry as a light source. The source produces a radiant intensity of for the emission line of helium-like nitrogen. At a demonstrated repetition rate a brilliance of is obtained for the line. Ray-tracing simulations show that, employing an adequate grazing incidence collector, a photon flux of can be achieved with the current source. The applicability of the presented pinch plasma concept to soft x-ray microscopy is demonstrated in a proof-of-principle experiment.
© 2008 Optical Society of America
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