The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5 μm thick grid of patterned photoresist supports the 2 μm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the back side of the GaAs wafer. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage, and frequency. A simplified analysis of device operation is also presented.
© 2006 Optical Society of America
Original Manuscript: June 25, 2004
Revised Manuscript: November 7, 2005
Manuscript Accepted: November 8, 2005
Vol. 1, Iss. 5 Virtual Journal for Biomedical Optics
Bahareh Haji-saeed, Rathna Kolluru, Dana Pyburn, Roberto Leon, Sandip K. Sengupta, Markus Testorf, William Goodhue, Jed Khoury, Alvin Drehman, Charles L. Woods, and John Kierstead, "Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs substrates," Appl. Opt. 45, 2615-2622 (2006)