OSA's Digital Library

Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editor: Gregory W. Faris
  • Vol. 1, Iss. 11 — Nov. 13, 2006

Characterization of dynamic microgyroscopes by use of temporal digital image correlation

Fujun Yang, Xiaoyuan He, and Chenggen Quan  »View Author Affiliations


Applied Optics, Vol. 45, Issue 30, pp. 7785-7790 (2006)
http://dx.doi.org/10.1364/AO.45.007785


View Full Text Article

Acrobat PDF (875 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The advanced mechanical testing of microelectromechanical systems (MEMS) is necessary to provide feedback of measurements that can help the designer optimize MEMS structures and improve the reliability and stability of MEMS. We describe a digital image correlation (DIC) method for dynamic characterization of MEMS using an optical microscope with a high-speed complementary metaloxide semiconductor-based camera. The mechanical performance of a series of microgyroscopes is tested. The DIC method is employed to measure the microgyroscope in-plane displacement with subpixel accuracy. Use of the DIC method is less restrictive on the surface quality of the specimen and simplifies the measurement system. On the basis of a series of temporal digital images grabbed by a high-speed camera, the stability characteristic of the microgyroscopes is analyzed. In addition, the quality factors of the microgyroscopes are determined and agree well with other experimental methods.

© 2006 Optical Society of America

OCIS Codes
(060.2800) Fiber optics and optical communications : Gyroscopes
(100.2000) Image processing : Digital image processing
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis
(230.3990) Optical devices : Micro-optical devices

History
Original Manuscript: February 23, 2006
Revised Manuscript: June 28, 2006
Manuscript Accepted: July 3, 2006

Virtual Issues
Vol. 1, Iss. 11 Virtual Journal for Biomedical Optics

Citation
Fujun Yang, Xiaoyuan He, and Chenggen Quan, "Characterization of dynamic microgyroscopes by use of temporal digital image correlation," Appl. Opt. 45, 7785-7790 (2006)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-45-30-7785

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited