Monolithic integration of microfluidic channels, liquid-core waveguides, and silica waveguides on silicon
Applied Optics, Vol. 45, Issue 36, pp. 9182-9190 (2006)
http://dx.doi.org/10.1364/AO.45.009182
Enhanced HTML 
Acrobat PDF (1674 KB)
Abstract
The fabrication of embedded microchannels monolithically integrated with optical waveguides by plasma-enhanced chemical vapor deposition of doped silica glass is reported. Both waveguide ridges and template ridges for microchannel formation are patterned in a single photolithography step. The microchannels are formed within an overlay of borophosphosilicate glass (BPSG), which also serves as the top cladding layer of the silica waveguides. No top sealing of the channels is required. Surface accessible fluid input ports are formed in a BPSG layer, with no additional steps, by appropriate design of template layers. By tightly controlling the refractive index of the waveguide layer and the microchannel-forming layer, fully integrated structures facilitating optical coupling between solid waveguides and liquids segments in various geometries are demonstrated. Applications in liquid-filled photonic device elements for novel nonlinear optical devices and in optical sensors and on-chip spectroscopy are outlined.
© 2006 Optical Society of America
OCIS Codes
(130.1750) Integrated optics : Components
(130.3120) Integrated optics : Integrated optics devices
(230.7380) Optical devices : Waveguides, channeled
History
Original Manuscript: June 19, 2006
Manuscript Accepted: August 23, 2006
Virtual Issues
Vol. 2, Iss. 1 Virtual Journal for Biomedical Optics
Citation
Patrick Dumais, Claire L. Callender, Christopher J. Ledderhof, and Julian P. Noad, "Monolithic integration of microfluidic channels, liquid-core waveguides, and silica waveguides on silicon," Appl. Opt. 45, 9182-9190 (2006)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-45-36-9182
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Quasi interference of perpendicularly polarized guided modes observed with a photon scanning tunneling microscope (OL)
- Polarization characteristics of optical waveguides with separable symmetric refractive-index profiles (JOSAA)
- Subwavelength waveguide grating for mode conversion and light coupling in integrated optics (OE)
- A high-resolution silicon-on-insulator arrayed waveguide grating microspectrometer with sub-micrometer aperture waveguides (OE)
- Fresnel diffraction effects in Fourier-transform arrayed waveguide grating spectrometer (OE)
Related Conference Papers
- Using Evolutionary Algorithms for Designing Photonic Crystals
- Investigation of mini-stop bands in wide photonic crystal waveguides with a low in-plane index contrast
- Slotted multimode interference devices for reduced-length integrated optical wavelength or polarization splitters
- Optimizing imbalance and loss in 2 × 2 3dB multimode interference couplers via access waveguide width
- InP laterally tapered wide-bandwidth optical power splitter
« Previous Article | Next Article »
OSA is a member of 