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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editor: Gregory W. Faris
  • Vol. 2, Iss. 10 — Oct. 31, 2007

Direct bonding and beyond

Jan Haisma, Nico Hattu, J. T. C. M. (Dook) Pulles, Esther Steding, and Jan C. G. Vervest  »View Author Affiliations


Applied Optics, Vol. 46, Issue 27, pp. 6793-6803 (2007)
http://dx.doi.org/10.1364/AO.46.006793


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Abstract

We present a number of recent evaluations of direct bonding, a glueless bonding technology, performed under ambient conditions. If combined with bond-strengthening, this geometry-conserving technology is well suited for an application in far ultraviolet immersion lithography. Our term beyond direct bonding refers to taking at least one additional technological step beyond direct bonding, involving chemical interface engineering, advanced silicon-on-insulator (SOI) technology, whereby the unwanted influence of dilatation mismatch is obviated. The combination of successive direct bonding, nanopillar lattice structures and silicon-technological engineering makes it possible for us to arrange quantum dots, wires, and planes in a transversal cascade. We also address the interrelationship between direct bonding and elasticity, as well as plasticity; the latter is in relation to direct bonded glass wafers that are thermally treated to create the geometric shape, e.g., required for specific lab-on-a-chip components with a three-dimensional overall configuration.

© 2007 Optical Society of America

OCIS Codes
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(160.2750) Materials : Glass and other amorphous materials
(220.4000) Optical design and fabrication : Microstructure fabrication

ToC Category:
Optics at Surfaces

History
Original Manuscript: March 6, 2007
Revised Manuscript: May 23, 2007
Manuscript Accepted: June 8, 2007
Published: September 19, 2007

Virtual Issues
Vol. 2, Iss. 10 Virtual Journal for Biomedical Optics

Citation
Jan Haisma, Nico Hattu, J. T. C. M. (Dook) Pulles, Esther Steding, and Jan C. G. Vervest, "Direct bonding and beyond," Appl. Opt. 46, 6793-6803 (2007)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-46-27-6793

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