Transparent thin-film characterization by using differential optical sectioning interference microscopy
Applied Optics, Vol. 46, Issue 30, pp. 7460-7463 (2007)
http://dx.doi.org/10.1364/AO.46.007460
Enhanced HTML 
Acrobat PDF (386 KB)
Abstract
We propose an optical thin-film characterization technique, differential optical sectioning interference microscopy (DOSIM), for simultaneously measuring the refractive indices and thicknesses of transparent thin films with submicrometer lateral resolution. DOSIM obtains the depth and optical phase information of a thin film by using a dual-scan concept in differential optical sectioning microscopy combined with the Fabry–Perot interferometric effect and allows the solution of refractive index and thickness without the 2π phase-wrapping ambiguity. Because DOSIM uses a microscope objective as the probe,
its lateral resolution achieves the diffraction limit. As a demonstration, we measure the refractive indices and thicknesses of
© 2007 Optical Society of America
OCIS Codes
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(180.3170) Microscopy : Interference microscopy
(240.0310) Optics at surfaces : Thin films
(310.6860) Thin films : Thin films, optical properties
ToC Category:
Thin Films
History
Original Manuscript: July 6, 2007
Manuscript Accepted: August 28, 2007
Published: October 11, 2007
Virtual Issues
Vol. 2, Iss. 11 Virtual Journal for Biomedical Optics
Citation
Chun-Chieh Wang, Jiunn-Yuan Lin, Hung-Jhang Jian, and Chau-Hwang Lee, "Transparent thin-film characterization by using differential optical sectioning interference microscopy," Appl. Opt. 46, 7460-7463 (2007)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-46-30-7460
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Near-field nonlinear optical spectroscopy of Langmuir–Blodgett films (JOSAA)
- Measurement of the Pockels coefficient of lead zirconate titanate thin films by a two-beam polarization interferometer with a reflection configuration (JOSAB)
- MgO-Al2O3-ZrO2 Amorphous Ternary Composite: A Dense and Stable Optical Coating (AO)
- Self-Interference Patterns and Their Application to Inertial-Fusion Target Characterization (AO)
- Omnidirectional Mirror Design With Quarter-Wave Dielectric Stacks (AO)
Related Conference Papers
- Recording of polarization holograms in photodarkened amorphous As2S3 thin films
- Improved Fourier transform technique to determine second-order optical nonlinearity profiles
- Vector Beam Generation From A Passively Phase Stable Diffractive Optical Element Interferometer
- Transparent Thin-Film Characterization by Using Differential Optical Sectioning Interference Microscopy
- Utilizing Optical Measurements to Characterize Metal Oxide Thin Films for Gas Sensing in Advanced Coal-Based Power Systems
« Previous Article | Next Article »
OSA is a member of 