Abstract

We present a new microscopy technique that we call transmission angle deviation microscopy (TADM). It is based on common-path heterodyne interferometry and geometrical optics. An ultrahigh sensitivity surface plasmon resonance (SPR) angular sensor is used to expand dynamic measurement ranges and to improve the axial resolution in three-dimensional optical microscopy. When transmitted light is incident upon a specimen, the beam converges or diverges because of refractive and/or surface height variations. Advantages include high axial resolution ($\sim 32\mathrm{nm}$), nondestructive and noncontact measurement, and larger measurement ranges ($\pm 80\mathrm{\mu m}$) for a numerical aperture of 0.21in a transparent measurement medium. The technique can be used without conductivity and pretreatment.

© 2008 Optical Society of America

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