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Optical modeling of Fresnel zoneplate microscopes |
Applied Optics, Vol. 50, Issue 20, pp. 3678-3684 (2011)
http://dx.doi.org/10.1364/AO.50.003678
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Abstract
Defect free masks remain one of the most significant challenges facing the commercialization of extreme ultraviolet (EUV) lithography. Progress on this front requires high-performance wavelength-specific metrology of EUV masks, including high-resolution and aerial-image microscopy performed near the
© 2011 Optical Society of America
OCIS Codes
(090.1970) Holography : Diffractive optics
(110.0180) Imaging systems : Microscopy
(110.7440) Imaging systems : X-ray imaging
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(260.7200) Physical optics : Ultraviolet, extreme
(050.1965) Diffraction and gratings : Diffractive lenses
ToC Category:
Imaging Systems
History
Original Manuscript: April 13, 2011
Revised Manuscript: May 30, 2011
Manuscript Accepted: May 31, 2011
Published: July 8, 2011
Virtual Issues
Vol. 6, Iss. 8 Virtual Journal for Biomedical Optics
Citation
Patrick P. Naulleau, Iacopo Mochi, and Kenneth A. Goldberg, "Optical modeling of Fresnel zoneplate microscopes," Appl. Opt. 50, 3678-3684 (2011)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-50-20-3678
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