OSA's Digital Library

Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 7, Iss. 1 — Jan. 4, 2012

Two-wavelength in-line phase-shifting interferometry based on polarizing separation for accurate surface profiling

D. G. Abdelsalam and Daesuk Kim  »View Author Affiliations


Applied Optics, Vol. 50, Issue 33, pp. 6153-6161 (2011)
http://dx.doi.org/10.1364/AO.50.006153


View Full Text Article

Enhanced HTML    Acrobat PDF (1772 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We describe a configuration that can be used for two-wavelength phase-shifting in-line interferometry based on polarizing separation. The experiment is conducted on a sample with a step height of 1.34 μm nominally. In this paper, five- and seven-phase step algorithms have been compared for their effectiveness in reducing the noise in the phase maps. The noise is further reduced by the application of the flat fielding method. The recorded interferograms are processed using seven-phase step algorithm to obtain the phase map for each wavelength separately. The independent phase maps are subtracted and a phase map for the beat-wavelength is obtained and converted to height map. The results extracted from the seven-phase step algorithm have been compared with the results extracted from the single shot off-axis geometry and the results are in agreement.

© 2011 Optical Society of America

OCIS Codes
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(180.6900) Microscopy : Three-dimensional microscopy
(090.1995) Holography : Digital holography
(110.6955) Imaging systems : Tomographic imaging

ToC Category:
Holography

History
Original Manuscript: August 17, 2011
Revised Manuscript: October 6, 2011
Manuscript Accepted: October 6, 2011
Published: November 10, 2011

Virtual Issues
Vol. 7, Iss. 1 Virtual Journal for Biomedical Optics

Citation
D. G. Abdelsalam and Daesuk Kim, "Two-wavelength in-line phase-shifting interferometry based on polarizing separation for accurate surface profiling," Appl. Opt. 50, 6153-6161 (2011)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-50-33-6153


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. M. Born and E. Wolf, Principles of Optics (Cambridge University, 1980), pp. 459–490.
  2. J. Kühn, T. Colomb, F. Montfort, F. Charrière, Y. Emery, E. Cuche, P. Marquet, and C. Depeursinge, “Real-time dual-wavelength digital holographic microscopy with a single hologram acquisition,” Opt. Express 15, 7231–7242 (2007). [CrossRef] [PubMed]
  3. K. Creath, “Phase-measurement interferometry techniques,” in Progress in Optics, E. Wolf, ed. (Elsevier, 1988), pp. 349–393.
  4. U. P. Kumar, B. Bhaduri, M. P. Kothiyal, and N. K. Mohan, “Two wavelength micro-interferometry for 3-D surface profiling,” Opt. Lasers Eng. 47, 223–229 (2009). [CrossRef]
  5. K. Creath, Y. Cheng, and J. C. Wyant, “Contouring aspheric surfaces using two-wavelength phase-shifting interferometry,” Opt. Acta 32, 1455–1464 (1985). [CrossRef]
  6. Y. Y. Cheng and J. C. Wyant, “Two wavelength phase shifting interferometry,” Appl. Opt. 23, 4539–4543 (1984). [CrossRef] [PubMed]
  7. K. Creath, “Step height measurement using two-wavelength phase-shifting interferometry,” Appl. Opt. 26, 2810–2816 (1987). [CrossRef] [PubMed]
  8. J. Schmit and P. Hariharan, “Two-wavelength interferometry profilometry with a phase-step error-compensating algorithm,” Opt. Eng. 45, 115602–1–115603–3 (2006). [CrossRef]
  9. D. Kim and S. Kim, “Direct spectral phase calculation for dispersive interferometric thickness profilometry,” Opt. Express 12, 5117–5124 (2004). [CrossRef] [PubMed]
  10. S. H. Lu and C. C. Lee, “Measuring large step heights by variable synthetic wavelength interferometry,” Meas. Sci. Technol. 13, 1382–1387 (2002). [CrossRef]
  11. Y. Y. Cheng and J. C. Wyant, “Multiple-wavelength phase-shifting interferometry,” Appl. Opt. 24, 804–807 (1985). [CrossRef] [PubMed]
  12. D. Kim, J. W. You, and S. Kim, “White light on-axis digital holographic microscopy based on spectral phase shifting,” Opt. Express 14, 229–234 (2006). [CrossRef] [PubMed]
  13. J. You, S. Kim, and D. Kim, “High speed volumetric thickness profile measurement based on full-field wavelength scanning interferometer,” Opt. Express 16, 21022–21031 (2008). [CrossRef] [PubMed]
  14. P. de Groot and L. Deck, “Surface profiling by analysis of white-light interferograms in the spatial frequency domain,” J. Mod. Opt. 42, 389–401 (1995). [CrossRef]
  15. H. Fan, I. Reading, and Z. P. Fang, “Research on tilted coherent plane white-light Interferometry for wafer bump 3D inspection,” SIM Tech Tech Rep 7, 59–63 (2006).
  16. P. de Groot and L. Deck, “Three-dimensional imaging by sub-Nyquist sampling of white-light interferograms,” Opt. Lett. 18, 1462–1464 (1993). [CrossRef] [PubMed]
  17. P. de Groot, “Surface profiling by frequency-domain analysis of white light Interferograms,” Proc. SPIE 2248, 101–104 (1994). [CrossRef]
  18. D. G. Abdelsalam, R. Magnusson, and D. Kim, “Single-shot dual wavelength digital holography based on polarizing separation,” Appl. Opt. 50, 3360–3368 (2011). [CrossRef] [PubMed]
  19. T. Colomb, P. Dahlgren, D. Beghuin, E. Cuche, P. Marquet, and C. Depeursinge, “Polarization imaging by use of digital holography,” Appl. Opt. 41, 27–37 (2002). [CrossRef] [PubMed]
  20. K. Creath, “Temporal phase measurement methods,” in Interferogram Analysis: Digital Fringe Pattern Measurement Techniques, W.R.Robinson and G.T.Reid, eds. (Institute of Physics Publishing, 1993), Chap. 4.
  21. S. B. Howell, Handbook of CCD Astronomy (Cambridge, 2006).
  22. D. G. Abdelsalam, M. S. Shaalan, and M. M. Eloker, “Surface microtopography measurement of a standard flat surface by multiple-beam interference fringes at reflection,” Opt. Lasers Eng. 48, 543–547 (2010). [CrossRef]
  23. D. G. Abdelsalam, M. S. Shaalan, M. M. Eloker, and D. Kim, “Radius of curvature measurement of spherical smooth surfaces by multiple-beam interferometry in reflection,” Opt. Lasers Eng. 48, 643–649 (2010). [CrossRef]
  24. D. Malacara, M. Servin, and Z. Malacara, Interferogram Analysis for Optical Testing (Taylor and Francis Group, 2005), pp. 384–385.
  25. F. Pan, W. Xiao, S. Liu, F. J. Wang, L. Rong, and R. Li, “Coherent noise reduction in digital holographic phase contrast microscopy by slightly shifting object,” Opt. Express 19, 3863–3869 (2011). [CrossRef]
  26. E. Cuche, P. Marquet, and C. Depeursinge, “Spatial filtering for zero-order and twin image elimination in digital off-axis holography,” Appl. Opt. 39, 4070–4075 (2000). [CrossRef]
  27. E. Cuche, F. Bevilacqua, and C. Depeursinge, “Digital holography for quantitative phase contrast imaging,” Opt. Lett. 24, 291–293 (1999). [CrossRef]
  28. H. Lee, S. Kim, and D. Kim, “Two step on-axis digital holography using dual-channel Mach-Zehnder interferometer and matched filter algorithm,” J. Opt. Soc. Korea 14, 363–367(2010). [CrossRef]
  29. D. G. Abdelsalam, B. J. Baek, Y. J. Cho, and D. Kim, “Surface form measurement using single-shot off-axis Fizeau interferometer,” J. Opt. Soc. Korea 14, 409–414 (2010). [CrossRef]
  30. Y. Cheng and J. C. Wyant, “Phase shifter calibration in phase-shifting interferometry,” Appl. Opt. 24, 3049–3052 (1985). [CrossRef] [PubMed]
  31. R. A. Nicolaus, “Precise method to determining systematic errors in phase-shifting interferometry on Fizeau interference,” Appl. Opt. 32, 6380–6386 (1993). [CrossRef] [PubMed]
  32. E. Cuche, P. Marquet, and C. Depeursinge, “Aperture apodization using cubic spline interpolation: application in digital holographic microscopy,” Opt. Commun. 182, 59–69 (2000). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited