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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 6, Iss. 3 — Mar. 18, 2011

Confocal simultaneous phase-shifting interferometry

Chenguang Zhao, Jiubin Tan, Jianbo Tang, Tao Liu, and Jian Liu  »View Author Affiliations

Applied Optics, Vol. 50, Issue 5, pp. 655-661 (2011)

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In order to implement the ultraprecise measurement with large range and long working distance in confocal microscopy, confocal simultaneous phase-shifting interferometry (C-SPSI) has been presented. Four channel interference signals, with π / 2 phase shift between each other, are detected simultaneously in C-SPSI. The actual surface height is then calculated by combining the optical sectioning with the phase unwrapping in the main cycle of the interference phase response, and the main cycle is deter mined using the bipolar property of differential confocal microscopy. Experimental results showed that 1 nm of axial depth resolution was achieved for either low- or high-NA objective lenses. The reflectivity disturbance resistibility of C-SPSI was demonstrated by imaging a typical microcircuit specimen. C-SPSI breaks through the restriction of low NA on the axial depth resolution of confocal microscopy effectively.

© 2011 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(180.1790) Microscopy : Confocal microscopy
(180.3170) Microscopy : Interference microscopy
(180.5810) Microscopy : Scanning microscopy

ToC Category:

Original Manuscript: August 31, 2010
Revised Manuscript: December 25, 2010
Manuscript Accepted: December 31, 2010
Published: February 3, 2011

Virtual Issues
Vol. 6, Iss. 3 Virtual Journal for Biomedical Optics

Chenguang Zhao, Jiubin Tan, Jianbo Tang, Tao Liu, and Jian Liu, "Confocal simultaneous phase-shifting interferometry," Appl. Opt. 50, 655-661 (2011)

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