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Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser |
Applied Optics, Vol. 51, Issue 12, pp. 2118-2128 (2012)
http://dx.doi.org/10.1364/AO.51.002118
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Abstract
This work discusses the development and calibration of the x-ray reflective and diffractive elements for the Soft X-ray Materials Science (SXR) beamline of the Linac Coherent Light Source (LCLS) free-electron laser (FEL), designed for operation in the 500 to 2000 eV region. The surface topography of three Si mirror substrates and two Si diffraction grating substrates was examined by atomic force microscopy (AFM) and optical profilometry. The figure of the mirror substrates was also verified via surface slope measurements with a long trace profiler. A boron carbide (
© 2012 Optical Society of America
OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(310.0310) Thin films : Thin films
(340.0340) X-ray optics : X-ray optics
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: November 23, 2011
Manuscript Accepted: January 11, 2012
Published: April 18, 2012
Virtual Issues
Vol. 7, Iss. 6 Virtual Journal for Biomedical Optics
Citation
Regina Soufli, Mónica Fernández-Perea, Sherry L. Baker, Jeff C. Robinson, Eric M. Gullikson, Philip Heimann, Valeriy V. Yashchuk, Wayne R. McKinney, William F. Schlotter, and Michael Rowen, "Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser," Appl. Opt. 51, 2118-2128 (2012)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-51-12-2118
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