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Integrated optofluidic system for monitoring particle mass concentrations based on planar emitter–receiver units |
Applied Optics, Vol. 51, Issue 32, pp. 7800-7809 (2012)
http://dx.doi.org/10.1364/AO.51.007800
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Abstract
We demonstrate an integrated optofluidic system for monitoring the particle mass concentration and the Sauter mean diameter of polydisperse flowing suspensions of water and standardized test dust. For optimum integration, a planar emitter–receiver unit is developed and fabricated on Si technology. A vertical cavity surface emitting laser at 850 nm serves as light source, and monolithically integrated segmented photodiodes detect both the attenuation of the primary light beam and the scattered light. The optical system is integrated into a planar transparent polymethylmethacrylate substrate by micromilling of an optical freeform surface and electron beam evaporation of reflective layers following the concept of planar integrated free-space optical systems. We are able to detect
© 2012 Optical Society of America
OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(280.2490) Remote sensing and sensors : Flow diagnostics
(290.5850) Scattering : Scattering, particles
ToC Category:
Scattering
History
Original Manuscript: August 2, 2012
Revised Manuscript: September 24, 2012
Manuscript Accepted: September 24, 2012
Published: November 8, 2012
Virtual Issues
Vol. 7, Iss. 12 Virtual Journal for Biomedical Optics
Citation
Meike Hofmann, Ralf Müller, Sebastian Stoebenau, Thomas Stauden, Olaf Brodersen, and Stefan Sinzinger, "Integrated optofluidic system for monitoring particle mass concentrations based on planar emitter–receiver units," Appl. Opt. 51, 7800-7809 (2012)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-51-32-7800
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