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Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics


  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 8, Iss. 6 — Jun. 27, 2013

Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor

Tobias Herffurth, Sven Schröder, Marcus Trost, Angela Duparré, and Andreas Tünnermann  »View Author Affiliations

Applied Optics, Vol. 52, Issue 14, pp. 3279-3287 (2013)

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Light scattering measurement and analysis is a powerful tool for the characterization of optical and nonoptical surfaces. A new 3D scatter measurement system based on a detector matrix is presented. A compact light-scatter sensor is used to characterize the scattering and nanostructures of surfaces and to identify the origins of anisotropic scattering features. The results from the scatter sensor are directly compared with white light interferometry to analyze surface defects as well as surface roughness and the corresponding scattering distributions. The scattering of surface defects is modeled based on the Kirchhoff integral equation and the approach of Beckmann for rough surfaces.

© 2013 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(240.0240) Optics at surfaces : Optics at surfaces
(290.0290) Scattering : Scattering
(290.5820) Scattering : Scattering measurements
(290.5880) Scattering : Scattering, rough surfaces

ToC Category:

Original Manuscript: February 19, 2013
Revised Manuscript: April 10, 2013
Manuscript Accepted: April 10, 2013
Published: May 6, 2013

Virtual Issues
Vol. 8, Iss. 6 Virtual Journal for Biomedical Optics

Tobias Herffurth, Sven Schröder, Marcus Trost, Angela Duparré, and Andreas Tünnermann, "Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor," Appl. Opt. 52, 3279-3287 (2013)

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