OSA's Digital Library

Virtual Journal for Biomedical Optics

Virtual Journal for Biomedical Optics

| EXPLORING THE INTERFACE OF LIGHT AND BIOMEDICINE

  • Editors: Andrew Dunn and Anthony Durkin
  • Vol. 8, Iss. 6 — Jun. 27, 2013

Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor

Tobias Herffurth, Sven Schröder, Marcus Trost, Angela Duparré, and Andreas Tünnermann  »View Author Affiliations


Applied Optics, Vol. 52, Issue 14, pp. 3279-3287 (2013)
http://dx.doi.org/10.1364/AO.52.003279


View Full Text Article

Enhanced HTML    Acrobat PDF (1311 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Light scattering measurement and analysis is a powerful tool for the characterization of optical and nonoptical surfaces. A new 3D scatter measurement system based on a detector matrix is presented. A compact light-scatter sensor is used to characterize the scattering and nanostructures of surfaces and to identify the origins of anisotropic scattering features. The results from the scatter sensor are directly compared with white light interferometry to analyze surface defects as well as surface roughness and the corresponding scattering distributions. The scattering of surface defects is modeled based on the Kirchhoff integral equation and the approach of Beckmann for rough surfaces.

© 2013 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(240.0240) Optics at surfaces : Optics at surfaces
(290.0290) Scattering : Scattering
(290.5820) Scattering : Scattering measurements
(290.5880) Scattering : Scattering, rough surfaces

ToC Category:
Scattering

History
Original Manuscript: February 19, 2013
Revised Manuscript: April 10, 2013
Manuscript Accepted: April 10, 2013
Published: May 6, 2013

Virtual Issues
Vol. 8, Iss. 6 Virtual Journal for Biomedical Optics

Citation
Tobias Herffurth, Sven Schröder, Marcus Trost, Angela Duparré, and Andreas Tünnermann, "Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor," Appl. Opt. 52, 3279-3287 (2013)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=ao-52-14-3279

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited