Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Full polarization optical profilometry

Not Accessible

Your library or personal account may give you access

Abstract

Optical digital tomographic microscopy can be used for profilometry. The profile of the surface can be estimated from measurements of the complex diffracted far field obtained when the sample is illuminated successively under various incidences. Outside the validity domain of perturbative theories of diffraction, the profile is determined by using an iterative inverse wave scattering numerical method. In this paper we show that, for perfectly conducting surfaces, the two fundamental polarization cases involve different distances of interaction in the multiple scattering phenomenon. The use of both polarization cases in the inversion process leads to a considerable improvement of the lateral resolution. Robustness to noise is also discussed.

© 2012 Optical Society of America

Full Article  |  PDF Article
More Like This
Full wave optical profilometry

S. Arhab, G. Soriano, K. Belkebir, A. Sentenac, and H. Giovannini
J. Opt. Soc. Am. A 28(4) 576-580 (2011)

Superresolution with full-polarized tomographic diffractive microscopy

Charankumar Godavarthi, Ting Zhang, Guillaume Maire, Patrick C. Chaumet, Hugues Giovannini, Anne Talneau, Kamal Belkebir, and Anne Sentenac
J. Opt. Soc. Am. A 32(2) 287-292 (2015)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (17)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved