Testing of steep convex aspheric surface with a Hartmann sensor by using a CGH
Optics Express, Vol. 14, Issue 8, pp. 3247-3254 (2006)
http://dx.doi.org/10.1364/OE.14.003247
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Abstract
Most aspheric surfaces have been tested by interferometer with some null correctors. This approach, however, often fails when there are many aspherical terms or test surface is very steep because it is not easy to design the conventional null lens or CGH (Computer Generated Hologram). On the other hand, 3-D profilometer can measure aspheric surfaces without any null correctors; however, it takes some time to measure, which makes it unsuitable for the production line in the factory. In this paper, we apply the Hartmann test to the measurement of steep convex aspheric surfaces of which diameter is about 16 mm. In order to increase the measurement accuracy, we calibrated the test setup using a CGH that simulates the ideal test surface. We demonstrated that the significant amount of error in the test setup could be removed by this calibration process. The test results showed only 2 nm rms WFE (wave front error) difference even though the WFE of test setup was worsened by more than 0.13 μm rms. Since this method makes it possible to measure highly aspheric surface quickly and accurately, it can be used in the production line.
© 2006 Optical Society of America
OCIS Codes
(090.1760) Holography : Computer holography
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: February 23, 2006
Revised Manuscript: March 31, 2006
Manuscript Accepted: April 11, 2006
Published: April 17, 2006
Virtual Issues
Vol. 1, Iss. 5 Virtual Journal for Biomedical Optics
Citation
Ho-Soon Yang, Jae-Bong Song, In-Won Lee, and Yun-Woo Lee, "Testing of steep convex aspheric surface with a Hartmann sensor by using a CGH," Opt. Express 14, 3247-3254 (2006)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-14-8-3247
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