Molded transparent photopolymers and phase shift optics for fabricating three dimensional nanostructures
Optics Express, Vol. 15, Issue 10, pp. 6358-6366 (2007)
http://dx.doi.org/10.1364/OE.15.006358
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Abstract
This paper introduces approaches that combine micro/nanomolding, or nanoimprinting, techniques with proximity optical phase mask lithographic methods to form three dimensional (3D) nanostructures in thick, transparent layers of photopolymers. The results demonstrate three strategies of this type, where molded relief structures in these photopolymers represent (i) fine (<1 μm) features that serve as the phase masks for their own exposure, (ii) coarse features (>1 μm) that are used with phase masks to provide access to large structure dimensions, and (iii) fine structures that are used together phase masks to achieve large, multilevel phase modulations. Several examples are provided, together with optical modeling of the fabrication process and the transmission properties of certain of the fabricated structures. These approaches provide capabilities in 3D fabrication that complement those of other techniques, with potential applications in photonics, microfluidics, drug delivery and other areas.
© 2007 Optical Society of America
OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(220.4000) Optical design and fabrication : Microstructure fabrication
(320.7110) Ultrafast optics : Ultrafast nonlinear optics
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: March 13, 2007
Revised Manuscript: May 3, 2007
Manuscript Accepted: May 3, 2007
Published: May 8, 2007
Virtual Issues
Vol. 2, Iss. 6 Virtual Journal for Biomedical Optics
Citation
Seokwoo Jeon, Daniel J. Shir, Yun Suk Nam, Robert Nidetz, Matthew Highland, David G. Cahill, John A. Rogers, Mehmet F. Su, Ihab F. El-Kady, Christos G. Christodoulou, and Gregory R. Bogart, "Molded transparent photopolymers and phase shift optics for fabricating three dimensional nanostructures," Opt. Express 15, 6358-6366 (2007)
http://www.opticsinfobase.org/vjbo/abstract.cfm?URI=oe-15-10-6358
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